Microscale Device Fabrication: Electrochemical Deposition (EMD) of Metals By Mahmoud Hayat and Cerise McLaren.
Nanoimprint lithography (NIL) 1.UV-curable NIL. 2.Resists for UV-NIL. 3.Mold fabrication for thermal and UV-NIL. ECE 730: Fabrication in the nanoscale:
Microscale Device Fabrication: Electrochemical Deposition (EMD) of Metals