EE143 - Ali Javey Section 4: Thermal Oxidation Jaeger Chapter 3.
EE143 – Ali Javey Section 4: Diffusion part 2 Jaeger Chapter 4.
EE143 – Ali Javey Section 5: Thin Film Deposition Part 2: Chemical Methods Jaeger Chapter 6.
EE143 – Ali Javey Section 6: Ion Implantation Jaeger Chapter 5.