Lecture 2
Design of a Rf Nems Switch
Robotics
Introduction-to-MEMS.pdf
Ali Besharatian March 16, 2008. A HARPSS Polysilicon Vibrating Ring Gyroscope Farrokh Ayazi and Khalil Najafi University of Michigan 2001.
A Novel Method for the Fabrication of High-Aspect Ratio C-MEMS Structures.
UCI Fall 2012 - Dr. Marc Madou. Chapter 1 Si as an Electronic. Photonic and Mechanical material Chapter 2 Lithography Chapter 3 Advanced Lithography.
Chapter 14: Fundamentals of Microelectromechanical Systems Jon Mah Eric Wilson.
Silicon Programming--Introduction to MEMS 1 Introduction to MEMS; energy domains; mechanical and fluidic devices.
Silicon Programming--Introduction to MEMS 1 Interfacing--MEMS; energy domains; mechanical and fluidic devices.
Bioinspired of Micro-fluidic systems Reach Symposium-2008 Shantanu Bhattacharya Assistant Professor Department of Mechanical Engineering Indian Institute.
TOPICS IN (NANO) BIOTECHNOLOGY Microfabrication techniques II May 26th, 2004 PhD Course.
