8/15/2019 LER Frigerio DeLaGEstion
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Design Impact of BEOL LER - EUV Litho · LER —correlation length: λ • Power spectral density (PSD) of LER — Gaussian or exponential autocorrelation function • Analytical
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Line Edge Roughness - Applied Math SolutionsIt is impossible to list all the numerous references to LER data, LER modeling, LER metrology, LER effects, etc. The references listed on
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