Comparative Effectiveness Approaches with ARRA Funding and the Critical Role of Health IT Carolyn M. Clancy, MD Director Agency for Healthcare Research.
AGENDA
Founded in 2008 “to promote and coordinate multidisciplinary research and education in the molecular and nanosciences” INSTITUTE-WIDE THEMES Molecular.
SPACE AND PHASE RESOLVED MODELING OF ION ENERGY ANGULAR DISTRIBUTIONS FROM THE BULK PLASMA TO THE WAFER IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMAS*
YYANG_AVS2006_01
DEVELOPMENT OF ION ENERGY ANGULAR DISTRIBUTION THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhang a, Nathaniel.
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS THROUGH INTERACTION OF ELECTRON BEAMS AND THE BULK IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark.
YY_MJK_ICOPS2009_01
INVESTIGATIONS OF MAGNETICALLY ENHANCED RIE REACTORS WITH ROTATING (NON-UNIFORM) MAGNETIC FIELDS
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS AND FLUX RATIOS IN PULSED CAPACITIVELY COUPLED PLASMAS *
* Work supported by National Science Foundation and Semiconductor Research Corp.