MEMS Class 6 Microactuators Mohammad Kilani. Actuation principles A complete shift in paradigm becomes necessary to think of actuation on a miniature.
MEMS Class 5 Micromachining Technologies Mohammad Kilani.
MEMS Class 3 Fabrication Processes for MEMS Mohammad Kilani.
MEMS Class 2 Materials for MEMS Mohammad Kilani. MEMS Materials Silicon-Compatible Material System Silicon Silicon Oxide and Nitride Thin Metal.
MEMS Class 6 Microsensors Mohammad Kilani. Sensing principles The interaction of physical parameters with each other—most notably electricity with mechanical.
MEMS Class 10 Design Realization Tools for MEMS Mohammad Kilani.
