Post on 31-Mar-2021
( )
1
(6)
.
.
5000 / / 1/2
.
ISO14001
1
SL ( 2010-045110)
DLC
. .
2
PVD CVD
1
[1 1]
[1 2]
[1 3]
,
2
[2 1]
,
[2 2]
3
[2 3]
H23
110-0014
2 5 2
: 03-3842-6761
: 03-3844-5287
jotaro.ishii@pwsm.co.jp
4
124-0012
4 11
:03-3691-3156
:03-3697-0465 E-mail
smkn@smile.ocn.ne.jp
270-1402
2654-1 :047-497-1101
:047-497-0219 E-mail smkn@smile.ocn.ne.jp
144-0045
3 15
10
:03-6424-8615 FAX :03-6424-8615 E-mail
nao-y@nanofilmlabo.co.jp
108-8548
03-6722-2741
FAX 03-6722-2641
taizawa@sic.shibaura-it.ac.jp
5
135-0064
2 4 10
:03-5530-2528
FAX :03-5530-2458
kobayashi.eiji@iri-tokyo.jp
144-0035
1-20-20
03-3733-6281
FAX 03-3733-6235
uematsu.takahiko@iri-tokyo.jp
355-0036
0493-24-6774
541-0053
3 4 8
06-7637-3263
541-0047
077-582-6505
105-0011
3-5-8
212
03-3433-3730
144-0035
1-20-20
03-3733-6144
6
( )
( )
( )
2-2
2-2
59 21
5 21
( )
( )
( )
2-3
2-3
( 54 21 )
( 54 21 )
( )
1-2
2-2 2-3
1-1] 1-2
2-2 2-3
22
22
22
( )( )
7
Foo Jin Hoe ( )( ) 21
( )( )
( )( )
8
[1 1]
H22
[1 2]
H21 DLC CrN
H22 DLC CrN (Ti)
(W) ( / )
50GPa
100N 0.2 3600
CrN 250
100N 0.2 (0.15) 3600
( )1.0
[1 3]
H21
SL ( 2010-045110)
H22 Ar
9
(
)
[2 1]
[2 2]
H22 5 10
mm mm mm :
SPM
[2 3]
H22 5 100
CC/ spm
10
135-0064 2 4 10
Tel: 03-5530-2111 Fax:03-5530-2458
E-mail: uematsu.takahiko@iri-tokyo.jp
Tel:03-5530-2528 Fax:03-5530-2458
E-mail:kobayashi.eiji@iri-tokyo.jp
11
( )
:
( 293 )
1.1.2
1.1.1 1 SKD11
0.1cc 1.1.1
1.1.1
12
1.1.2
1.1.2 C G SKD11 10
G C/A10% A C( )%
: 60 3A
: 10 25mm 64mm 256%
1.2.1 1.2.2
13
30 218% 1.1.1 50 306%
( )
( )
1.2.1
14
IPA (isopropyl alcohol)
( )
IPA
3
: (ball on disk) 2.1.1 T1107-001
60 T1107-003 6000.2 T1107-002
300 0.17 T1107-003
2.1.1
15
BOD 10N, 150mm.sec. 3600sec. SUJ-2 3/16in=4.76mm 100
T1107-004 60 T1107-005 300 T1107-006 600 TH-10 BOD
2.2.1 2.2.1 3T1107-006 600 160 35
TH-10
2.3.1
2.3.1
16
1 BOD T1107-002T1107-008 2.3.1 2000 2800
0.2T1107-002 3600
0.16 T1107-002
Ar
TH10
3.1.1
Ti10
Co 6mass
HRA92
GPa3.2
MPa
m1/26.8
14.9 3.1.1 Co ( )
THi
TH10
3.1.1 Co HTi10
Co Ar
17
4.1.1
4.1.2
4.1.2 T1107-002 200 3
4.1.1 1 3
18
Cr ( )
Cr
Cr
Cr
JIS V40 V60
0.4s 0.2s
0.4s 100nm
DLC
DLC sp3 DLC
DLC 5nm 200 1 m
CrN 30 m DLC 5nm 200 1 m
1.2.2.1
0.2Pa
0.2Pa
1.2.2.1
19
PVD PVD
1.2.3.1
1.2.3.1
b
1.2.3.1 c
:
1.2.3.1
20
200
1.2.3.2
SmCo 170
200
SmCo
100
1.2.3.1 DLC
1.2.3.2
1.2.3.1
DLC
1.2.3.2
21
1.2.3.3
SN
1.2.3.2
1.2.3.2
1.2.3.3
22
24 4( 1.2.3.19)
4 mm
Cr
100nm
1.2.3.5 1.2.3.6 Cr
PVD
1.2.3.4 4
1.2.3.5 #1
1.2.3.6 #2
1.2.3.4 DLC
23
1.2.3.7
1.2.3.6
1.2.3.7 WC
24
1.3.1
1.3.1
1.3.2
1.3.2
25
0
100
200
300
400
500
600
700
800
900
1000
350 450 550 650
Wavelength (nm)
O2*
O IIO2
+O2(?)
0
1000
2000
3000
4000
5000
6000
700 800 900
Wavelength (nm)
OI (3s5S0-3p5P)
OI (3s3S0-3p3P)
1.3.2
O2 + e O- + O
O2 + e 2O + e
O2 + e O+ + O + 2e
C + O CO
C + O* C-O
C-O
1.3.3
26
1.3.3
206 nm, 210.8 nm, 240 nm, and 256 nm
1 T. Aizawa, et al.: Recycling of Used DLC-Coated WC/Co Dies for Practical Dry Stamping.
Abstract, ICMCTF-2011 (2011) 46.
2)
5
(2011)
3)
2011
27
[2-2] ,[2-3]
90 180spm
2.1.4
M3X0.5 HSS( )
A1100
70Pa 1200
(TH10) BOD( ) 2.1.1
10N 150mm-sec 3600sec. 0.15
3600
2.1.1
28
2.1.1
2.1.1 2.1.2
2.1.4
PEEK
2.1.3 2.1.4
2.1.5 ( )
(A1100)
2.1.6 DLC
S U S P EEK
29
2.1.5 2.1.6
2.1.7 T1 T2 T3 T4
T1 T4
-10V,-20V,-50V,-100V T5 T1 T4
-50V T6 -200V
2.1.2
2.1.7
30
2.1.7 T T
T3 T6 ( )
T3
A1100
A1100 1.0mm 2.73mm 1000
2.1.8
2.1.12 20
T1 T2 T3
T4 T5 T1 T2 T3
T6 T3
( )
( )
T3 T6
31
:
2.2.1 90spm
2.2.3 2.2.4
6.9mm 8.5mm 0.4t 1 1.23
0.1 cc / 30 ( 0.1cc/10 90spm
)
1
90spm
2.2.1 2.2.2
32
1:1
DLC
2.2.3 5,000
33
:
2.3.4,
0.1cc / 30 ( )
1 4
70
90spm
2.3.1
2.3.2
2.3.1
2.3.2
34
30 0.1 cc
180L
80 20
DLC
2011
60 DLC
2.3.3 10,000
2.3.4
35
50 DLC
10 0.1 0.2cc
36
Physical Vapor
Deposition Chemical Vapor Deposition 2
3.1.1
3.1.2
2
10
10
3
37
1
2 3
4
5 1 3 5
3.1.4 3.1.3
38
DLC
IPA( )
Co( )
)
(cermet)
(WC)
ceramics( ) metal( ) Wikipedia
39
PVD
DLC
1.0 ( )
A1100
6.9mm 8.5mm 0.4mm 1:1.23
90spm 0.1cc/30
5000
40
( )
0.1cc/30
10000
10000
CVD
PVD
PVD
PVD CVD
CVD
CVD
PVD
PVD
CVD
41
PVD
CVD
DLC
( )
( )
DLC ( )
DLC
ISO14001
( )
42
( DLC
( ) PVD
( )
- CVD
PVD
43