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Pressure sensor 2.008-spring-2003. Surface Micromachining 2.008-spring-2003 Deposit sacrificial layer Pattern anchors Deposit/pattern structural layerEtch.

Pressure sensor 2.008-spring-2003. Surface Micromachining 2.008-spring-2003 Deposit sacrificial layer Pattern anchors Deposit/pattern structural layerEtch.

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