FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Grzegorz [email protected]
Introduction to beam monitor
Design and test results of MAPS for a novel technique of hadron theraphy beam monitoring
conclusions
Design of MimoTera Use of Mimosa 5 as test vehicle
First results with mimotera (very fresh)
SUCIMA–Silicon Ultra Fast Camera for Electron and Gamma Sources in Medical ApplicationsEU funded, project led by M. Caccia (Universita’ dell’Insumbria Como, Italy)
MIMOSA–Minimum Ionising particle MOS Active pixel sensorproject led by M. Winter (IReS/LEPSI IPHC Strasbourg, France)
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Introduction to beam monitor Hadrontherapy real timereal time beam monitoring beam monitoring 60-250 MeV p, 120-400 MeV 60-250 MeV p, 120-400 MeV 1212CC6+6+
Innovative Non-Destructive Beam Monitor for the Extraction Lines of a Hadrontherapy Centre
vacuum chamber
secondary emission foil
electron detector
PROFILE/CURRENT MEASUREMENT
hadron beam
e- beamHV
20 keV
SEM electrons from 0.1 – 0.4 µm thick
(Al-Al2O3-Al) foils
5 5000 rad/s (0.05 50 Gy/s)
10 kHz frame rate (<2% dose non-uniformity)10 kHz frame rate (<2% dose non-uniformity),, beam 70beam 70××70 mm70 mm22 demagnification demagnification ××5,5, beam image granularity ~1 mm beam image granularity ~1 mm pixel pitch ~200 pixel pitch ~200 m,m, active area matrix of minimum 5000 pixelsactive area matrix of minimum 5000 pixels,, signal range single signal range single ee-- to 9to 9×10×1033 e e--/pixel every 100 µs/pixel every 100 µs,, sensitivity to 20 keV esensitivity to 20 keV e--,, no dead timeno dead time..
Thinned and back side illuminated detector required
choice – dedicated MAPS sensor
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Introduction to beam monitor SLIM (SEM for low interception monitor)
electrostatic cross-focusing
demagnification system
•Foil Voltage: -20000 V•CageVoltage: -20000 V•Ring Voltage: -18900 V•Cylinder 1: -13200 V•Cylinder 2 + Detector: 0 V
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
MIMOSA 5, MIMOSA 5, 512 × 512 pixels, 1 × 106 pixels, 0.6 µm CMOS process with 14 µm epi, pixel: 17 × 17 µm2, diodes: P1 - 9.6 pm2, P2 - 24.0 pm2, control logic and all pads aligned along one side,
Use of Mimosa 5 as test vehicle
not optimised for any particular application, general development –
IReS-LEPSI work in 2001
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Readout time = Integration time ~8 ms @ 40 MHz fclk.
Frame subtraction = CDS, (in DAS – hardware or data analysis – software)Frame subtraction = CDS, (in DAS – hardware or data analysis – software)
Use of Mimosa 5 as test vehicle
very efficient approach because single frame noise much higher than only kTC – usually a lot of substrate pick-up during reset plus reset inefficiency
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Use of Mimosa 5 as test vehicle back-side sensitivity with “0” dead layerback-side sensitivity with “0” dead layer (MIMOSA 5) (MIMOSA 5)
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
20.0 kV
Reconstructed signal clusters~60k hitsCooling ~0°C
Use
of M
imos
a 5
as t
est
vehi
cle
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
4kV – 20kV
Close to linear dependence «signal magnitude v.s. accelerating voltage» for ~10 – 20 keV;
Despite of poor precision, result between 0.5 keV and 1 keV, when the last 4 points are taken, is in a good agreement with simulations of electron interactions in the detector.
Peak positions of signal distributionsCooling ~0°C
Use of Mimosa 5 as test vehicle
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
2
4 2
4
0
0.25
0.5
0.75
1
2
4
0
0.25
0.5
0.75
1
2
4 2
4
0
0.25
0.5
0.75
1
2
4
0
0.25
0.5
0.75
1
2
4 2
4
0
0.25
0.5
0.75
1
2
4
0
0.25
0.5
0.75
1
Asserting usefulness of MAPS for imaging by direct conversion of incident energy of Asserting usefulness of MAPS for imaging by direct conversion of incident energy of electrons into eelectrons into e--hh++ pairs in silicon for future STEM and TEM. pairs in silicon for future STEM and TEM.
Competitive approach to currently used image plates and scintillator coupled cameras Competitive approach to currently used image plates and scintillator coupled cameras
measurements of PSF measurements of PSF in SEM set-up in SEM set-up (6-30 keV electrons) (6-30 keV electrons) on back-side on back-side illuminated MIMOSAilluminated MIMOSA 5 5
Use of Mimosa 5 as test vehicle
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Dedicated MAPS design to beam monitoringDedicated MAPS design to beam monitoring
CVF=~250nV/e- @ 500fF; noise ~1000 e- 280 e- kTC (ENC) @ 500fF,
Design of Mimotera
pixel 153×153 µm2 square pixels,
two 9×9 interdigited arrays of n-well/p-epi diodes (5×5 µm2) + two independent electronics – avoiding dead area,
In-pixel storage capacitors – choice ~0.5 pF or ~5 pF to cope with signal range (poly1 over tox capacitors),
Readout without CDS – kTC noise,
153 m
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Design of Mimotera pixel design aiming low leakage currentpixel design aiming low leakage current
• accumulation of positive charges in STI/FOX – inversion of p-type material at the interface and conduction path,• high density of trap sites along trench walls (crystal orientation) and at the bottom of the trench (RIE) – current generation,• accumulation of positive charges and charged ( + or - ) occupied traps - distribution of electric field in the device.
Avoided:
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Design of Mimotera
Suba
rray
0 Su
barr
ay
1 Suba
rray
2 Su
barr
ay
3
17.136 × 17.136 mm2
digital
28 columns (30 clocks)
112 rows (114 clocks)
MimoTera
chip size: 17350×19607µm2,
array 112×112 square pixels,
four sub-arrays of 28×112 pixels read out in parallel read/integr<100µs,
AMS CUA 0.6 µm CMOS 14 µm epi,
no dead time – alternate integration and readout in halves of pixels,
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Design of Mimotera
array of pixel
column level circuitry; 2 levels of source followers
adjustable gain output buffer 3:1 analog MUX
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Design of Mimotera
big load capacitances on vertical and horizontal access lines,
increase of readout speed by multiplexing readout lines with advanced stabilization,
Design for speed Design for speed
unequal speed for both signal polarities for source follower,
v_pull_down source follower
output pulled down (N) / up (P) before readout,
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
First results of Mimotera Tests with Tests with 241241Am sourceAm source
All reconstructed hits projected on a single image - frame A and frame B for small conversion capacitance
distance from detector ~1cm (E=4MeV) + charge shared equally between two arrays of diodes
4×106 / 3.6 / 2 = 555,000 e-
maximum signals measured 250 mV (output)
250 / 5 / 0.8 = 62.5 mV
CVF=112 nV/e- (small conversion capacitance); 3.5 × difference for big capacitance
1.42pF small capacitance <4000 e- ENC
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
First results of Mimotera Tests with pulsed laser systemTests with pulsed laser system
(clusters of arbitrary multiplicity)
~5×106 e-
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
First results of Mimotera Tests on 17 MeV p beam in SLIM Tests on 17 MeV p beam in SLIM at JRC Ispra, Italyat JRC Ispra, Italy
~ 1 m upstream the SLIM
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
First results of Mimotera
nominal settingsnominal settings: 20.0 kV Al foil,: 20.0 kV Al foil, 17.69 kV rings 17.69 kV rings;; the the beam beam SLIM: unSLIM: un--measurably low measurably low (20 nA on the collimator)(20 nA on the collimator). .
Tests on 17 MeV p beam in SLIM at JRC Ispra, ItalyTests on 17 MeV p beam in SLIM at JRC Ispra, Italy
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
First results of Mimotera Tests on 17 MeV p beam in SLIM at JRC Ispra, ItalyTests on 17 MeV p beam in SLIM at JRC Ispra, Italy
5 mm collimator
~2.2 mm demagnification factor < 2.5 (expected 4 – beam
divergence ?)
operation with beam currents from a few nA up to 1 A
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
Conclusions
Dedicated MAPS device for SLIM up and running! correct operation of the chip (tested up to 20 MHz)correct operation of the chip (tested up to 20 MHz),, imaging capabilities tested with imaging capabilities tested with 241241Am (calibration of CVF difficult and not precise)Am (calibration of CVF difficult and not precise),, beam monitoring capabilities tested with p beam @ JRC Ispra, Italy.beam monitoring capabilities tested with p beam @ JRC Ispra, Italy.
Detailed analysis required to:
direct low energy electron detection capabilities demonstrated with backthinned MIMOSA 5 detector.
calibrate absolute CVF (typical X-ray source calibrate absolute CVF (typical X-ray source – low signal - huge input capacitance, – low signal - huge input capacitance, Poisson statistics method Poisson statistics method – shot noise dominated by thermal noise) – shot noise dominated by thermal noise),, verify input capacitance ratio; measured 3.5 – expected 8-10verify input capacitance ratio; measured 3.5 – expected 8-10,, understand drifting of baseline (das?, chip?).understand drifting of baseline (das?, chip?).
Prove of using MAPS technology for very specialized applications
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
MIMOTERA parametersMIMOTERAMIMOTERA
Size [pixel] 112 x 112
Pixel pitch [m2] 153 x 153
Matrix size [mm2] 17.1 x 17.1
Max. frame rate [kHz] 10 (tested 2 x slower)
Dynamic range (20 keV e-)1 ÷ 1000 /pixel/100 s (high gain)
1 ÷ 15000 /pixel/100 s (low gain)
MIMOTERA estimated parameters (MIMOTERA estimated parameters (preliminarypreliminary))
Conversion gain [nV/e-] 110 (small cap) 32 (big cap)
Noise [e- ENC] 2000-4000
Power [mW] 200
Leakage current to be measured
Operation temp. RT
FEE2006, Perugia, MAY 17-20 2006
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Grzegorz DEPTUCH
estimation of estimation of imaging performances imaging performances for front and back side for front and back side illuminated MAPSilluminated MAPS
dependence on energy, strong presence of back-scatteringdependence on energy, strong presence of back-scatteringdifferences between front side and back-side illuminated devicedifferences between front side and back-side illuminated device
sum + sum + projection + projection + normalisationnormalisation
on PCBon PCBon holeon hole
M5F: ~10M5F: ~10 m SiOm SiO22,15,15m epi, m epi, 100100 m substrate + PCBm substrate + PCBM5B: ~100M5B: ~100 nm SiOnm SiO22,15,15m epi, m epi, 500500 m substrate + PCBm substrate + PCB
Use of Mimosa 5 as test vehicle SPARE SLIDESPARE SLIDE
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