SURFACE ENGINEERING 3
Atomic Layer Deposition (ALD) Technology:Innovative Layer-by-Layer Design of New Materials,
State-of-the-Art Surface Engineering & Nanostructuring
Comparison of the coating processes
Principal scheme of ALD
Advantages of ALD (1)
Advantages of ALD (2)
Schematic representation of ALD reactor
Typical films
MLD (Molecular Layer Deposition)
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