Electron-matter interactions

• Electron-matter interactions accounts for:– Backscattering– X ray emission– Exposure dose modification

• CASINO– “monte CArlo SImulation of electroN trajectory

in sOlids”– http://www.gel.usherb.ca/casino/– casino.exe

Example: multilayers

Example: “grain boundary”

Same exposure but different substrates

• YBCO/STO • MgB2/Al2O3

CASINO simulations of the energy deposited by the ebeam

• YBCO/STO– YBCO: 3.36 g/cm3

– STO: 2.35 g/cm3

• MgB2/Al2O3

– MgB2: 1.98 g/cm3

– Al2O3: 1.90 g/cm3