Scale-Up Activities in Atomic Layer Deposition at Argonne Jeffrey Elam, Anil Mane, Joe Libera December 9, 2011 Large Area Picosecond Photodetector Collaboration.
Electrical measurements of sputtered NiCr on grid spacers (GS2mm) 07-11-2011 Dean Walters, Anil Mane Guy Harris, Jeff Elam.
Objective To deposit NiCr layer(150-200nm/side) on grid spacers for better electrical contact.
