US ATLASHL-LHC Upgrade BASIS of ESTIMATE (BoE)

Date of Est: 3/1/193/28/2018Prepared by: Alessandra CiocioReviewed by: Carl HaberResponsible Inst: Brookhaven National LaboratoryLawrence Berkeley National LaboratoryUC Santa CruzDocdb #: HL-LHC-doc-455

WBS number: 6.2.3

WBS Title: Strips Tracker Hybrids

WBS Dictionary Definition: This WBS refers to the fabrication of hybrids for the barrel part of the ITk silicon strip tracker. The hybrid is a flex circuit with passive components, carrying a controller chip, the HCCstar (6.2.2.3.2, 6.2.2.4.2) and 10 front end readout chips, the ABCstar (6.2.2.3.1, 6.2.2.4.1). The hybrid is mounted on the module (6.2.4) which is the basic unit of the strip tracker. The module contains a sensor which is divided into either four (short strip or SS) and two (long strip or LS) longitudinal segments and has 1280 readout strips/segment with a 75 m pitch. Each module is approximately 10 cm x 10 cm. TThe sStrip sensors are read out with the electronics that are mounted on a hybrid which is affixed to the sensors on the module. There is are two(one) hybrid per (s) on the short (long) strip version of the module, and two hybrids per long strip module. These modules are then mounted on to stave cores (6.2.1), each loaded stave consisting of 14 modules on each side. The ITk barrel detector has 392 staves configured in 4 readout layers.

A total of 14784 hybrids are required for the barrel part ITk strip detector, of which the US will produce and test half (7392).

There will be three module/hybrid production sites in the U.S., each doing an equal share of the production. The sites will be BNL, LBNL, and UCSC. All the assembled and tested modules will then be shipped to BNL where they will be mounted on stave cores. Hybrid assembly and testing, at each site, will follow an identical process procedures at each site consisting of parts loading, wire bonding, electrical test, burn-in, and retest.

Estimate Type (check all that apply – see BOE Report for estimate type by activity):

___ Existing Purchase Order or Work Complete__ Engineering Build-up_X_ Extrapolation from Actuals_X_ Analogy_X_ Expert Opinion

Supporting Documents (including but not limited to): see Attachments 1-179

1

Details of the Base Estimate (Explanation of the Work)

Prototyping Phase

Prior the pre-production phaseStarting in FY17, the three sites went through a period (FY17) of prototyping in order to gain experience with the assembly and testing procedures, and train technicians early. Fixtures and DAQ were acquired or procured, work spaces were prepared. LBNL already had a The clean rooms existed in the case of LBNL and is equipped with wire bonders, and precision measurement devices, such as Smartscopes. BNL completed built a their new cleanroom and at UCSC an extended addition to the one already there is in progresan existing ones. For all three sites, new equipment and testing systems will be in place before production start.

Before making the first electrical prototypes, the 3 sites built mechanical hybrids to be assembled onto thermal-mechanical modules to form a thermal-mechanical stave. That was important to understand the gluing process, to exercise handling and bonding procedure.

The system for burn-in is underwasstarted to be developedment during this phase at UCSC, . That will allow to perform a long-term test at different temperature settings of multiple hybrids in parallel (there are eight hybrids are panelized on a panelin groups of eight) in parallel. The system will be available during pre-production phase. This system, will be finalized by the end of the current calendar year (2018), and will be adopted by the other two sites, LBNL and BNL.

During this phase, UCSC and LBNL haves also been working also on developing the system to cure with UV (using LEDs on a flex and designing a custom designed fixture) the glue used to attach the 10 front end chips on a hybrid. This system uses LEDs on a flex, and a custom designed fixture and has to meet the technical specifications. The first version of Once finalized, theseboth systems will be then be adopted by the other two sites, (LBNL and BNL). The system was finalized during the first preproduction phase and will be adapted to work with new version of the hybrids (available in the fall).

The very first electrical prototype hybrids were used to make the modules that went on the US stavelet, a 3-module stave prototype.

The prototyping developments will be finalized during the first part of the preproduction phase.

Preproduction Phase

Preproduction consists of three phases, each partly defined by the availability of the version of the components used, such as thee.g.: ASICs.

Table 1. Pre-production phases, timescale and productionPreproduction 1 Oct t 2017 DecSep 2018 0.5 %Preproduction 2 Oct 2018Jan 2019 Jun 2019Jan 2020 1 %Preproduction 3 FebJan 2020 Aug 2020Feb 2021 4 %

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Preproduction 1 started at the beginning of FY18 with the production of the 26 modules for the first electrical stave prototypes (2 staves, each with 13 modules – single sided).

Each site is buildingbuilt 24 hybrids during this phase.

Preproduction 2 and 3 will be extending over FY19 and until August 2020., Pproduction lines will be scaled up to ensure the necessary throughput. According to the current schedule, a large fraction of the hybrids built during preproduction 3 will have the final version of the ASICs.

The basic hybrid assembly sequence is as follows:

[1.] Hybrids arrive in panels Flex sheets containing (8 20 hybrids (2 are test coupon hybrids)/panel – later will be 6 arrive in LBNL hybrids/panel) from the UK

[2.] Send to industry for SMD loading (in production)[3.] InspectionFinal QC is performed on the flex sheets (then sheets are sent to UCSC and BNL)1.[4.] ABC and HCC die attach and UV curing2.[5.] Metrology3.[6.] Wirebonding4.[7.] Inspection5.[8.] Electrical test6.[9.] Repair if needed7.[10.] Burn-in (and more metrology right after)8.[11.] Storage9.[12.] Singulation (removing individual hybrids from multi-hybrid panels)

Preproduction is the major training phase where the technicians learn and tune up the process in order to efficiently and reliably meet the required production rates of hybrid assembly and testing.

Production Phase

The number of modules required for the ITk barrel detector is given in table 2. The U.S. will build 50% of the ITk barrel detector. This corresponds to 14,7847392 hybrids that will be built at modules at three sites: BNL, LBNL and UCSC. The assembly and testing steps are the same as in preproduction.

The number of modules required for the ITk barrel detector is given in table 2. TIn table 23 shows the US deliverables for ITk barrel modules are showndetector, taking into account the additional hybrids that need to be assembled (23%) based on the estimated yield for stave, modules, and hybrids.. The assembly and testing steps are as for preproduction.

Table 2 . Total full ITk barrel (Redundant) # of Hybrids # of Modules # of Staves14784 10976 392

The Hybrid inverse yield is 1.237 which is the product of the loss of staves (1.053), modules (1.095), and hybrids (1.073).

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The loss of staves which is 1.053, is coming from the estimate that they will have ~ 95% yield (starting from module loading + integration in barrel). The loss of modules is 1.095 if we consider a two-hybrid module and a yield of 98% per gluing step, 99% per bonding step, 98% rejections in testing, 99% is handling. The yield in hybrids is estimated to 98% at inspection, 98% discrete loading, 99% in ASIC gluing, 99% for ASIC bonding, and 99% after testing. The yield loss for hybrids is 1.073. These yields have been calculated across the entire strips project and are based upon experience from a variety of previous projects, including ATLAS SCT, CMS tracker, ITk R&D.

Table 2 3 . ITk barrel deliverables for the US

Hybrids to start

Hybrids to send to modules

Modules to start

Modules to send to BNL

Staves to assemble at BNL

Staves to deliver to CERN

US staves in ATLAS

9119 8499 6310 5762 206 206 196

The assembly and testing steps are the same as in preproduction. Hybrids production will start in September February 20210 and will end in April February 2024, for a duration of 3644 months. There will be 43 batches of hybrids assembled. For the first twelve months, we will build an average of 12 the first year we will build long strip modules, requiring one hybrid/module, and after a short ramp up, we will build 66 hybrids/batch/site.???, ramping up to 66 hybrids/batch/site.

In the subsequent months (September 2021 – July 2022) hybrids will be assembled in at a rate of 66 hybrids per batch/site, to be used for long-strips modules, for which only one hybrid per module is required. The rate of production of hybrids will increase to 84 hybrids/ per batch/ (per site ) in the last year and a halfstarting by January 2023, in Aug 2022,after another period of ramp-up to allow the changes in tooling and assembly stations to take place for the production of since two hybrids per module will be required for the short strips modules. These will require 2 hybrids per module. The average rate of hybrids production is 4/ per day/site. (per site or in total??).

Rate of production taking into account the comulative yield loss of 23%.??? What does it mean?

In Ttable 34 we show the milestones and the tiers for hybrids at one institute (LBNL as an example) with incremental percentage of hybrids produced every 12 months.as it appears in the cost books. TO BE REPLACE WITH THE NEW TABLES

Table 34. Hybrids assembly milestonesSeptember 2020 Production starts September 2021 18% hybrids assembled and tested September 2022 45% hybrids assembled and tested September 2023 76% hybrids assembled and tested April 2024 100% hybrids assembled and tested

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February 2021 Production starts

Total Cost by Institution and Control Account from P6 output

6.02.03 Hybrid Assembly TO BE REPLACE WITH THE NEW TABLES

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6

Cost Estimate Description

*** I would chose only one lab (LBL?) and use it as an example*** Remove BNL. Confusing!!! ***Table 4 shows tThe material cost (the example is for LBNL) (and for BNL in FY18) by type of material and by year. is described in the table below.

Table 4. Material cost for LBNL (in parenthesis the total cost) SOME DATES (AND SOME AMOUNTS – BUT TINY) IN P6 HAVE MOVED/CHANGED SO I LEAVE THE TABLE AS THE ORIGINAL NEED TO DECIDE WHAT NEEDS TO BE UPDATED/FIXED5

Type of material/purchase FY18 FY19 FY20 FY21 FY22 FY23

LBNL: General equipment (burn-in, computer, chiller, DAQ, fixture)

60,000 (77,250)6/11/18HA23200Mline:1738

Wire bonderBNL: General Equipment (chiller, dessicator storage, DAQ boards , plasma clean stages , and computers

37,1404/30/18HA13170Mline:1378

150,000(159,135)10/16/18HA24210M

General material and equipment including furniture for cleanroomWire bonder

86,400(114,577)5/7/19HA24200M150,00010/16/18HA24210Mline:1777

Hybrid panel SMD General material and equipment including furniture for cleanroom

86,4005/7/19HA24200Mline:1775

37,140(48,294) 10/31/19HA260038M

Hybrid panel SMDHybrid panel SMD

37,14010/31/19HA260038Mline:1816

74,290(99,500)10/30/20HA260298M

Hybrid panel SMDHybrid panel SMD

74,29010/30/20HA260298Mline:1857

74,290(102,488)10/29/21HA260808M

Hybrid panel SMDHybrid panel SMD

74,29010/29/21HA260808Mline:1934

74,290(105,565)11/10/22HA261308M

Hybrid panel SMD 74,2907

11/10/22HA261308Mline:2011

In the next pragraphsparagraphs we will describe the cost for the different phases.

Prototype and Preproduction Phase Costs

For hybrids Dduring the prototype and pre-production phase we will acquire the fixtures, DAQ, and cooling gear equipment needed to carry out the assembly and test of the hybrids. These are covered in the FY17 and FY18 budgets. Parts of the labor used to establish and document these systems, and to train technicians, comes from uncosted scientists, post-docs, and students. Some effort also comes from engineers that were supported on other generic detector development projects which encompass aspects of technology relevant to the HL-LHC. Technician effort is based upon experience from the R&D and prototyping activities which preceded FY17. This experience included the fabrication and test of earlier electrical prototypes, thermo-mechanical hybrids, and the entire construction of the existing ATLAS tracker.

The following tables summarize the general material and equipment cost in these phases (ex. LBNL). Five hybrids can be assembled and tested in a day—is this the best place to say this??. We need the upper limit of five hybrids a day because there will be long strips modules (requiring one hybrids per module) and short strips modules (requiring 2 hybrids per module). The average is 2.5 modules/day required to meet the production schedule. Some engineering oversight effort is included as well.

Equipment in FY18 at LBNL ($)Total: 30KLeica Microscope 4,100DC Power supplyDAQ boards x2 1,5601,000Keysight E3631A LV power supply 1,149UV curing: PCB 1,0003,739LED 500MA 100MW 405NM – EDISON OPTO 2,000700Material for fixtures, jigs, dummy parts 155,000FLC Stepping motor for metrologyProtection gears (for UV)

5,380500

Hybrids panels for testingKeysight E3631A LV power supply

5,0001,149

Huber CC-505 chillerScientific Industries Analytical Balance

99510,041

Upgrade of the glue dispenser robot 5,150Vacuum pump x2 1,000Air Quality Monitor 900 Sub Total 40,863 Consummables (description in attachment 1) 12,410

Total 53,273

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There is also $37K of material/equipment cost at BNL in FY18 (items for BNL are a subset of the above)Equipment in FY18 at BNLTotal: 40KDessicator storage (2x) 2,500Chiller 19,000Booster pump 6,400Microscope (3x) 1,800Vacuum pump (4x) 2,000DAQ boards x4 2,000Plasma clean stages x2 5,200Computers x2 2,000

How about Sta Cruz? No equipment for them? Either one lab, or all 3 institutes. ALSO please be consistent with the format. 10K, 10000, $10,000. The latter is preferred.

Equipment in FY19 at LBNL ($)During FY19 we will need to have in place all other the equipment required for production listed in the table below. That would include:Total: 80K

Equipment Estimated Upgrade of the glue dispenser robotPlasma cleaner (no quote yet)

5,15025K (Quote not available)

Computers and DAQVacuum pumps 8,00010KTest lab and cleanroom tablesComputers and DAQ

10,00010K

ToolingTest lab and cleanroom tables 11,0005KDessicator Storage 5,000Cleanroom enclosureMaterial for fixtures and test systems

10,000 (including installation)5K

Plasma Clean Stages x2Cleanroom enclosure 5,2007K (not including installation)Upgrade of glue dispenser 5,150Air freight for wire bonder 8,000PiQC for 2 wire bonders 20,000

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Backup glue dispenser and/or encapsulation(to be decided with the ITK collaboration) Total $

90,00015K (medium cost option)

The cost for consumable is in attachment 1. Doesn’t this belong to the next paragraph?

Production M&S Costs

The Hybrids consist of the hybrid substrate, the passive components (SMD) the FE ASICs and controller chip (HCC), glue and bonding wire.

The hybrid substrates are provided (in panel containing 6 Hybrids) by the UK and the cost of the bare flex is covered by the overall UStheir share of the ATLAS Upgrade Project. The SMD mounting is now agreed that will be done in the UK, therefore the US (LBNL) will receive the complete flex. The cost for the FE ASICs and controller chip (HCC) is described in the Readout Electronics BoE.

Cost to SMD loading components and loading (at the moment believed to be compatible to having to pay for the same product in the UK) Components for SMD loading (purchase in FY19) 18,000 SMD loading at external company (in 4 parts) 260,000

The description of the cost for the surface mounting components is included in attachment 2.

The main cost is in the SMD parts mounting which will be done by a US assembly housein the UK. This is a well-developed service and costed reliably if it was done in the US. We expect a very similar cost for the same work done in the UK. Quote is included Ain attachment 3 to estimate the cost.LBNL will manage thistake care of this task for all sites. The budget for the loading of hybrid substratespayment of the flex sheets with surface mounted components is attributed to LBNL and will beis divided in four years (as shown you can see in Ttable 4) and are in P6 costed at the beginning of each production fiscal year in the resource loaded schedule (but need to be fixed for one year in P6).. (What does this mean? IS it or is it not split in 4 in P6? IF it is, then why mentioning it?)

In addition to the component costs described above, there are additional M&S costs in order to acquire the necessary infrastructure for production and testing at the various sites. These have been estimated from prior experience of understanding equipment needs and current market pricing for major equipment such as wire-bonders. These are mainly costed in the pre-production years and are described in the Attachments, which include estimates and current quotes from vendors, where available.

Production Labor Costs

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Labor costs in FY17-19 are for design, prototyping, and preproduction tasks and are for engineers and technicians. Labor costs in FY20-24 are largely for technicians and students (undergrad and graduate). (students? Undergrad students? Specify). Some engineering is included in an oversight role. The labor costs are elaborated below. For each of the 3 sites, there are slightly different flavors of labor so the FTE’s per task are not always the same, but are similar or cover similar efforts. At some sites, students are costed while at others they are free.

Labor costs are calculated as follows: The Labor cost estimates rely on the significant expertise gathered during the construction of the present ATLAS Silicon Detector (SCT) where the U.S. played a major role. The labor estimates also rely upon experience constructing prototypes (FY07-present). Based upon this, the U.S. has put together a comprehensive strategy for the production process that allows detailed estimates of the personnel needed at the various sites.

The FTE effort has been estimated independently by the three US institutions and has also been vetted and is coherent is consistent with the estimates of the other international ATLAS institutes planning to carry out the remainder of the barrel and endcap module fabrication.

The hybrid bonding task is about ~30% of the module effort, based upon the number of bonds and the complexity of the task (are you costing this in hybrids or modules? If in modules, then remove from hybrids). The actual load varies slightly from site to site, considering the staffing. In addition, it is assumed that 20% of the hybrids will require some rework based on past experience of building the current ATLAS strip detector (SCT) scaled by the number and type of bonding wires.

To maintain the required production rate, the system is configured to test and burn-in multiple hybrids in parallelHybrid test and burn-in is the next step in the process. During pre-production, the hybrid test and burn-in systems were developed. In order to maintain the required flow., the system is configured to test and burn-in multiple hybrids in parallel. . TThe labor needed for this task here is provided by costed and uncosted students supervised by costed engineering and/or un-costed physicists/post-docs.

Hybrids produced at each site are mounted on modules at the same site and therefore no shipping labor is needed.

Based on the experience of building current prototypes and past experience of building the present ATLAS silicon detector (SCT), and having more efficient equipment, we estimate that it would will take of the order of 2-2.5 hours of work to build eachper hybrid, which if work is done in parallel, translates into a total of ~ 530 hours (of FTE equivalent) to make build a typical batch in production (1 month).

In Table 56 we show an example (for LBNL) of the estimate of the number (or fraction) of hours required for the different main tasks at peak time of production peak. This According to this is assumingestimate, each batch will need: ~0.51 FTE Mechanical Technician, ~1 FTE Electrical Technician, 0.7 Postbacc, plus (uncosted) 0.25 Graduate Student, 0.23 Scientist, 0.45 FTE postdoc, for a total of 35094 hours of technical staffcosted manpower and , 180 hours ofand uncosted people manpower, for one month (in one day we will have: corresponding to 14-156 hours of technical staff and , 86-8 hoursh of uncosted effort per day.)

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Table 56. Work planning for one day (up to 5-6 hybrids)\

)

Task Uncosted (hours)

Costed (hours)

 

Hybrids arrive in panels from UK  

3 In batches (a few times/year)Final QC is performedSend to industry for SMD loading

Inspection (QA)   1 By panel

ABCstar and HCCstar die attach   33

UV-glue curing 32Metrology 2 2  Wirebonding   3  Electrical tests 4 Tests are performed on multiple hybridsInspection (QC) 1 1 this is at the moment only the inspection

Burn-in (time to set up) 1 1 Burn-in is performed on multiple hybrids

Singulation and storage   1  

Below, in tTable 67 shows, is the estimated number of FTEs needed per FY for hybrid assembly and for the each of the three sites, BNL, LBNL, and UCSC, including the uncosted labor, which consists includes of faculty, scientists, students and postdocs. These are very important contributions which do not cost the project directly.

Due to the different overhead charge during pre-production and production (at LBNL for example) there are different types of job titles, one regular and one for construction, but it ist’s the same kind of technician or engineer.

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Table 67. FTE including uncosted labor (THIS IS THE NEW ONE FROM BCP 005)

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Travel Costs

All costs related to travel included in the modules work (WBS 6.2.4)

Assumptions: (Carl said each assumption has to map into a risk in the risk registry…)We assume that

T the components, chips and hybrids panels will arrive on time The chips will have a yield equal or better than described above Wirebonding will be reliable on these substrates and they will not need aggressive cleaning or

rework. The technical choices that still have to behave been made in the area of fixtures, jigs and will

meet expectations

Schedule:

We plan to complete the 3 phases in the following timescale:

2017FY17-2018/Q2 – FY18: prototyping and preproduction I (done)/preproduction FY20198/Q23 – 2020FY21/Q1Q3: preproduction II and III 2020FY21/Q24 – 2024FY24/Q2 : 2: production

Risk Analysis: see risk registerry.

Comments:

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Attachments: NEED TO UPDATE wire bonder and numbering (remove some)

1. Consumables 2. Bill of Materials for SM loading3. Hybrid panel PCB SM assembly quote 4. Dessicator[5.] Huber CC-505 chiller quote[6.] Wire-Bonder (to be replaced with the new quote)[7.] Cooler[8.] DAQ boards5.[9.] Clean room enclosure quote6.[10.] Microscope Leica S9i7.[11.] Pump8.[12.] Motorized stages9.[13.] Microscopes 10.[14.] Loctite11.[15.] LED[16.] Pump[17.] Cleanroom Furniture12.[18.] Power supply13.[19.] Glue dispenser controller

Reviewed by:

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Attachment 1: Tables of cost for consumables Total: $9,30012,410

ConsumablesItem Serial number Cost Quantity Total ($)

HIH6130 HUMIDITY/TEMP SENSOR 1568-1020-ND 29.35 12 352.21SYRINGE AIRLINE ADAPTER 30ML 99B0700 59.36 10 593.62SEK-18 SV FE TTOA ZGK 16P PL2 1195-1695-ND 1.95 10 19.45CBL RIBN 16COND TWIST-PAIR MC16F-100-ND 86.11 4 344.45SILICONE THERMAL GREASE 30G JAR 1168-1382-ND 12.86 3 38.57#018 3/4 Inch Inside x 7x8 Inch Outside Diameter Viton ORing

926518212.55 10 125.49

Lens Cleaning Moistened Towelettes S468 12.92 4 51.68Wire Bonder wire 10 spools 1000.00 5 5000.00Glue for UV curing

Loctite AA 3525 80.00 30 2400.00NITROGEN 99.7% K NI 2.7-K, Nitrogen, N2 (5 bottles) 74.6 5 373.5Protection gears (for UV) 500 multi 500.00Gel Pak

1,500 multi 1,500For Chiller (liquid/oil)

1,111 1 1,111

TOTAL 12,410

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Attachment 2: Bill of Materials for SM loadingTotal cost: ~15K18,000

item Source Part NameGeometry

Qty/hybrid

Unit Price Qty Order Subtotal

1 UK collaborators Hybrid Panel 86 1 of 86 NA NA NA2 CERN ABCstar chip 10 NA NA NA3 PENN/CERN HCCstar chip 1 NA NA NA

This is the list of surface mount component to be placed on the PCB panel containing the 8 hybrids.list of surface components for the hybrid on a panel – cost is ~$30/panel

Attachment 2: PCB assembly based on the bill of material in Attachment 1

Below the drawing of the PCB that has 8 hybrids and surface mounted components. The quote is referring on loading/assembling 1400 (the total number of panels required for the 3 construction sites) of these panels at a company (quote from Bittele PCB Assembly) which shows ~$260K for 1,400 panels longer turn-around, $180 ca. per panel.

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Attachment 3: Hybrid Panel PCB SM Assembly quoteTotal Cost: 260K260,000This is then divided in 4 payment during the production years

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Attachment 4: Dessicator

21

22

23

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Attachment 5: Quote for Huber CC-505 chiller

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Attachment 6: Wire-Bonder

26

We don’t have a recent quote for wire-bonder yet. The estimate is based on previous quotes of around $150K and word that we would get the educational discount again

27

28

29

30

Attachment 7: Cooler (BNL/Yale)

31

Attachment 78: DAQ boards

32

Attachment 89: Quote for Clean-room enclosure

Cleanroom enclosure quote: Total cost $ ~7,000 (excluded installation)

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34

35

36

Attachment 910. Microscope Leica S9i

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Attachment 101: McMaster Pump

38

Attachment 112: Motorized stages

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Attachment 123: Microscopes (BNL)

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Attachment 134: Loctite 3625

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Attachment 145: LED

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Attachment 16: Pump

ProFlow Inc303 State Street, North Haven, Connecticut 06473 Mail: P.O. Box 748, North Haven, CT 06473-0748

February 23, 2016Yale UniversityAttn: William EmmetEmail: William.emmet@yale.edu

RE: Liquiflo Pump PackageProFlow proposal #16012078-01CP Rev1

Dear Mr. Emmet,

ProFlow is pleased to provide this revised proposal for the Liquiflo Pump Package, per your request.

ProFlow Capabilities:

ProFlow Inc has been a leader in the design, fabrication and testing of modular fluid handling systems for over three decades. ProFlow has supplied modular fluid and control systems for the pulp and paper, chemical process, pharmaceutical, and power industries.

Our skilled shop has expertise in all the crafts - ASME section IX certified pipe welding (including U and R code vessel stamps), electrical control panel fabrication (ProFlow is a UL/cUL registered industrial control panel shop), skid wiring (hazardous and non-hazardous), along with system operational testing and training. ProFlow has provide field service, start-up assistance and on site training for systems located in North and South America, Europe, Mexico, Korea, Japan and China.

Our engineering group utilizes the latest in AutoCAD programs for preparing P&ID's, as well as 3-D modeling of piping and structural layouts. Mechanical and electrical engineers are on staff to provide project management, complete system design, layout and PLC programming, as well as directing full acceptance testing.

ProFlow performs all aspects of the skid fabrication in-house; the use of subcontractors is limited to the buyout of individual system components, including heat exchangers and some vessels. All final fabrication, welding, assembly, electrical panels (including PLC programming) and testing is completed by ProFlow. This complete control at every step of the project allows us to assure that the key elements of quality, cost and timing are met on every order.

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ISO 9001:2008 Registered

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43

Design Criteria:

Fluid: HFE7100 Heat Transfer FluidFlow rate: 0.35 GPMΔ Pressure: ≈185 PSIGViscosity: 1.75 CPS @ -60°CTemperature -60°CPower: 1-phase/60Hz /115-230VAC

Proposed Equipment

(1) Pump, Liquiflo H5F Series, 316SS, ½” NPT ports, 3.4GPM @ 1750RPM, PEEK drive & idler gears, Ceramic (SiC) wear plates, Silicon Carbide bearings, NEMA 56C magnet hub bore, Tungsten Carbide coated shatfs, 316SS/PFA encapsulated O-rings, 316SS bearing pins, MCU (75 in-lbs) magnetic coupling, temperature trim

(1) Motor, 3/4HP, 1800RPM, 3-phase/60Hz/230-460VAC, 56C, washdown, TENV enclosure, 1000:1 turndown, constant torque

(1) VFD, Lenze/A.C. Tech SMV Series, 1HP, 240V, single or 3-phase input in NEMA-4X enclosure

(1) Relief Valve, Liquiflo high pressure (75-200PSI range), 316SS construction, ½” NPT ports; relief discharge piped into pump suction

(1) Set of 316SS pipe and fittings for relief valve discharge

Documentation

The system will be supplied completely tested and the following documentation will be provided:

P & ID of the system.Electrical schematics of the junction box and skid instrumentation.Mechanical drawing of the system locating all major components, overall skid dimensions and customer connection points.Complete parts list with part numbers.One copy of a manual containing all applicable manufacturers’ literature, operational practices and procedures, maintenance instructions and recommended spare parts list.

44

Price

Quantity Description Unit Price – USD

Ext. Price – USD

1 Liquiflo Pump Package, as described above $6,390.00 $6,390.00

FOB North Haven CT, Freight Prepay and Bill

T.B.D.

Crating (Additional, if required) N/A

Total $6,390.00 plus freight

Delivery

If required, drawings for approval can be submitted approximately 3-4 weeks after receipt of a purchase order, a deposit, and necessary information to proceed. It is preferred that these drawings be reviewed, acknowledged and returned to ProFlow prior to fabrication. This will ensure that the final product is as expected and approved by the customer. If customer waives the drawing approval process, it is understood that the system design as provided by ProFlow, is acceptable to the customer.

If more than two revisions are required during the Approval process, additional engineering costs may apply.

Delivery of the system is approximately 6-8 weeks from receipt of approval drawings, based on current shop work load, subject to change based on delivery of customer supplied materials.

Commercial Information

This quotation is subject to the attached conditions of sale, F.O.B. North Haven, Connecticut and excludes crating, accessories, spare parts, start-up and any applicable taxes. If any on site start-up or programming assistance is required, it will be billed on a time and material basis at ProFlow’s technical field service rates (attached).

Based on the costs outlined above and subject to credit approval, the following payment schedule is being proposed:

1. Deposit with purchase order: 34%2. Upon receipt of major materialsat ProFlow; due upon receipt: 33%3. When system is 90% complete, dueupon receipt of invoice: 23%4. Upon presentation of bill of lading, dueupon receipt: 10%

Total: 100%

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Notes:

An additional 10% service charge of the freight cost will be added to the invoice if you want the freight to be included with the purchase price of the project. NOTE: Having the freight carrier invoice you directly can save this additional charge.Quoted price is based on the payment terms listed above with no retainage allowed. System(s) must be scheduled for shipment immediately following completion. We will invoice final payment on date of completion in our plant.Our offering is for the supply only of the system and accessories specified herein. Any deviation from quotation can affect the quoted price and will be addressed through “Change Orders” as they occur.Prices Quoted are valid for 30 Days. Orders will be subject to all escalation fees for raw material & labor increases for orders received after 30 days of quotation date.Any delays in Returning “Approved” Drawing Submittals within 30 days of receipt may be subject to escalation and /or engineering charges.Orders are accepted based on a normal processing flow and the ability to fabricate equipment within quoted lead times. To the extent delays occur outside our control, this order is subject to escalation charges resulting from increases in labor and material costs which occur during the period of delay.Quoted Price does not include State Sales Tax. Purchaser must furnish a copy of Tax Exemption Certificate or State or Federal Identification Number indicating that the Purchaser will pay all sales tax direct to required state. ProFlow is not authorized to collect state sales taxes (except Connecticut) and will not be held responsible for any taxes due on system purchases.Compliance with federal, state, and local codes and regulations is the responsibility of the purchaser.

We trust this information is acceptable to you. If you have any questions or require additional information, please do not hesitate to contact us.

Sincerely, ProFlow Inc

Susan SargeantVP, Sales & Marketing

cc: Kurt Uihlein, Bill Witecki, Larry Bee - ProFlow Inc

T:\Word Processing Docs (from K - SNAP)\Common\Quotes\Misc Systems\2016\16012078-01CP - Yale University - Liquiflo Pump Package\16012078-01CP Rev1 - Yale University - Liquiflo Pump Package.doc

ProFlow, Inc.CUSTOMER SUPPORT TECHNICAL FIELD SERVICEFebruary 27, 2013

SERVICE RATES:

On Site Service Travel RateService Technician/Mechanic: $110.00/Hr. $60.00

Service Engineer: $125.00/Hr. $70.00PLC Programmer: $135.00/Hr. $75.00

SUPPORT RATES:

Shop Rate: Engineering Support: $75.00/Hr.$90.00/Hr.

EXPENSE CHARGES:

TRANSPORTATIONBy Rail, Airplane, Cab: ActualRental Car: ActualCompany or Personal Car: $0.56/mile

LIVING EXPENSESHotel: Actual

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Meals: Actual

TECHNICAL FIELD SERVICE CHARGES (defined)

ON SITE TIME: Time spent at customers or mill location. All time spent at the job site is charged at field service rate.

TRAVEL TIME: Charge from Engineer’s residence or from the North Haven facility, whichever is point of departure. Return travel time is charged at the same rate as travel to location. Travel Rate is charged from customer site to hotel and back.

SHOP TIME: Time in our facility for preparation or wrap up of field service job. This time could include making assemblies or parts for use in the field or documentation of field service.

ENGINEERINGSUPPORT: Time for inside engineering support of Field Service such as PLC programming assistance or update of CAD drawings at the customer’s request.

NOTES

Service outside North America will be charged at 1.25 times above rates.Expenses are billed at actual cost.Any Airline flights over six hours in length shall be business class or equivalent.

Terms: NET 30 Days

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TERMS and CONDITIONS OF SALE303 STATE STREET, P.O. BOX 748, NORTH HAVEN, CT 06473

THESE CONDITIONS OF SALE SUPERSEDE ANY BUYER'S CONDITION OF SALE UNLESS OTHERWISE AGREED IN WRITING BY AN OFFICER OF PROFLOW INC THE FOLLOWING SHALL CONSTITUTE ALL AND THE ONLY TERMS AND CONDITIONS OF THE SALE AND PURCHASE DESCRIBED ON THE REVERSE SIDE HEREOF.TERMS - Payable in United States currency. Net cash in 30 days from the date of invoice, F.O.B. manufacturer unless otherwise stated on the proposal or contract. Payable at North Haven, Connecticut. Prices are subject to change without notice. In the event of default of payment when due of any amount due and payable under the terms hereof created by acceptance of invoiced material, ProFlow Inc shall be entitled to interest on all such amounts due at 1-1/2% per month. ProFlow Inc shall be entitled to its costs of collection including reasonable attorney's fees.

ORDERS - All orders subject to acceptance by an officer of ProFlow Inc.

QUOTATIONS - All quotations and proposals are subject to approval by an officer of ProFlow Inc. The price quotation is firm for 30 days from the date of the quotation.

SHIPMENT - The delivery date quoted is subject to the following:

a.) Prior sale of stock items. b.) Shipment schedules of manufacturers except where noted. c.) Foreign or Domestic government regulations and directives.d.) Delays not in the control of ProFlow Inc including those caused by, but not limited to, labor conditions, accidents, fires, weather, governmental action and acts of God. e.) Shipments shall be in the entirety of the order or in part at the option ofProFlow Inc.

f.) An invoice shall issue upon shipment.

g.) Delivery of equipment to a common carrier shall constitute delivery to Buyer and thereupon the risk of loss to such material shall be at Buyer's risk. Buyer shall be obligated to pay the charges of the common carrier. All claims for damage or loss in transit shall be solely the responsibility of the carrier to Buyer, and shall be submitted by Buyer directly to the carrier.

h.) Without limiting the application of paragraph 4(g) above, Buyer shall notify ProFlow Inc of the location to which the goods shall be delivered and Buyer shall stipulate which common carrier shall be used.

I.) Dates for delivery are quoted based on the best information available for transportation in the ordinary course and ProFlow Inc shall use reasonable commercial effort to obtain compliance therewith but such dates shall be subjected to reasonable variances. ProFlow Inc shall not be liable for damages caused by any act or omission affecting delivery including negligence on its part or that of its agents, servants or employees resulting in a failure to meet such delivery dates.WARRANTY -

Limitation Of Warranties, Remedies and Damages

a.) The Warranty stated below is in lieu of all other warranties of ProFlow Inc and the equipment manufacturer, express or implied, of merchantability, fitness for a particular purpose, or otherwise. There is and shall be no other warranty than is set forth herein or which extends beyond the description of the face hereof. No one shall be authorized to add to or amend any warranty nor to waive any limitation of warranty set forth herein. This is not a consumer warranty.

b.) ProFlow Inc warrants the Equipment being shipped herewith

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to be free from defects in material and workmanship for a period of one (1) year from the date of shipment to or for Buyer. The obligation of ProFlow Inc under this Warranty is expressly limited to the repairing or replacing of any part or parts that are proved to the satisfaction of ProFlow Inc to be defective due to a fault in workmanship or materials. This Warranty shall not apply to items or parts not designed or manufactured by ProFlow Inc nor shall it apply to items or parts subjected to improper use or incompetent maintenance or operation. All such replacement parts shall be shipped F.O.B., our Plant; this Warranty does not include the installation or freight charges of such replacement parts.

c.) ProFlow Inc will extend all factory warranties on equipment that ProFlow Inc sells as a distributor F.O.B Manufacturer's factory and component equipment used in manufacture of the system with related freight F.O.B. Manufacturer's Factory.

d.) ProFlow Inc shall have no obligation under this Warranty for any equipment or parts which have been subject to misuse, abuse, negligence, accident, improper installation, deterioration by chemical action, act of God, repair or alteration in any way, so as in the final judgment of ProFlow Inc, to adversely affect the performance or reliability of the equipment or parts; or which have not received proper maintenance service.

e.) Warranty services performed during regular business hours shall be without charge for labor, but Buyer will pay to ProFlow Inc the travel and living expenses of ProFlow Inc's representative(s) to Buyer's location of the equipment and return. If Warranty service is performed by ProFlow Inc at other than regular business hours at Buyer's request, Buyer will also pay the difference between ProFlow Inc's regular service rate then in effect and its premium service rate then in effect.

f.)PROFLOW INC DOES NOT WARRANT THE ACCURACY OF THE "CONDITIONS OF SERVICE" IN THE ATTACHED PROPOSAL. THE "CONDITIONS OF SERVICE"ARE ASSUMED BY PROFLOW INC TO HAVE BEEN VERIFIED AND ACCEPTED BY BUYER. g.) Any discrepancy regarding products received, services rendered, shortages, inaccurate filling of orders or any other matter must be received in writing at the offices of ProFlow Inc, 303 State Street, North Haven, CT 06473. Mail:P.O. Box 748 North Haven, CT 06473, within 10 days from date of delivery.

h.) No action against ProFlow Inc arising from or related to the sale described herein or based on any obligations created herein or by operation of law in relation to the sale described herein shall be maintained unless commenced within (1) one year from the date of the delivery of the equipment claimed to be defective or the services alleged to have been improperly performed or omitted.

i.) NEITHER PROFLOW INC NOR MANUFACTURER SHALL BE LIABLE IN ANY EVENT FOR INCIDENTAL OR CONSEQUENTIAL DAMAGES AS THOSE TERMS ARE DEFINED IN SECTION 2-715 OF THE UNIFORM COMMERCIAL CODE.

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j.) Defects shall not include decomposition or wear caused by chemical action. The component materials set forth in a proposal and/or the specifications of an order, are recommended by ProFlow Inc for the particular application, but such recommendations shall not be constructed as a warranty against wear and/or corrosion; and, such recommendations are subject in all cases to verifications and acceptance by Buyer.Indemnification - Safe Operation

a.) Buyer shall comply and require its employees to comply with directions set forth in manuals or instruction sheets furnished by ProFlow Inc and shall use and require its employees to use reasonable care, all safety devices and guards in the operation and maintenance of the equipment and all requirements of all applicable safety codes, standards, laws and regulations. Buyer shall keep, preserve, require to be used and maintained and shall not remove or permit anyone to remove any safety guards or devices, warning signs or operating, maintenance or safety instructions. Buyer shall immediately give ProFlow Inc written notice of, which notice shall in no event be more than 48 hours after, any personal injury or property damage arising out of the use of the equipment and cooperate with ProFlow Inc in investigating any such accident or malfunction.

b.) If Buyer shall fail to comply with each and every obligation set forth in Paragraph (a) above, Buyer shall indemnify and hold ProFlow Inc harmless from any and all liabilities, claims, expenses, damages, injuries, suits and causes of action including the costs and expenses of defending such, for injury, death, damage, loss, destruction or expense arising from, caused by, connected with, or related to the operation or use of the equipment furnished by ProFlow Inc hereunder whether such be deemed, claimed or actually caused in whole or in part by any breach of duty or negligence of ProFlow Inc, its agents, servants or employees.PROFLOW INC. NOR MANUFACTURER SHALL BE LIABLE IN ANY EVENT FOR INCIDENTAL OR CONSEQUENTIAL DAMAGES AS THOSE TERMS ARE DEFINED IN SECTION 2-715 OF THE UNIFORM COMMERCIAL CODE.

THE MAXIMUM LIABILITY OF SELLER UNDER THE WARRANTY SECTION IS LIMITED TO THE PURCHASE PRICE OF THE PRODUCT. THE WARRANTIES AND REMEDIES STATED ABOVE BY SELLER ARE EXCLUSIVE AND IN LIEU OF ALL OTHERS ORAL OR WRITTEN, EXPRESS OR IMPLIED. ANY AND ALL MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT OF THIRD PARTY RIGHTS ARE EXPRESSLY EXCLUDED. SELLER SHALL NOT UNDER ANY CIRCUMSTANCES BE LIABLE TO ANY PERSON, CORPORATION, OR OTHER TYPE OF LEGAL ENTITY FOR SPECIAL, INCIDENTAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, INCLUDING WITHOUT LIMITATION, DAMAGES RESULTING FROM USE OR MALFUNCTIONS OF THE PRODUCTS, LOSS OF PRODUCTS, SAVINGS OR REVENUES, OR COSTS OF REPLACEMENT GOODS, WHETHER SUCH CLAIMS ARE ALLEGED IN STRICT LIABILITY, NEGLIGENCE, TORT, CONTRACT, OR OTHERWISE AND EVEN SELLER IS INFORMED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES.

TAXES - Buyer agrees to bear all taxes of any kind now or hereafter imposed on this contract or upon the manufacture, sale, lease, shipment, ownership, possession or use of the items covered by the proposal.

CANCELLATION - All orders accepted by ProFlow Inc shall not be canceled, revised or changed unless agreed to in writing by ProFlow Inc. ProFlow Inc may agree, may withhold agreement or may condition agreement upon payment of a cancellation charge to be determined at the sole discretion of ProFlow Inc.

CLERICAL ERRORS - Clerical errors in any contract of sale shall be subject to correction by ProFlow Inc on notice to Buyer.

EFFECT OF TERMS AND CONDITIONS - The terms and conditions herein contained shall apply to any order or direction received from Buyer and no provision in any such order shall be binding upon ProFlow Inc. No modification shall be effected by ProFlow Inc's shipment of equipment following receipt of Buyer's order or request for shipment which may contain provisions contrary to the terms and conditions herein contained.

WAIVER - Waiver by ProFlow Inc of any breach of these provisions shall not be construed as a waiver of any other breach.

ASSIGNMENT - None of Buyer's rights under any order shall be assigned or otherwise transferred by Buyer to any other person, whether by operation of law or otherwise, without ProFlow Inc's prior written approval.

SPECIAL CONDITIONS - Any additional cost incurred in packaging or in making any special test or inspection which is requested by Buyer, and is in addition to those regularly supplied by ProFlow Inc, will be charged to Buyer. Such tests and inspections will be made only at the factory before date of shipment SM-006, 9/28/15

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Attachment 157: Clean room furniture

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Attachment 168: LV power supply

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Attachment 179: Dispenser controller for gluing (item 03)

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