The CITRIS NanoLab Center

Interfacing the Nano­Micro­Macro Worlds

Professor Nathan Cheung Acting Director, CITRIS NanoLab Center, University of California, Berkeley Tokyo, Japan April 10, 2006

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All we need is great connections

Transportation Health Care Education

Disaster Mitigation Environment Energy

Nano Devices

Micro Systems

Clusters

Massive Cluster

Gigabit Ethernet

Wireless Beacon Optical Network

Self Assembly Tolerant Architecture

Global Connections

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The CITRIS Building at UC Berkeley

Main CITRIS Building

CITRIS NanoLab Center Feb, 2008

Cory Hall and the current Berkeley Microlab

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The CNC Vision • 14,000 sq/ft Class100 area • >120 Principal Investigators and >500 Lab Users • 100/150/200mm wafer processing tools • A premier shared research facility

– world­class multi­disciplinary micro/nanofabrication research – innovative, with commercial and societal impact

• Supporting education and outreach – summer internship and visiting researcher programs – nanofabrication related short courses and educational materials

• Serving the industry – Exploratory research with nano materials and their integration with microsystems

– providing testbed sites for • facility, tool, and process monitoring

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Ubiquitous Electronics

Energy Conversion

0.001

0.01

0.1

1

10

100

0 10 20 30 40

curren

t (nA)

time (min)

A)

BioSensing/ Diagnostics

Nano Photonics

Integration Nano CMOS

Materials, Device, and Microsystem Research

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Supporting the CITRIS Mission

CITRIS­Network

Millennium Cluster

WLAN / Bluetooth Pager

Motorola Pagewriter 2000

Visualization Human Centered Computing

H.323 GW

Environmental Monitoring

Smart Dust

Wearable Displays

Smart Building

Smart Classroom

Earthquake Engineering

Sensor Network Tiny OS

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The First University IC Lab …was built in 1962 at UC Berkeley

Researchers David Hodges and William Oldham in the original Berkeley Microlab.

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A shared facility: For more than 20 years, the Microlab has supported researchers from:

9 UCB departments

4 UC campuses

3 U.S. National Labs

Infrastructure is at capacity

The Microlab …expanded around the IC lab and opened in 1983

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The Present Microlab Education 351 1968 ­1982 grad and post grad researchers 2216 1983 ­ 2005 grad, post­grad,and industrial researchers Impact on California Economy 68 1996 – 2005 Berkeley Microlab Affiliate members (BMLA)

Incubates >40 California start-up companies

ICs

Optoelectronics

MEMS

Bioelectronics

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The Microlab Legacy Sample Firsts and Bests

First surface polysilicon micromachining for MEMS; pin­jointed gears, cranks, and springs; rotary electrostatic drive motor.

L.S. Fan, Y.C. Tai and R.S. Muller

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The Microlab Legacy Sample Firsts and Bests

Demonstrated world’s shortest gate length transistor 15nm Lg FinFET (2000)

(Profs. Hu, King,and Bokor, EECS)

­1.0 ­0.5 0.0 0.5 1.0 1.5 2.0 10 ­12

10 ­10

10 ­8

10 ­6

10 ­4

10 ­2

10 ­12

10 ­10

10 ­8

10 ­6

10 ­4

10 ­2

N­body= 2x10 18 cm ­3

P+Si 0.4 Ge 0.6 Gate

NMOS PMOS

V d =­0.05 V

V d =­1.0 V

V d =0.05 V

V d =1.0 V

Drain Current, I d [A/um]

Gate Voltage, V g [V]

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Fluidic Self Assembly (FSA) Process Low­cost High­Volume assembly of RFID tags and related products.

Nanoblock IC and Corresponding hole.

Professor J.S. Smith and Alien Technology

The Microlab Legacy Sample Firsts and Bests

158mm­wide straps Ready to attach to RFID antennas

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1D Functional Heterojunctions LOHNs

• NanoElectronics •Thermoelectrics

COHNs

•NanoOptics •NanoFludics

Nanotape

•Selective sensors

Si/SiGe AlGaN/GaN TiO2/SnO2 GaN/AlGaN

Prof. P. Yang, Chemistry, UCB

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Temperature (K) 0 100 200 300 400

Thermal Con

ductivity

(W/m

­K)

0

500

1000

1500

2000

2500

3000

3500

Nanowire Nanowire Transport Properties (Thermal, Electrical, Thermoelectric) Transport Properties (Thermal, Electrical, Thermoelectric)

Pt heater line

Multiwall nanotube bundle

Prof. A. Majumdar, ME, UC Berkeley

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Organic Electronics

Professor Vivek Subramanian EECS, UC Berkeley

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Immuno Sensor

Professor Bernard Boser, EECS, UC Berkeley

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The PicoBeacon: An Energy­Scavenging Radio

Professor Jan Rabaey, EECS, UC Berkeley

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Laser Contact

Tuning Contact

Nanometer Wavelength Resolution Laser for Optical Networks

Tuning Contact

Movable Mirror

Top DBR

QW Active Region

Contact

Oxidation Layer

Bottom DBR

Laser Output

Professor Chang­Hasnain, EECS, UC Berkeley

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Near­Field Simulations

In­situ Monitoring

Resistanc

e

Pulses (95 mJ/cm 2 )

0

500

1000

1500

2000

2500

0 50 100 150 200 250 300

30 mJ/cm 2 : 50 pulses

50 mJ/cm 2 : 50 pulses 50 mJ/cm 2 : 100 pulses

Fermtosecond Laser Annealing

Profs. Nathan Cheung (EECS) and Costas Grigoroupolous (ME)

V

plasma sheath

­ +

wafer target

V

plasma sheath

­ +

wafer target

Ultra­Low energy Plasma Doping

Si Nanowire FET Processing

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New Capabilities, New Frontiers Quantum dot and nanowire growth CVD, RTP

Diffusion, oxidation Nanowire/QD synthesis Gate stack engineering

GATE

SOURCE

DRAIN

20 nm 20 nm

10 nm 10 nm

GATE

SOURCE

DRAIN

20 nm 20 nm

10 nm 10 nm 10 nm 10 nm

Double­Gate FinFET 6” / 8” DUV and E­beam litho Nano­imprint CDSEM

Nanowire characterization and integration Metrology

Wafer bonding PG /direct write maskmaking

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New Capabilities, New Frontiers

Ge Source Ge Drain

T Si = 3 nm

Gate

SiO 2 Si

XTEM of UTB MOSFET w/ raised Ge S/D

Ge Source Ge Drain

T Si = 3 nm

Gate

SiO 2 Si

XTEM of UTB MOSFET w/ raised Ge S/D MOCVD / ALD Sputter Dep (Mo, Ti, TiN) TEOS ozone conformal SiO2 Pulsed gas DRIE

Reactive ion etch of SiC Metal etch Piezoelectric AlN dep (Ferroelectric BFO dep)

BNC substrate integration 2D polymer microlens CMP, plating

Polymer processing Organic semiconductor

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From Blocks to Superblocks MOCVD Quantum Dots (Weber)

ZnO Nanowires (Yang) CNT on Si (Lin)

Tuning Contact

Movable Mirror Tunable Quantum

Well VCSEL (Chang­ Hasnain)

Substrate Nanodots

Waveguide

Photonic Crystal

Organic Optical Material

Nanowires

Inter­Level Dielectric

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Infrastructure support for both fundamental research and applied integration of : à Nano­scaled CMOS electronics à Nano electromechanical systems NEMS à Bioelectronics device and technology

Energy Conversion Immuno Sensor Heterogeneous Integration

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For any CNC related questions, please contact:

UC Berkeley Microlab Faculty Director Professor Nathan Cheung cheung@eecs.berkeley.edu

UC Berkeley Microlab Technology Manager Dr. Bill Flounders

Bill@eecs.berkeley.edu

THANK YOU FOR YOUR ATTENTION