The top documents tagged [micromachining processeshttp]

MEMS devices: How do we make them? Sandia MEMS Gear chain Hinge Gear within a gear A mechanism.

MEMS devices: How do we make them? Sandia MEMS Gear chain Hinge Gear within a gear A mechanism.

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MEMS devices: How do we make them?

MEMS devices: How do we make them?

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