Report - Ohmic contacts formation on AlGaN/GaN HEMTs by ...Trade off AlGaN thickness R C 0 3E+12 6E+12 9E+12 1.2E+13 1.5E+13 0 10 20 30 40 2DEG conc. [10 12 cm-2] AlGaN thickness [nm] 0 6 3

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