UNIVERSITY OF KUOPIO 9.11.2007 Mirella Miettinen M.Sc., Research Scientist CONTROLLED SYNTHESIS OF NANOPARTICLES FOR INHALATION EXPOSURE STUDIES M. MIETTINEN.
PART III: METALORGANIC CHEMICAL VAPOR DEPOSITION Description of the MOCVD equipment Analysis of the MOCVD growth process Growth modes in MOCVD.
