Microscale and Si Wafer. From macro to nano… Scaling laws of small Laws of physics make the small world look different.
Small Scale Effect. From macro to nano… Scaling laws of small Laws of physics make the small world look different.
1 Micro-fabrication Process. 2 Clean Room 3 Clean room classifications and applications.
MEMS Class 2 Materials for MEMS Mohammad Kilani. MEMS Materials Silicon-Compatible Material System Silicon Silicon Oxide and Nitride Thin Metal.
