Birck Nanotechnology CenterAll-User Meeting

January, 2013

BNC All-User’s Meeting Slide Deck January, 2013

Nano-material Safety• Currently minimal information is

available on the acute and chronic effects of exposure

• Exposure pathways (airborne and dermal absorption) is poorly understood

• New material synthesis

BNC All-User’s Meeting Slide Deck January, 2013

Handling Nano-materials• Reducing potential for exposure:

– Work with material is a solution• Double glove

• Wear a lab coat

– Dry material should be handled in an enclosure

BNC All-User’s Meeting Slide Deck January, 2013

General Housekeeping• Lithography Bay

– Cleaning up of spilled material and maintaining equipment in and around the solvent hoods

• Fume-hood Etiquette– Please remove trash and glassware following use

BNC All-User’s Meeting Slide Deck January, 2013

Cleanroom Reminders

• Waste Containers– Make sure capped following use

– Please make sure halogenated waste is not mixed with non- halogenated waste.

BNC All-User’s Meeting Slide Deck January, 2013

Unlabeled or partially labeled waste containers

Bay D – 80% fullBay M – 20% full

Bay N- 30% full

• Container are to have the name of the chemical

• And the estimated quantity placed in the container Partial and unlabelled bottles

BNC All-User’s Meeting Slide Deck January, 2013

Empty Container Disposal• Proper disposal of empty containers:

– Container has been rinsed and semi-dried using a nitrogen gun.

Cap has been removed.

Disposal label has been applied.

BNC All-User’s Meeting Slide Deck January, 2013

CHP/ RTK Compliance Plan• Chemical Inventories and Material

Safety Data Sheets

• Standard Operating Procedures

• Required Facility Training

• Engineering Controls

• Personal Protective Equipment

• Designated Areas of Use

Material

Safety

DataSheets

March 2007 reload calenda Monday March 12, 2007

S M T W T F S

1

2

3

4

5 BNC 105, Lab Orientation

6 BNC 150, Fume Hood Safety Training

7

8

9

10

11

12 BNC 105, Lab Orientation STS Silicon DRIE

13 BNC 150, Fume Hood Safety Training

14

15 BNC 206, Cleanroom Training

16

17

18

19 BNC 105, Lab Orientation

20 BNC 150, Fume Hood Safety Training

21 BNC 206, Cleanroom Training

22

23

24

25

26

27

28

29

30

31

BNC 105BNC 150

BNC All-User’s Meeting Slide Deck January, 2013

MSDS Locations First Floor Locations Second Floor locations

Material

SheetsData

Safety

BNC All-User’s Meeting Slide Deck January, 2013

MSDS’s at BNC

• MSDS manuals in the galleys are organized by lab room number

The chemicals filed numerically and the alphabetically by lab

Note: A list of general chemicals with MSDS’s are supplied are listed in the front of the manuals to reduce space and redundancy in the manuals

Note: A copy of the Chemical Hygiene Plan, Personal Protective Equipment Policy and Laser Safety Policy is available

BNC All-User’s Meeting Slide Deck January, 2013

Emergency Spill Materials• Chemical Spill Carts are available in the galleys for

minor (< 1 gallon ) Except for fluorine-based chemicals (i.e. HF, BOE, Ammonium Fluoride). Contact Staff for assistance

BNC All-User’s Meeting Slide Deck January, 2013

Chemical Spill Cart Locations

2nd Floor

1st Floor

BNC All-User’s Meeting Slide Deck January, 2013

Cleanroom Emergency Equipment

HF First Aid

Spill Carts

BNC All-User’s Meeting Slide Deck January, 2013

2nd Floor

1St Floor

HF Decontamination Solution Locations

BNC All-User’s Meeting Slide Deck January, 2013

Proper Pre-cleaning of Substrates

Toluene Acetone/ trace Toluene

IPA or methanol

Blow dry with nitrogen gun

Decant solvent Decant solvent

BNC All-User’s Meeting Slide Deck January, 2013

References• REM Booklets and Guidelines page:• Nanoparticle Safety and Health Guidelines

• REM Chemical Hygiene Program Page: http://www.purdue.edu/REM/ih/chp.htm

• Right-to-Know/Hazard Communication Program page: http://www.purdue.edu/REM/ih/hazcom.htm