NUMERICAL INVESTIGATION OF WAVE EFFECTS IN HIGH-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yang Yang and Mark J. Kushner Department of Electrical and Computer.
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Song a) and Mark J. Kushner b) a) Department of Nuclear Engineering.
SPACE AND PHASE RESOLVED MODELING OF ION ENERGY ANGULAR DISTRIBUTIONS FROM THE BULK PLASMA TO THE WAFER IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMAS*
DEVELOPMENT OF ION ENERGY ANGULAR DISTRIBUTION THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhang a, Nathaniel.
YY_MJK_ICOPS2009_01
AGENDA
CONTROL OF ELECTRON ENERGY DISTRIBUTIONS AND FLUX RATIOS IN PULSED CAPACITIVELY COUPLED PLASMAS *
* Work supported by National Science Foundation and Semiconductor Research Corp.
NUMERICAL INVESTIGATION OF WAVE EFFECTS IN HIGH-FREQUENCY CAPACITIVELY COUPLED PLASMAS*
SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS * Sang-Heon Song a) and Mark J. Kushner b)
ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
WAVE AND ELECTROSTATIC COUPLING IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMAS
