Deposition and Etching of Thin Films Nathaniel J. C. Libatique, Ph.D. [email protected].
A novel MEMS platform for a cell adhesion tester Ethan Abernathey Jeff Bütz Ningli Yang Instructor: Professor Horacio D. Espinosa ME-381 Final Project,
A. Transport of Reactions to Wafer Surface in APCVD 1.Transport of reactants by forced convection to the deposition region 2.Transport of reactants by.