13. 16001630 Nano Focus Semicon Taiwan 2011

8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011

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Optical 3D Surface Metrology and Analysis

NanoFocus - The Company

Optical 3D surface measurement tools for Research, Quality and Production Control Founded 1994 Focus: Automotive, Semiconductor, Solar, Medical, LEDs, Steel, Forensic, etc. Installed base: > 700

NanoFocus HQ,Oberhausen

NanoFocus Inc.,

Richmond, VA, USA NanoFocus,Ettlingen

NanoFocus,

Munich NanoFocus,Singapore




µsurf® 3D Microscopy

µscan® 2D - 3D Profilometry

point

line

area

area (single)areastitching

Product lines


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µscan ® - Point sensorprofilometer


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µscan ® Sensors

Line sensor

Autofocus AFConfocalCF

Chromatic CRT


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NF µsurf ® - Area SensorNanoFocus – 3D Confocal Microscopeµsurf ® 3D-Microscope


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µsurf ® Technology

Light Source

CCD camera

MultiPinholeFilter

Objective

Sample




Product categories

Standard products

(µsurf explorer, µsurfmobile, µscan explorer)

Customized systems

(µsurf custom, µscancustom, µsprint custom)

Business solution

(µsurf solar, µsurf

cylinder, µsurf blade etc.)

Integration

(µsurf OEM, µscan OEM,

µsprint OEM)




Applications: Semiconductor

Wafer back grinding

Micro viasGlue dispensing




Applications: Semiconductor

0.0 99.8 199.5 299.3 399.1 498.9[µm]

0.20 µm

-1.00

-0.60

-0.20

0.20

0.60

1.00

[µm]

Nanofocus Asia

Profile

w0=53.2 w1=58.4

h2=-0.534 h3=-0.519

Wafer bumps

Laser marking




Applications: LEDs




Applications: Lens

Aspherical MicroLenses

Fresnel MicroLenses




Applications: Lens




Applications: Solar

Laser ablation on etched multi Si

Etched mono Si

Finger on multi Si with AR coating

Laser scribe on thin film substrate

http://sg.wrs.yahoo.com/_ylt=A0S0zu7zXQVOekkADQsl4gt.;_ylu=X3oDMTBpZm5udGl1BHBvcwM1BHNlYwNzcgR2dGlkAw--/SIG=1ghf2m8re/EXP=1309003379/**http%3a//sg.images.search.yahoo.com/images/view%3fback=http%253A%252F%252Fsg.images.search.yahoo.com%252Fsearch%252Fimages%253F_adv_prop%253Dimage%2526va%253Dsolar%252Bcell%2526fr%253Dfp-yie9%26w=176%26h=155%26imgurl=www.solarnavigator.net%252Fimages%252Fsolar_cell.jpg%26rurl=http%253A%252F%252Fwww.solarnavigator.net%252Fsolar_cells.htm%26size=9k%26name=solar%2bcell%2bjpg%26p=solar%2bcell%26oid=e9126b463879bf86%26fr2=%26no=5%26tt=91660%26sigr=11d40timg%26sigi=11chbobt6%26sigb=12okc8u29%26.crumb=YuV9MZNf15Q



Optical 3D Surface Metrology and Analysis15 / 57

1 2 3 4 5

0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 mm

痠

-10

-5

0

5

10

15

20

25

1 2 3 4 5

Maximum height 18.3痠 17.3痠 13.6痠 17.4痠 21.5痠

Mean height 17 痠 13.8痠 12.1痠 14.2痠 19.3痠

Width 0.0809 mm 0.418 mm 0.559 mm 0.384 mm 0.0876 mm

Extracted profile

Height measurement

Automated height and width

analysis on anti-reflecting coating

Applications: Solar




0 25 50 75 100 125 150 175 200 225 250 275 300 痠

痠

-2

-1.5

-1

-0.5

0

0.5

L R

1

Maximum height 1.31 痠

Mean height 1.21 痠Width 43.2 痠

Extracted profil e

Laser scribes

nm-scalerepeatability within

seconds

Applications: Solar




Analysis of pyramid structures

Mean pyramid angle: 42.3°

Mean pyramid height: 1.57µm

Clear surfaceanalysis

Applications: Solar




Applications: Automotive

car body

engine(cylinder, piston rod ..)

panel(a-reflex-coat...)

brake, tires

catalyser,

particulate filter

lighting

Functional surfaces in automotiveindustry





Intention of surface treatment• less wear lifetime• more efficient oil / fuel

consumption

Honed surface AluSil® surface




500µm

500µm

2µm


0.000

642.2

[µm]

619.7

[µm]

0.0 128.2 256.4 384.7 512.9 641.1

[µm]

0.50 µm

-4.00

-3.00

-2.00

-1.00

0.00

1.00

[µm]

NanoFocus AG

Profile

56,8

Y = -2,949

Y = -1,423

Y = -1,021

Y = -0,005




Applications: Metal

Quality control of roll surfaces and sheet metal

• formability

• varnish ability• appearance

Sheetmetal

Roll

320 X 320 X 30µm320 X 320 X 30µm




Applications: Metal

Steel Roll Production




Applications: Metal




Applications: Medical

C o a t i n g

T h i c k n e s s

T o p o g r

a p h y

Stents

• Roughness• Coating thickness




Artificial joints Dental implants

Applications: Medical




Applications: Printing




Applications: Forensic

Scratches & Marks

• Fingerprint of tool and specimen




Scanning ElectronMicroscope

X

Y

Z

profile in Z measurement

NanoFocus µsurf® 3D

µsurf® in comparison with SEM




Compared by

NIST: National Institute of Standards & Technology, USA, 2005

Absolute Correlationnon-contact µsurf: 99%

µsurf® in comparison with stylus

non- con ta c t µ s ur f

® pro be

ta c t i le pro be



Optical 3D Surface Metrology and Analysis32

NanoFocus - References




NanoFocus Partners

NanoFocus AG




If you like to

in micro and nano structure

NanoFocus AG

NanoFocus AG




then join

Thank you for your attention

NanoFocus AG

NanoFocus AG




NanoFocus AG

NanoFocus AG




NanoFocus AG

13. 16001630 Nano Focus Semicon Taiwan 2011

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