Advanced Photoresist Technology Jie Sun EE 518 Instructor: Dr. Jerzy Ruzyllo Apr. 4 2006.
Final Public_ORTC Model Status Review 2009 vs 2008_Rev 10_w ...
Nanoimprint lithography (NIL) 1.Overview. 2.Thermal NIL resists. 3.Residual layer after NIL. 4.NIL for large features (more difficult than small one).
