Recent Progress with Atomic Layer Deposition
Promising Directions for Developing Nano-structured Photocathodes
Atomic Layer Deposition for SCRF RF in the MTA 11/15/10 J. Norem ANL/HEP.
SRF Materials Workshop; MSU, October 29-31, 2008 Recent Progress with Atomic Layer Deposition T.Proslier 1,2, J.Norem 1 J.Elam 3, M.Pellin 4, J.Zasadzinski.