NSF Nanoscale Science and Engineering Center for Scalable and Integrated NanoManufacturing (NSEC SINAM, CMMI-0751621)

Xiang Zhang (Director), Department of Mechanical Engineering, University of California at Berkeley, CA 94720

SINAM’s goal is to establish a nano-manufacturing paradigm ofnew technologies that tackle critical challenges: 2D featuresbelow 20 nm; high dimensional fabrication and heterogeneousintegration of multiple functionalities.

Environment

Research Vision

Nano Fluidic Circuits Ultra Sensitive Bio-sensor

Ultra Compact

light source &

integrated

photonics

3D Terabit Memory

Vision: Develop a nano-manufacturing paradigm to provide the quantum leap from lab science to industrial revolution.

The impact of nanotechnology on theenvironment is a hot topic, both politically andscientifically. SINAM works toward a newdesign paradigm where energy consumptionand external impacts are built into the designprocess. In accordance with this philosophy,efforts to characterize efficiency andenvironmental impacts of nano-manufacturingare paramount. Nano-scale devices have thepotential to provide energy savings in certainphases of their life-cycle. However greater cost,in terms of energy, is a major trade-off withthe increased precision in manufacturing.Understanding the expenditure of energyduring the manufacturing phase is crucial toensuring energy savings over a products entirelife cycle. In addition, studies of environmentaland social impact, manufacturing capabilities,materials use, and human and ecologicaltoxicity are being investigated to realize a trulynew paradigm in manufacturing design.

Mask-less Plasmonic Nano-Lithography (PNL)

adapting hard disk technology. Here, 22 nm features

were created using PNL system scanned at 10 m/s.

Nano Imprint Lithography: 1-20 nm molds for 2D applications.

Si

SiGe

Deposition

Etching

Imprinting

Integrated Research Groups: An innovative concurrent systemsengineering approach, tackles these grand challenges aimed atissues of scalability, productivity and efficiency.A nano-manufacturing paradigm will greatly impact humansociety as did the industrial and technological revolutions. SINAMembraces the responsibility to educate, assess environmentalimpact and create business.

120 nm

Nano-Manufacturing Summer Academy/REU

Connecting to research

• High school students, teachers, undergrads

• Short courses, lab experience, competitions,

internships

MS

HS

UG

GR

Discover Nanotechnology (Grades 7-12)

Inquiry based modules

• See and feel the Nano-world

• Graduate teaching fellowships.

• Piloted in Los Angeles and Oakland

Interdisciplinary Curricula

• Undergrad.: Nano-Mfg. design projects

• Graduate: SINAM research based modules

Graduate Young Investigator (GYI)

• SINAM graduate student competition

• GYI brings 2+ faculty from different disciplines

• Funding for innovative research project

SINAM is responsible for gathering and disseminating the facts ofnanotechnology’s potential impact on society. SINAM has liaisedwith the RAND corporation to study the current societal impact ofNano-manufacturing.

SINAM’s educational programs span all education levels and include initiatives for under-represented communities, 7th-12th grade programs, undergraduate summer academy and graduate young investigator program.

Public perception of the potential benefits of Nanotechnology

Public perception of the potential risks of Nanotechnology

Flying head

UV illumination

30 nm Features

A nano-precision Multi-scale Alignment and Positioning System (MAPS) is the test-bed for scalable plasmonic lithography and nano imprinting.

Education, Society and Ethics Economic

Top-Down Nano-Manufacturing

SINAM attracts industrial partnerships through progressiveresearch programs and collaboration initiatives. The IndustrialAffiliates Program with a new standardized IP agreement helpsto rapidly integrate new partners.Spin-off companies currently operate as a result of SINAMresearch. NanoLithoSolutions produces inexpensive nanoimprint lithography tools. Synilixir Therapeutics applied systemoptimization schemes to search for combination drugs. KalinexInc. is developing technology to emulate the sense of smell,which is the only human/animal sense that has not yet beenreplicated in small devices and systems. Nano-CAD developedby SINAM has helped several start-ups.

Kalinex Inc.

LBNL, NRL, LLNL, NIH, UIUC-NSEC, CNSI, CITRIS, and International Collaborators

22nm half pitch

Nano-manufacturing for efficient solar energy utilization inboth energy conversion and storage.

Hybrid, scalable nano-manufacturing platform with heterogeneousintegration of optoelectronics, nano-fluidics and electronics for thefuture multifunctional medical diagnostics ($1.5B/year market)

Nano-Plasmonic Surface Functionalized Cell Interrogation Platform foreffective drug screening at the single cell level

Nano-Manufacturing for Healthcare Application

Solar Energy Systems Engineering

Top-down nano-manufacturing approach aimed at developing and discoveringtechniques for nano-fabrication in the 1–50 nm range.

0 10 20 30 40 50 60 70

Cheaper, better consumer products

New ways to detect and treat human diseases

Increased national security and defense

New ways to clean the environment

Physical and mental improvements for humans

0 10 20 30 40 50 60 70

Economic Disruption

Losing personal privacy

Arms race

Breathing nanoparticles that …

Uncrollable spread of …

40 nm20

10

4nm imprinted features

8 4

Rotating substrate

Plasmonic lens

Dimensional metrology system

Cell-signaling detection platform Reconfigurable Microchannels

Flow control

Textured Thin Film Photovoltaics for efficient

nanoscale light-trapping: Systematic symmetry breaking of periodic nanostructures achieves an absorptance that closely follows the Lambertian limit for isotropic incident radiation.

Process monitoring for nano-manufacturing

In situ STM images of ZnS ALD (atomic layer deposition)

In situ visualization of nano-scale crystal growth

New Organometallic Compounds for

storage and transportation