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Development of Dual PZT Transducers for Reference-Free ...ssslab.kaist.ac.kr/article/pdf/2010_Development.pdf · ner circle part of dual PZT B (PZT b) when the excitation is applied
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Early Stage Technology Workshop: Integrated Control ... · BCB. ZnO Al. 2. O. 3. 1) Deposit Ti/Pt bottom electrode 2) Sputter PZT and lift off Pt top electrodes 3) Spin coat BCB,
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COMPARATIVE MATERIAL STUDY BETWEEN PZT CERAMIC … · Comparative material study between PZT ceramic and newer crystalline PMN-PT and PZN-PT...3 Fig. 3. FEM of PZT-5H plate stretching:
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Fabrication and Characterization of Microstacked PZT Actuator
