中小企業庁 / The Small and Medium Enterprise AgencyOI (3s5S0-3p5P) OI (3s3S0-3p3P) 1.3.2 O2 + e...
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Transcript of 中小企業庁 / The Small and Medium Enterprise AgencyOI (3s5S0-3p5P) OI (3s3S0-3p3P) 1.3.2 O2 + e...
( )
1
(6)
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5000 / / 1/2
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ISO14001
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SL ( 2010-045110)
DLC
. .
2
PVD CVD
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[1 1]
[1 2]
[1 3]
,
2
[2 1]
,
[2 2]
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124-0012
4 11
:03-3691-3156
:03-3697-0465 E-mail
270-1402
2654-1 :047-497-1101
:047-497-0219 E-mail [email protected]
144-0045
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:03-6424-8615 FAX :03-6424-8615 E-mail
108-8548
03-6722-2741
FAX 03-6722-2641
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135-0064
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FAX :03-5530-2458
144-0035
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FAX 03-3733-6235
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0493-24-6774
541-0053
3 4 8
06-7637-3263
541-0047
077-582-6505
105-0011
3-5-8
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03-3433-3730
144-0035
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03-3733-6144
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( )
( )
( )
2-2
2-2
59 21
5 21
( )
( )
( )
2-3
2-3
( 54 21 )
( 54 21 )
( )
1-2
2-2 2-3
1-1] 1-2
2-2 2-3
22
22
22
( )( )
7
Foo Jin Hoe ( )( ) 21
( )( )
( )( )
8
[1 1]
H22
[1 2]
H21 DLC CrN
H22 DLC CrN (Ti)
(W) ( / )
50GPa
100N 0.2 3600
CrN 250
100N 0.2 (0.15) 3600
( )1.0
[1 3]
H21
SL ( 2010-045110)
H22 Ar
9
(
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[2 1]
[2 2]
H22 5 10
mm mm mm :
SPM
[2 3]
H22 5 100
CC/ spm
10
135-0064 2 4 10
Tel: 03-5530-2111 Fax:03-5530-2458
E-mail: [email protected]
Tel:03-5530-2528 Fax:03-5530-2458
E-mail:[email protected]
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:
( 293 )
1.1.2
1.1.1 1 SKD11
0.1cc 1.1.1
1.1.1
12
1.1.2
1.1.2 C G SKD11 10
G C/A10% A C( )%
: 60 3A
: 10 25mm 64mm 256%
1.2.1 1.2.2
13
30 218% 1.1.1 50 306%
( )
( )
1.2.1
14
IPA (isopropyl alcohol)
( )
IPA
3
: (ball on disk) 2.1.1 T1107-001
60 T1107-003 6000.2 T1107-002
300 0.17 T1107-003
2.1.1
15
BOD 10N, 150mm.sec. 3600sec. SUJ-2 3/16in=4.76mm 100
T1107-004 60 T1107-005 300 T1107-006 600 TH-10 BOD
2.2.1 2.2.1 3T1107-006 600 160 35
TH-10
2.3.1
2.3.1
16
1 BOD T1107-002T1107-008 2.3.1 2000 2800
0.2T1107-002 3600
0.16 T1107-002
Ar
TH10
3.1.1
Ti10
Co 6mass
HRA92
GPa3.2
MPa
m1/26.8
14.9 3.1.1 Co ( )
THi
TH10
3.1.1 Co HTi10
Co Ar
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4.1.1
4.1.2
4.1.2 T1107-002 200 3
4.1.1 1 3
18
Cr ( )
Cr
Cr
Cr
JIS V40 V60
0.4s 0.2s
0.4s 100nm
DLC
DLC sp3 DLC
DLC 5nm 200 1 m
CrN 30 m DLC 5nm 200 1 m
1.2.2.1
0.2Pa
0.2Pa
1.2.2.1
19
PVD PVD
1.2.3.1
1.2.3.1
b
1.2.3.1 c
:
1.2.3.1
20
200
1.2.3.2
SmCo 170
200
SmCo
100
1.2.3.1 DLC
1.2.3.2
1.2.3.1
DLC
1.2.3.2
21
1.2.3.3
SN
1.2.3.2
1.2.3.2
1.2.3.3
22
24 4( 1.2.3.19)
4 mm
Cr
100nm
1.2.3.5 1.2.3.6 Cr
PVD
1.2.3.4 4
1.2.3.5 #1
1.2.3.6 #2
1.2.3.4 DLC
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1.2.3.7
1.2.3.6
1.2.3.7 WC
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1.3.1
1.3.1
1.3.2
1.3.2
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0
100
200
300
400
500
600
700
800
900
1000
350 450 550 650
Wavelength (nm)
O2*
O IIO2
+O2(?)
0
1000
2000
3000
4000
5000
6000
700 800 900
Wavelength (nm)
OI (3s5S0-3p5P)
OI (3s3S0-3p3P)
1.3.2
O2 + e O- + O
O2 + e 2O + e
O2 + e O+ + O + 2e
C + O CO
C + O* C-O
C-O
1.3.3
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1.3.3
206 nm, 210.8 nm, 240 nm, and 256 nm
1 T. Aizawa, et al.: Recycling of Used DLC-Coated WC/Co Dies for Practical Dry Stamping.
Abstract, ICMCTF-2011 (2011) 46.
2)
5
(2011)
3)
2011
27
[2-2] ,[2-3]
90 180spm
2.1.4
M3X0.5 HSS( )
A1100
70Pa 1200
(TH10) BOD( ) 2.1.1
10N 150mm-sec 3600sec. 0.15
3600
2.1.1
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2.1.1
2.1.1 2.1.2
2.1.4
PEEK
2.1.3 2.1.4
2.1.5 ( )
(A1100)
2.1.6 DLC
S U S P EEK
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2.1.5 2.1.6
2.1.7 T1 T2 T3 T4
T1 T4
-10V,-20V,-50V,-100V T5 T1 T4
-50V T6 -200V
2.1.2
2.1.7
30
2.1.7 T T
T3 T6 ( )
T3
A1100
A1100 1.0mm 2.73mm 1000
2.1.8
2.1.12 20
T1 T2 T3
T4 T5 T1 T2 T3
T6 T3
( )
( )
T3 T6
31
:
2.2.1 90spm
2.2.3 2.2.4
6.9mm 8.5mm 0.4t 1 1.23
0.1 cc / 30 ( 0.1cc/10 90spm
)
1
90spm
2.2.1 2.2.2
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1:1
DLC
2.2.3 5,000
33
:
2.3.4,
0.1cc / 30 ( )
1 4
70
90spm
2.3.1
2.3.2
2.3.1
2.3.2
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30 0.1 cc
180L
80 20
DLC
2011
60 DLC
2.3.3 10,000
2.3.4
35
50 DLC
10 0.1 0.2cc
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Physical Vapor
Deposition Chemical Vapor Deposition 2
3.1.1
3.1.2
2
10
10
3
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1
2 3
4
5 1 3 5
3.1.4 3.1.3
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DLC
IPA( )
Co( )
)
(cermet)
(WC)
ceramics( ) metal( ) Wikipedia
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PVD
DLC
1.0 ( )
A1100
6.9mm 8.5mm 0.4mm 1:1.23
90spm 0.1cc/30
5000
40
( )
0.1cc/30
10000
10000
CVD
PVD
PVD
PVD CVD
CVD
CVD
PVD
PVD
CVD
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PVD
CVD
DLC
( )
( )
DLC ( )
DLC
ISO14001
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( DLC
( ) PVD
( )
- CVD
PVD
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