MEMS/NEMS – Micro Resonators

Courtesy of (a) D. Freeman (b) O. Brand (c), F. Ayazi and (d) C. Nguyen

(a)

(b)

(c) 100 MHz

(d) 651 MHz

Micro Resonators – Q Problem

Courtesy of Professor C. Nguyen

Q = 4550Required Q = 10,000

Micro Resonators – Q Problem

Q = 27