1 Seoul - December 20081 Yield Enhancement - International Technical Working Group ITRS Conference Seoul - December 2008 Lothar Pfitzner, Fraunhofer-IISB,
1 San Francisco July 12, 2012 ITRS - YE ITWG Conference in San Francisco July 12, 2012 Lothar Pfitzner [email protected].
1 San Francisco July 14, 2010 ITRS - YE ITWG Conference in San Francisco (USA) July 14, 2009 L. Pfitzner, [email protected].
1 HsinChu December 5, 2012 ITRS - YE ITWG Conference in HsinChu December 5, 2012 Lothar Pfitzner [email protected].
1 Makuhari Messe December 3, 2010 ITRS - YE ITWG Conference in Makuhari Messe (Japan) December 3, 2010 Lothar Pfitzner [email protected].
Layout Small-Angle Rotation and Shift for EUV Defect Mitigation Hongbo Zhang 1, Yuelin Du 2, Martin D.F. Wong 2, Yunfei Deng 3, Pawitter Mangat 3 1 Synopsys.
Layout Small-Angle Rotation and Shift for EUV Defect Mitigation
