Microsystems LaboratoryUC-Berkeley, ME Dept.

1Liwei Lin, University of California at Berkeley

Micro/Nano Mechanical Systems Lab – Class#1

Liwei Lin

Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator CenterThe University of California, Berkeley, CA94720

e-mail: lwlin@me.berkeley.eduhttp://www.me.berkeley.edu/~lwlin

Microsystems LaboratoryUC-Berkeley, ME Dept.

2Liwei Lin, University of California at Berkeley

Outline

Course Administration Introduction

• Top-down Technologies• Bottom-up Processes

Lab Intros

Microsystems LaboratoryUC-Berkeley, ME Dept.

3Liwei Lin, University of California at Berkeley

Course Website

Microsystems LaboratoryUC-Berkeley, ME Dept.

4Liwei Lin, University of California at Berkeley

Course Description

Microsystems LaboratoryUC-Berkeley, ME Dept.

5Liwei Lin, University of California at Berkeley

Grading, Quiz & Final Project

Microsystems LaboratoryUC-Berkeley, ME Dept.

6Liwei Lin, University of California at Berkeley

Weekly Schedule (Tentative)

Microsystems LaboratoryUC-Berkeley, ME Dept.

7Liwei Lin, University of California at Berkeley

Selected Papers (Tentative)

Microsystems LaboratoryUC-Berkeley, ME Dept.

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Lab #1 – Energy Harvesters

Design and Fabrication of an Energy Harvester Demonstration of “Energy Harvester” – class competition Challenges

• Efficient Actuator• Harsh environment operatoins

Microsystems LaboratoryUC-Berkeley, ME Dept.

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Lab #1 – Fabrication

Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #2, Micro Robots

Design and Fabrication of a Micro Robot Demonstration of “Walking” – class competition Challenges

• Directional controls• Flying robots

Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #2, Fabrication

Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #3, Graphene based Devices

Microsystems LaboratoryUC-Berkeley, ME Dept.

Lab #4, MD Simulation

Lab #5, Microfluidics