ACTUATOR 98 - gbv.de · ACTUATOR 98 6th International Conference on New Actuators with Accompanying...

ACTUATOR 986th International

Conference on New Actuatorswith Accompanying Exhibition

17-19 June, 1998Bremen, Germany

Conference Proceedings

EditorHubert Borgmann

Published byMESSE BREMEN GMBH, Bremen, Germany

UB/TIB Hannover 89

TABLE OF CONTENTS

Microactuators

Technical Papers and Authors No. Page

Microactuators for Scanning and Other Applications 1.0 27T. Gessner, W. Dotzel, Technische Universitat Chemnitz, GermanyH. Fujita, University of Tokyo, JapanD. Collard, IEMN/ISEN, Lille, France

A Contact Free Suspended Micro Motor 1.1 35C. Aymon, R. Vuillemin, B. Aeschlimann, M. Kuemmerle,A. Wuersch, A. Boletis, H. Bleuler,Swiss Federal Institute of Technology, Lausanne, SwitzerlandE. Fullin, J. Berqvist, CSEM, Neuchatel, Switzerland

Piezoelectric Membrane Pump with 1.2 39Integrated Ball ValvesA. Feustel, O. Krusemark, J. MullerTechnische Universitat Hamburg-Harburg, Germany

In-Plane Oriented Fluid Control Components, 1.3 43Fabricated with New Etching TechniquesR.-E. Oosterbroek, J.W. Berenschot, S. Schlautmann,T.S.J. Lammerink, A. van den Berg, M.C. ElwenspoekUniversity of Twente, Enschede, The Netherlands

Strip Array for Scanning Applications with 1.4 47Frequencies up to 70 kHzK. Kehr, S. Kurth, R. Hahn, C. Kaufmann,J. Mehner, W. Dotzel, T. GessnerTechnische Universitat Chemnitz, Germany

Fully Batch Fabricated Liga Actuators Integrated 1.5 54on Piezoelectric Ceramic SubstratesH. Debeda, J. Mohr, J. Schulz, U. Wallrabe, J. WengelinkForschungszentrum Karlsruhe GmbH, GermanyC. Rembe, Universitat Ulm, Germany

High Speed Polygon Scanner 1.6 58U. Heim, Jenoptik Mikrotechnik GmbH, Jena, GermanyA. Albrecht, M. Klopzig, Technische Universitat llmenau, Germany

Microactuators


A Long-Stroke Thermopneumatic Actuator for 1.7 62Application to Microflow and Pressure RegulationT. G. Kang, K.-S. Seo, Y.-H. ChoKorea Advanced Institute of Science and Technology,Taejon, Rep. of KoreaO H. Baek, W. L Hwang, J. H. MoonSamsung Electronics, Ltd., Suwon, Rep. of Korea

Microstructurable Glasses, Structuring Technologies, P1 66Special Joining Techniques and Applications forMicroactuatorsA. Harnisch, K. Feindt, A. Ehrhardt, H. Baumgart,D. Hulsenberg, E. KallenbachTechnische Universitat llmenau, Germany

The Use of the Resonance Effect for P 2 70Micro-Opto-Mechanical ScannersTh. Frank, H. WurmusTechnische Universitat llmenau, Germany

Biaxial Micropositioning System with P 3 74an Integrated Position SensorTh. FrankTechnische Universitat llmenau, Germany

A Full-Wafer Mounted Self-Priming P 4 78and Bubble-Tolerant Piezoelectric Silicon MicropumpR. Linnemann, M. Richter, A. Leistner, P. WoiasFraunhofer-IFT, Munchen, Germany

Investigation and Modification of the Mechanical P 5 82Stress of Single Crystal Silicon Actuators Based onSurface MicromachiningK. Griesbach, A. Bertz, M. Kuechler, T. GessnerTechnische Universitat Chemnitz, GermanyW. Faust, R. Dudek, Fraunhofer-IZM, Berlin/Chemnitz, Germany

Microactuators


Cross-Coupling and Tolerances in Micromirror-Arrays P 7 86and the Effect on their ApplicationsS. Kurth, K. Kehr, J. Mehner, C. Kaufmann, W. Dotzel, T. GessnerTechnische Universitat Chemnitz, Germany

A Silicon Based Micropump for the Transport P 8 92of High Viscous Liquids and MudsN. Schwesinger, Technische Universitat llmenau, GermanyS. Bechtel, Hofer & Bechtel Industrieausrustungen GmbH,Mainhausen, Germany

Performance of a Large, Flat Electromechanical P 9 96Film Actuator PanelM. Antila, K. SaarinenVTT Manucfaturing Technology, Tampere, FinlandK. Kirjavainen, Panphonics Oy Ltd.,Tampere, Finland

Torque Characteristic of Micromotors and P 10 100Rotating MicrosystemsW. Brenner, Gh. Haddad, G. Popovic, A. Vujanic,D. Petrovic, A. Matzner, G. AbrahamTechnische Universitat Wien, Austria

Fluidic Microjoints Based on Spider Legs P 11 103M. Schworer, M. Kohl,Forschungszentrum Karlsruhe GmbH, GermanyW. Menz, Albert-Ludwigs-Universitat, Freiburg, Germany

A 3-Way Silicon Microvalve for P 12 107Pneumatic ApplicationsS. Messner, M. Muller, V. Burger, J. Schaible, R. ZengerleHahn-Schickard-Gesellschaft, Villingen-Schwenningen, Germany

Microdosage of Liquids by a Free Jet P 13 111Comprising Extraordinary Operating RangeN. Hey, M. Freygang, H. Gruhler, H. Sandmaier, R. ZengerleHahn-Schickard-Gesellschaft, Villingen-Schwenningen, Germany

Microactuators


On the Static and Dynamic Behaviour of an P 14 114Electrostatically Movable Plate ActuatorS. Kluge, G. Klink, M. Biller, B. Hillerich, P. WoiasFraunhofer-IFT, Munchen, Germany

The Electrolysis of Water: An Actuation Principle P15 118for MEMS with a Big OpportunityC. Neagu, H. Jansen, H. Gardeniers, M. ElwenspoekUniversity of Twente, Enschede, The Netherlands

A Normally Closed Active Valve Using P 16 122Bulk MicromachiningT.S.J. Lammerink, N. Olij, J.W. Berenschot, R.E. Oosterbroek,J.G.E. Gardeniers, C. Neagu, A. van den Berg, G.J.M. Krijnen,M.C. Elwenspoek, University of Twente, Enschede, The NetherlandsM. Haller, Medtronic Europe SA, Lausanne, Switzerland

Electromagnetic Active Micro Valve P 18 126for Fluids and Gases0. Krusemark, A. Feustel, J. MullerTechnische Universitat Hamburg-Harburg, Germany

Development of Thermally Buckling Microvalves P 19 129and Integrated Flow SensorsM.-J. Tsai, S.-C. Hsu, C.H. Chen, CY. WuMIRL/ITRI Chutung, Hsinchu, Taiwan

A Thermally Buckling Microvalve with P 20 130Integrated Flow SensorM.-J. Tsai, S.-C. Hsu, C.-H. Ke, R.-H. Jang, CY. WuMIRL/ITRI Chutung, Hsinchu, Taiwan

The 'Pusher Drive Motor' - A Novel Concept P 21 137for Rotary Actuators in Micro-TechnologyK. NottmeyerZEXEL Corporation, Hannover, Germany

A Linear Fluidic Microactuator P 22 143G. Bauer, D. Schlenker, M. Schuenemann, W. SchaeferFraunhofer-IPA, Stuttgart, Germany

Microactuators


Miniature Piezoelectric Relay with Low Operate P 23 147Voltage and Short Switching Time Using aMonolithic Multilayer Bender ActuatorL. Kiesewetter, K. PietschTechnische Universitat Cottbus, Germany

A Microvalve with Electromagnetic Actuator P 24 152A. Meckes, J. Behrens, W. BeneckeUniversitat Bremen, Germany

A Novel, Highly Scaleable and Very High- P 25 156Torque Micromotor for MEMS and MOEMSApplications Using the Mechanical Rectificationof Oscillatory MotionM. Tabib-Azar, B. SutapunCase Western Reserve University, Cleveland, USA

The Electric Power in Microsystems in Terms P 26 160of Size ReductionF. Therez, N. SenouciLAAS/CNRS, Toulouse, France

TB-BGA-Basic Elements for Microsystem Packages P 27 161V. GroGer, B. Michel, R. Leutenbauer, J.-P. Sommer, H. ReichlFraunhofer-IZM, Berlin, Germany

Piezoelectric Actuators


New Developments in Piezo Motors and Mechanisms 2.0 164P.D. AthertonQueensgate Instruments Ltd., Bracknell, United KingdomK. Uchino, The Pennsylvania State University, USA

Piezoactuators and Piezomotors for High Stroke/ 2.1 170Precise Positioning ApplicationsR. Le Letty, F. Claeyssen, F. Barillot, M.F. Six, M. DebarnotCedrat Recherche, Meylan , France

Surface Acoustic Wave Linear Motor 2.2 174M. Kurosawa, N. Osakabe, K. Tojo, T. HiguchiThe University of Tokyo, Japan

Piezoelectric Motors/Actuators for 2.3 177Automotive ApplicationsF. Butera, G. Caseilato,R. CostamagnaCentro Ricerche Fiat, Orbassano, ItalyM. PettigianiMagneti Marelli, Venaria, Italy

Development of High-Performing Piezoelectric 2.4 181Actuators for Transport SystemsP. Janker, F. Hermle, T. Lorkowski, S. Storm, M. WettemannDaimler-Benz AG, Munchen, Germany

Multi Gearing Compliant Mechanisms for 2.5 186Piezoelectric Actuated MicrogrippersH. Wurmus, R. SalimTechnische Universitat llmenau, Germany

New Approach to a Switching Amplifier for 2.6 189Piezoelectric ActuatorsH. Janocha, C. StiebelUniversitat des Saarlandes, Saarbrucken, Germany

Overview of Active Fiber Composites Technologies 2.7 193B.Z. Janos, N.W. HagoodMassachusetts Institute of Technology, Cambridge, USA



New Designs for Long Range, High Resolution, P 28 198Multi-Degrees-of-Freedom Piezoelectric ActuatorsJ.-M. Breguet, R. ClavelEcole Polytechnique Federale de Lausanne, Switzerland

High Response, Piezoelectric Piloted Servo-Valve P 29 202with Energy Saving FunctionW. HagemeisterRWTH Aachen, Germany

Actuation Principle and Motion Control of P 30 203a Three-Leg Piezoelectric MicrorobotH. Worn, Universitat Karlsruhe, GermanyR. Munassypov, Ufa State Aviation Technical University, RussiaS. Fatikow, Universitat Karlsruhe, Germany

Mechanical Approach to the Modelling of P31 207a Hybrid Transducer Type Ultrasonic MotorA.-G. KutzenkoKiev University, Ukraine

From the Theoretical Design to the Practical P 32 211Characterization of Traveling Wave Piezoelectric MicromotorsP. Cusin, P. Le Moal, E. JosephL.M.A.R.C, Besancon, France

From a Bidirectional Piezoelectric Translator to a P 33 215Rapid-High Precision Rotative-Linear ActuatorJ.C. Ferniot, J. Duffaud, P. Le MoalL.M.A.R.C., Besancon, France

The Generation of Marco-Torque-Block P 34 219M. Reuter, K. Voigtmarco GmbH, Dachau, Germany

Design of High Precision Mechanisms for P 35 223Generation of Rotary Motion Using Piezoelectric ActuatorsP. DorrerFraunhofer-IOF, Jena, Germany



Control of Piezoelectric Actuators in P 36 228Sliding Mode OperationF. Palis, U. Ladra, S. DzhantimirovOtto-von-Guericke-Universitat Magdeburg, Germany

Microelectronic Modules for P 38 232Smart Actuator ApplicationsP.K.H. Sommerfeld, D.J. JendritzaPhilips Mikroelektronik Module, Krefeld, Germany

Properties of a Piezoelectric Traveling Wave Motor P 39 238Generating Direct Linear MotionM. Hermann, W. Schinkothe, J. HaugUniversitat Stuttgart, Germany

Nanometer Precision Actuators and Mechanisms P 40 242P.D. Atherton, T. R. Hicks, M. McConnell, Y. Xu, P. RheadQueensgate Instruments Ltd., Bracknell, United Kingdom

A Manipulator Using Piezos in the Inertial P 41 245Sliding Mode for the Actuation in Six Degreesof Freedom SimultaneouslyI.J.B. van Hees, G.J.P. Nijsse, J.W. SpronckDelft University of Technology, The Netherlands

Simulation Model Used as Design Tool for P 42 249Traveling Wave Ultrasonic MotorsT. Sattel, P. Hagedorn, M. BergTechnische Universitat Darmstadt, Germany

Comparison of Experimental and Simulation P 43 253Data of Ultrasonic Traveling Wave MotorsM. Berg, P. Hagedorn, T. SattelTechnische Universitat Darmstadt, Germany

Small Size Travelling Wave Ultrasonic Motors P 44 256in Square StructuresS. Biwersi, J.F. Manceau, F. BastienCNRS - Universite de Franche Comte, Besancon, France



High Performance Speed Control for Inverter-Fed P 45 260Ultrasonic Motors Optimized by a Neural NetworkJ. Maas, T. Schulte, H. GrotstollenUniversitat Paderborn, Germany

Concept of a Control System for a Piezoelectric Drive P 46 264R. Kasper, J. Schroder, A. WagnerOtto-von-Guericke-Universitat Magdeburg, Germany

Vibration Control of a Mechanical Structure P 47 269with Piezoelectric Actuators - a Comparisonof Bimorph and Stack ActuatorsM. Martens, H. WallerRuhr-Universitat Bochum, Germany

Properties of Multilayer Actuators Made of P 48 273Antiferroelectric-Ferroelectric Phase-Switching MaterialP. Pertsch, Fraunhofer-IOF, Jena, GermanyM.-J. Pan, V.R. Vedula, S.-E. Park, S. Yoshikawa, T.R. Shrout,The Pennsylvania State University, USA

Displacement Amplification Mechanism P 49 278for Dynamic UseP. Pertsch, B. Hofer, G. Borchhardt, E. Wehrsdorfer, W. KartheFraunhofer-IOF, Jena, Germany

A New Design of a Three Axis Micromanipulator P 50 281U. ReilanderTechnische Universitat Munchen, Germany

New Methods of Signal Pre-Shaping Strongly P 51 285Increase Bandwidth of Closed Loop PZT ActuatorsR. GI6BPhysik Instrumente (PI) GmbH & Co, Waldbronn, Germany

Multi-Axis High Accuracy PZT Stage with P 52 288Active Trajectory ControlX. Zhao, H. MarthPhysik Instrumente (PI) GmbH & Co., Waldbronn, Germany



Finite Element Modeling of Transduction Materials P 53 292with Application to Cymbal Actuators and SensorsA.-C. Hladky-Hennion, IEMN, Lille, FranceA. Dogan, Anadolu University, Eskisehir, TurkeyR.E. Newnham, The Pennsylvania State University, USA

Study on Normalization Model of Piezoelectric P 54 296and Electrostrictive ElementsS. Lining, Z. Tao, Q. Dongsheng, C. HegaoHarbin Institute of Technology, Harbin, China

Preparation of Transition Metal Doped PZT Films P 55 300F. Gugenberger, E. Quandt, H. HolleckForschungszentrum Karlsruhe GmbH, Germany

A Piezo-Stepper Providing High Stiffness and P 56 304Accurate PositioningM. Versteyhe, D. Reynaerts, H. Van BrusselCatholic University of Leuven, Heverlee, Belgium

Compensation of the Creep and Hysteresis Effects P 57 309of Piezoelectric Actuators with Inverse SystemsK. Kuhnen, H. JanochaUniversitat des Saarlandes, Saarbrucken, Germany

Properties and Mechanical Performances P 58 313of PZT ActuatorsG, Belforte, M. Sorli, L. GastaldiPolitecnico di Torino, Italy

Miniaturised Coupled-Resonance Piezomotor P 59 318for an Optical SystemG. Diefenbach, F. Morales Serrano, C. ReichingerPhilips GmbH, Aachen, Germany

Modelling by Bond Graph of Piezoelectric Ceramics P 60 322Used in Ultrasonic MotorsE. Comte, A. El Hami, A, El MoudniEcole Nationale d'lngenieurs de Belfort, France



Reliability of Multilayer Actuators in Aggressive P 61 326EnvironmentsB. Andersen, T. Pedersen, W.W. WolnyFerroperm A/S, Kvistgard, Denmark

Piezoelectric Inch Worm Motor with P 62 327Monolithically Integrated Driving BlockU. Mescheder, Ch. Kotter, B. KatzensteinFachhochschule Furtwangen, GermanyT. Lang, IBTL GmbH, Rastatt, Germany

Experimental Determined Material P 63 332Properties of PZT Under High Voltage and LoadM. Stiiwing, H. Hanselka, E. BreitbachDeutsches Zentrum f. Luft- und Raumfahrt, Braunschweig, Germany

Tactile Actuators for Tactile Feedback Systems P 64 333M. Schueneman, Fraunhofer-IPA, Stuttgart, GermanyH. Widmann, Richard Wolf GmbH, Knittlingen, Germany

Piezoelectric Transformers: Principles, P 65 337Structures and ModelingS. Hallaert, E. Sarraute, M, Besbes, B. Le PioufleLaboratoire d'Electricite Signaux et Robotique, Cachan, France

Multi-Degree-of-Freedom Piezoelectric Actuators: P 66 341State of the Art and Latest DevelopmentsR. Bansevicius, Kaunas University of Technology, LithuaniaJ.A.G. Knight, De Montfort University, Leicester, United KingdomS. Ahmed, Intelligent Manufacturing Systems Ltd., Birmingham,United Kingdom

Thick-Film Type Photostrictive Actuators P 67 345P. Poosanaas, K. Uchino, The Pennsylvania State University, USAA, Dogan, Anadolu University, Eskisehir, TurkeyS. Thakoor, California Institute of Technology, USA

Roto-Linear Ultrasonic Motors P 68 349B. Koc,Y. Xu, K, UchinoThe Pennsylvania State University, USA

Magnetostrictive Actuators


Giant Magnetostrictive Materials and Applications 3.0 353E. Quandt, Forschungszentrum Karlsruhe GmbH, GermanyA.E. Clark, Clark Associates, Adelphi, USA

Magnetostrictive Inchworm Linear Actuator with 3.1 359Two Degree of FreedomL. Clavelier, O. Cugat, J. Delamare, G. ReyneLaboratoire d'Electrotechnique de Grenoble CNRS,St. Martin d'Heres, France

Active Vibration Damping with 3.2 363Magnetostrictive ActuatorsM.G. SallokerJoanneum Research, Graz, Austria

Microstructure and Magnetostrictive 3.3 367Property of Tb03Dy07Fe2 Thin FilmH. Uchida, M, Wada, H.H. Uchida, Tokai University, JapanH. Kaneko, Society of Non-Traditional Technology, Tokyo, Japan

Linear and Rotating Magnetostrictive Micro-Motors 3.4 372F. Claeyssen, N. Lhermet, Cedrat Recherche, Meylan, FranceJ. Betz, K. MacKay, D. Givord, Lab. L. Neel, CNRS, Grenoble, FranceE. Quandt, Forschungszentrum Karlsruhe, GermanyH. Kronmuller, Max-Planck-lnstitut fur Metallforschung,Stuttgart, Germany

Fabrication of a Magnetostrictive Membran-Type 3.5 376Micropump by Means of Magnetron Sputteringand Laser Assisted Silicon MicromachiningA. Ludwig, W. Pfleging, E. QuandtForschungszentrum Karlsruhe GmbH, Germany

The State-of-the-Art in TERFENOL-D Production P 69 380and PerformanceJ.D. Snodgrass, O.D. McMasters, M.D. BrooksEtrema Products Inc., Ames, USA

Magnetostrictive Actuators


Giant Magnetostrictive Multilayers for P 70 381Thin Film ActuatorsA. Ludwig, E. QuandtForschungszentrum Karlsruhe GmbH, Germany

A Magnetic and Mechanical Evaluation of a P 71 385Force Outlet Design in Magnetostrictive ActuatorsF. Stillesjo, G. EngdahlRoyal Institute of Technology, Stockholm, Sweden

Results and Prospects for the Project MADAVIC P 72 389(Magnetostrictive Actuators for Damage Analysisand Vibration Control)L. Lecce, F. FrancoUniversita di Napoli "Federico II", Italy

Effect of Twin Boundaries on the Magnetization P 73 395Processes in Terfenol-DX.G. Zhao, D.G. LordUniversity of Salford, United Kingdom

Modelling and Realisation of a Giant P 74 399Magnetostrictive VibratorL. Gros, G. ReyneLaboratoire d'Electrotechnique de Grenoble CNRS,St. Martin d'Heres, FranceL. Perrier, D. Bondoux, METRA VIB, Limonest, France

Magnetic Properties of Giant Magnetostrictive P 75 403Compressive StressM. Wun-Fogle, J.B. Restorff,Naval Surface Warfare Center, West Bethesda, USAA.E. Clark, Clark Associates, Adelphi, USAj . F. Lindberg, Naval Undersea Warfare Center, Newport, USA

Cryogenic Magnetostricitve Actuators: P 109 407Materials and ApplicationsJ.A, Dooley, C.A. Lindensmith, R.G. Chave, J. Graetz,Jet Propulsion Laboratory, Pasadena, USAB. Fultz, California Institute of Technology, Pasadena, USA

Electro/Magnetorheological Actuators


Properties and Applications of Commercial 4.0 411Controllable FluidsM.R. Jolly, Lord Corporation, Cary, USAM. Nakano, Yamagata University, Japan

Low-Cost MR Fluid Devices 4.1 417J.D. CarlsonLord Corporation, Cary, USA

Application of an Electrorheological Fluid 4.2 422within Hydrodynamic Steering AidS. Schwarz, O. StenzelUniversitat der Bundeswehr Hamburg, Germany

Demands on MR Fluid Energy Transducers 4.3 426in Shock AbsorbersR. Bolter, H. JanochaUniversitat des Saarlandes, Saarbrucken, Germany

Development of Electrorheological Microactuators 4.4 430M. Kohl, S. Durr, E. JustForschungszentrum Karlsruhe GmbH, GermanyD. Pirck, RWE-DEA AG, Hamburg, Germany

Hydraulic ER-Fluid Positioner 4.5 434E.-V. Korobko, Z.P. Shulman, L. N. DanilevskyHeat & Mass Transfer Institute, Minsk, Belarus

Damping of Piezo Actuators with P 77 438Magnetorheological FluidsB. Malsch, T. StrohlaTechnische Universitat llmenau, Germany

Factors Governing Electro-Rheological Motion P 78 445Control and its Application to High Precision-PositioningT. Saito, Tokyo Engineering University, JapanN. Sugimoto, National Institute of Industrial Safety, Tokyo, Japan

MRF - Clutch - Design Considerations and Performance P 81 449D. Lampe, A. Thess, C. DotzauerTechnische Universitat Dresden, Germany

Electro/Magnetorheological Actuators


Electrorheological Fluids Applied to Impulsive Loads P 82 454A. K. El Wahed, J.L Sproston, G.K. SchleyerThe University of Liverpool, United Kingdom

Shape Memory Actuators


State-of-the-Art of Shape Memory Actuators 5.0 457A.D. Johnson, TiNi Alloy Company, San Leandro, USAJ. Kramer, Daimler-Benz AG, Stuttgart, Germany

Shape Memory Thin Film Composites with 5.1 461Adjustable Transformation Temperatures and HysteresisB. Winzek, E. Quandt, H. HolleckForschungszentrum Karlsruhe GmbH, Germany

Direct Joule's Heat Crystallization Treatment for 5.2 465TiNi Thin Film Micro ActuatorK. Kuribayashi, S. ShimizuYamaguchi University, Ube, Japan

Innovative Processing Techniques of Joining 5.3 469Geometries for Miniaturized Components ofShape Memory Alloys Using Laser IrradiationH. Haferkamp, F. von Alvensleben, M. Goede, O. Thurk, S. PaschkoLaser Zentrum Hannover e. V., Germany

Shape Memory Microvalves for High Pressure 5.4 473ApplicationsM. Kohl, E. Just, A. Strojek, K.D. Skrobanek, W. PflegingForschungszentrum Karlsruhe GmbH, GermanyS. Miyazaki, University of Tsukuba, Japan

Actuators and Drives Based on Cu-AI-Ni Shape 5.5 478Memory Single CrystalsA. Priadko, S. Pulnev, I. Viahhi, V, Vetrov, V. YudinInstitute of Robotics and Technical Cybernetics, St. Petersburg, Russia

Control and Positioning Behaviour P 83 482of SMA-Actuated Multi-Axes ManipulatorsG. Pritschow, G. Kehl, J. SeidlUniversitat Stuttgart, Germany

Realization and Modelling of an Endoscope P 84 486Element Using a Shape Memory Alloy Wire as ActuatorC. Lexcellent, B. Gabry,L.M.A.R.C, Besancon , FranceP. Minotti, LIMMS-CNRS, Tokyo, Japan



Study of SMA Actuation to Develop a P 85 490Modular, Useradaptable Hand ProsthesisJ.L. Pons, H. Rodriguez, R. Ceres,Instituto de Automatica Industrial, Argenda del Rey, Madrid, SpainD. Reynaerts, Catholic University of Leuven, Heverlee, BelgiumW. Van Moorleghem, Advanced Material Technologies n.v.,Herk-de-Stad, Belgium

Application of Finite Element Analysis to P 86 494SMA Actuator Components with Non-Uniform StressW. Xu, G. Stockham,T. Frank, A. CuschieriDundee University, United Kingdom

Shape Memory Controllers for Space Vehicles P 87 498A.I. Razov, St.-Peterburg State University, RussiaA.G. Cherniavsky, Yu.D. Kravchenko, V.Yu. Korneev,ENERGIA, Moscow Region, Russia

A New Concept of Monolithic Shape Memory P 88 499Alloy Micro-Devices Used in Micro-RoboticsY. Bellouard, R. Clavel, R. Gotthardt, T. Sidler, J.-E. BideauxEcole Polytechnique Federale de Lausanne, Switzerland

Shape Memory Effect and Recovery Stress P 89 503Measurements in High Temperature Ti-Ni-Hf ShapeMemory AlloysP. Olier, Y. Tournie, CEA Saclay, Gif-sur-Yvette , FranceC. Roblin, University Montpellierll, France

Mechanical Properties and Control of P 90 507Shape Memory Alloy Thin Film ActuatorK. Kuribayashi, S. ShimizuYamaguchi University, Ube, Japan

Fabrication and Transformation Characteristics P 91 511of Reversible Shape Memory Alloy Thin Film ActuatorsK. Kuribayashi, S. ShimizuYamaguchi University, Ube, Japan



Adaptive Technique for Radiation Pattern Shaping P 92 515of Parabolic Mesh Antennae: A Low Cost Applicationof SMA Actuators in Spacecraft0. de Week, D. Miller, J. HansmanMassachusetts Institute of Technology, Cambridge, USA

Thermomechanical Properties of TiNi Shape Memory P 93 521Alloy and Application to an Actuator and an EngineH. Tobushi, T. Nakahara, T. Hashimoto, Y. Shimeno,Aichhi Institute of Technology, Toyota, JapanK. Tanaka, Tokyo Metropolitan Institute of Technology, Japan

Thermomechanical Properties of Polyuretheane- P 94 525Shape Memory Polymer and Their ApplicationsH. Tobushi, T. Hashimoto, N. Ito,Aichhi Institute of Technology, Toyota, JapanS. Hayashi, Mitsubishi Heavy Industries, Ltd., Nagoya, JapanE. Yamada, Churyo Engineering Ltd., Nagoya, Japan

Control of a Self Moving Tube Driven P 95 529by SMA-spring CoilsA. Rafoth, R. Steinhardt, H. MrugowskyUniversitat Rostock, Germany

An SMA Multi-Actuator System Based P 97 533on the Artificial Muscle PrincipleM. Leester, M. Schmidt, S. Buttgenbach,C. Keilhack, R. Pittschellis, J. HesselbachTechnische Universitat Braunschweig, Germany

Low-Power Electromagnetic Actuators


Electromagnetic and Design Aspects of 6.0 537Magnetic Mini-ActuatorsR. Belmans, K. HameyerCatholic University of Leuven, Heverlee, Belgium

A Novel Long Stroke Planar Magnetic Bearing 6.1 541ConfigurationA. Molenaar, E.H. Zaaijer, H.F. van BeekDelft University of Technology, The Netherlands

Contribution to Linear Mini-Actuators with 6.2 545Multilayer Planar WindingsR. Hanitsch, N. StumvollTechnische Universitat Berlin, Germany

A Novel Linear Micromachined Electromagnetic 6.3 548Actuator Including Magnetic SuspensionM. KlopzigTechnische Universitat llmenau, Germany

Series Production and Testing of a Micro Motor 6.4 552U. Berg, M. Begemann, F. Michel, L.Weber, Th. WittigInstitut fiir Mikrotechnik Mainz GmbH, GermanyB. Hagemann, Berger Lahr GmbH & Co. KG, Lahr, GermanyK.-P. Kamper, FH Aachen, GermanyC. Thurigen, Dr. Fritz Faulhaber GmbH & Co. KG, Schonaich, Germany

Linearmotor with Integrated Linear Resolver 6.5 556P.-K. BudigEAATGmbH Chemnitz, Germany

Subfractional Horsepower Integrated P 99 559Linear/Rotary MotorB. Dubois, T. StacyHaydon Switch and Instrument Inc., Waterbury, USA

A Magnetically Guided Precision Drive P 100 563with 6 Degrees of FreedomS. Kovalev, E. Saffert, E. KallenbachTechnische Universitat llmenau, Germany

Low-Power Electromagnetic Actuators


smoovy™ - a New Modular Approach for P 101 566MiniaturizationA. DrappRMB SA, Biel-Bienne, Switzerland

Electrodynamic Actuator for Turning of P 102 568Non-Rotationally Symmetric SurfacesM. Week, H. OezmeralFraunhofer-IPT, Aachen, Germany

Design Rules and Manufacturing of P 103 572Micro Gear SystemsC. Thurigen, U. Beckord, R. Bessey,Dr. Fritz Faulhaber GmbH & Co KG, Schonaich, GermanyF. Michel, Institut fur Mikrotechnik Mainz GmbH, Germany

A Micro Robotic Arm for a Self Propelling P 104 576ColonoscopeJ. Peirs, D. Reynaerts, H. Van BrusselCatholic University of Leuven, Leuven, Belgium

Design of Very Small Electromagnetic and P 105 580Electrostatic Micro ActuatorsK. Hameyer, R. BelmansCatholic University of Leuven, Leuven, Belgium

A New Rotation-Thrust Drive for High-Precision P 106 584ApplicationsL. Gobel, W. HofmannTechnische Universitat Chemnitz, Germany

Dynastie Actuator for Active Control of P 107 590Vehicle Seats and SimulatorsF. Luc, H. Goutelard, G. Oddoart, M. LagierThomson Marconi Sonar S.A.S, Sophia Antipolis , France

Dynamic Electromagnetic Simulation of P 108 591a DC SolenoidS. RwakasenyiAnsoft Europe, Munchen, Germany

ACTUATOR 98 - gbv.de · ACTUATOR 98 6th International Conference on New Actuators with Accompanying...

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