Overview
With more microelectromechanical systems (MEMS) being widely used for automotive and consumer electronics, the need for a robust MEMS and mixed-signal co-design flow is becoming crucial. This flow should equally enable system-on-chip (SoC) and system-in-package (SiP) approaches. A clear-cut interface between a MEMS design sub-flow and the conventional mixed-signal sub-flow is necessary.
Provided as Virtual Integrated Computer-Aided Design (VCAD) Productivity Package, the Cadence® SIMPLI Mixed-Signal/MEMS Co-design Methodology handles the special requirements for a MEMS method-ology for both SoC and SiP applica-tions.
SIMPLI ensures efficient handling of concurrent design/optimization of the MEMS and electronics while handling engineering change orders (ECO) between the two domains.
The Cadence® SIMPLI Mixed-Signal/MEMS Co-design Methodology handles the special requirements for a MEMS methodology for both system-on-chip (SoC) and system-in-package (SiP) applications. Silicon MEMS Platform Interchange – SIMPLI, which supports Cadence Virtuoso® users, ensures efficient handling of concurrent design/optimization of the MEMS and electronics while handling engineering change orders (ECO) between the two domains.
Cadence SIMPLI Mixed-Signal/MEMS Co-design MethodologyFor Cadence Virtuoso Users
MEMSInter-digitized
Sendor
ClockTree C-to-V
SignalProc ADC
MEMS IP Analog + Mixed Signal +Digital Components
Single MonolithicCMOS-MEMS
MEMS Design Sub-Flow
Electro-mechanicalSimulation
PhysicalDesign
SIMPLI
FunctionalValidation
PhysicalIntegration
Mixed-Signal/MEMS DesignSub-Flow
ElectricalSimulation
PhysicalDesign
Foundry Design Kit
IC System Specifications
Electro-Mechanical
MEM
S SpecificationsDigital
Analog (M
ixed-Signal)
Top-Down
Top-Down
Bott
om-U
p
IntegrationPublishing
Figure 1
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Cadence SIMPLI Mixed-Signal/MEMS Co-design Methodology
A Monolithic Mixed-signal / MEMS Co-design Methodology
The MEMS sub-flow follows a top-down approach starting with behavioral modeling down to finite-element simulation.
For the MEMS sub-flow, a Cadence-based design sub-flow is readily available, yet the flow is equally portable to many third-party MEMS point tools through the use of SIMPLI.
The proposed MEMS sub-flow is demonstrated by 18 design tasks. An x-axis MEMS acceler-ometer design has been chosen to demonstrate these design tasks from specifications to publishing.
A meet-in-the middle approach is used for the mixed-signal sub-flow, a variant of the Cadence AMS Design Methodology. This will decrease the entry barrier for the integration of the MEMS structure. On the other hand, most of the specific steps that have to be handled by mixed-signal designers due to the presence of the MEMS structure are handled from a single cockpit called SIMPLI. Thus, mixed-signal designers will not need special training on the MEMS sub-flow.
2AMEMS
Executable Specifications
Creation
3AMEMS
TopologySelection
2BMEMS Design
ValidationStrategy
2CAuxiliary DRCRules Creation
5BMEMS BlockEarly Design
Rule Checking
3BP-Cells
Creation
4BMEMS Layout
Nominal DesignGeneration
4AGeometrical/Mechanical
NominalDesign
6Geometrical/Mechanical
ModelsEnhancement
7BGeometrical/Mechanical
DesignOptimization
7ANominal/Statistical
Verification withEnhanced
Models
7CMEMS Layout/Abstract Final
Design Generation
8AFinite-Element
Signoff
8BN-DOF
Reduced-OrderModel
Generation
8CMEMS BlockFinal Design
Rule Checking
9MEMS IPPackaging
8DMEMS Block
ElectricalParasitic
Extraction
5ANominal Finite
ElementVerification
MEMS Top-Down Functional DesignMEMS DesignDataInput
MEMS Top-Down Physical Design
1AMEMSDesignSpecs
1BFoundryDesign
Kit180nm
Figure 2: MEMS Design Sub Flow
2IC DesignValidationStrategy
3AMS DesignPartitioning
4Block
Specifications
6AIC DesignFunctionalConcept
Validation
7IC Design
Respecification
9IC Design
Functional PerformanceValidation
13IC Post-Layout
Validation
16IC DesignFunctional
Signoff
IC Top-Down Functional Design
IC Top-Down Functional Design
IC Top-Down Functional Design
IC DesignData Input
1ADesignSpecs
1BModifiedFoundry
Design Kit(180nm)
1CSystem-Level
Models
1DSystem-LevelTestbenches
1EMEMS
Packaged IP
1FMEMS DFII
Testbenches
1G3rd Party IP
1HLegacy IP
5AAnalog BlockCircuit Design
5EMEMS IPImport
5BAnalog Block
BehavioralDesign
8AAnalog Block
CircuitOptimization
10AAnalog Block
PhysicalEstimation
12AAnalog Block
Physical Design
10BDigital Block
PhysicalEstimation
12BDigital Block
Physical Design
14Block Physical
IntegrationPreparation
5DDigital
HierarchicalRTL Design
5CLegacy and 3rdParty IP Import
8BDigital Block
Synthesis
6BIC Design
EarlyFloorplanning
11IC RefinementFloorplanning
15IC DesignAssembly
Figure 3: Mixed Signal / MEMS Design Sub Flow
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Cadence SIMPLI Mixed-Signal/MEMS Co-design Methodology
SIMPLI: An IP Publishing and Importing Interface Dedicated to the MEMS Domain
One challenge in the co-design of the MEMS and the mixed-signal portions of the chip is the fact that they might not necessarily share the same flow. Moreover, the information required by the mixed-signal design team might not be readily available from the MEMS point tools.
An extra layer is needed to automate the generation of all the necessary infor-mation from the MEMS tools, while still allowing for IP protection.
SIMPLI operates on standard inputs and generates views required for mixed-signal design within the Cadence Design Framework.
Moreover, SIMPLI automates the extraction of parasitic coupling capaci-tances at the interface with the released MEMS structure.
With SIMPLI, you have the flexibility to export your layout as an abstract view and the behavioral or reduced-order models in a 128-bit RSA encrypted format, which will still be useful for simulation by the mixed-signal design group.
FunctionalDescription
FilesGDSIIFiles
LEFFiles
SpecificationFiles
MeasurementFiles
AssuraCustomization
CDLNetlist
LayoutGDSII File
EncryptedFunctional File
AbstractLEF File
FunctionalView
Spice,Spectre
Coupled CNetlists
Functional View
CDL Black-Box
SpectreBlack-Box
AbstractView
LayoutView
SymbolView
TargetPDK
SpiceBlack-Box
Black-Boxing
AbstractGeneration
Coupled CExtraction
SymbolGeneration
LayoutGeneration
DRC
SIMPLI LibraryProcessor
Required MEMS IP Input Files
Auxiliary Virtuoso not shipped
Figure 4: SIMPLI
Figure 5: Accelerometer example
Figure 6: SIMPLI generated abstract and RSA encrypted code
Cadence SIMPLI Mixed-Signal/MEMS Co-design Methodology
Cadence is transforming the global electronics industry through a vision called EDA360. With an application-driven approach to design, our software, hardware, IP, and services help customers realize silicon, SoCs, and complete systems efficiently and profitably. www.cadence.com
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SIMPLI Inspect
The purpose of SIMPLI Inspect is to help generate the necessary motion-aware parasitic capacitance contribution. SIMPLI Inspect can be used by either the MEMS or IC design teams, provided that the layout was originally created by SIMPLI.
MEMS Characterize lets you specify the number of points for extraction. The range of values are defined as part of the SIMPLI spec file and are saved together as part of the layout database. You
can identify the number of displacements either by the Linear Step Size or Number of Points. SIMPLI Inspect starts to move the floating part (saved as sub-instance) with respect to the fixed frame, and each time carry out the extraction using Cadence QRC Extraction.
MEMS Methodology Flows
The MEMS methodology is represented as three major flows. Each flow contains several executable scenarios.
MEMS Design Sub-flow
• Concept validation
• Functional verification
• Physical design
• Post-layout and sign-off
Figure 7: SIMPLI Inspect
MEMS IP Publishing and Importing
• MEMS IP publishing using SIMPLI
• MEMS IP importing using SIMPLI
Mixed-signal Design Sub-flow
• Concept validation
• Functional verification
• Full-chip assembly
• Post-layout and sign-off
• Full-chip co-optimization
VCAD Productivity Packages
VCAD Productivity Packages are a set of pre-packaged generic core solutions that increase design system productivity. Productivity Packages are available within services contracts, which include the package integration and maintenance of the customized solution. Cadence VCAD services targets the development, implementation, and ongoing improvement and mainte-nance of productive design systems to ensure short time to market and silicon success.
SIMPLI is available through Cadence VCAD Services. For more information, please contact:
Louis ThiamTel.: +49 89 4563 1957 E-mail: [email protected]
Ahmed Hussein Osman Tel.: +49 89 4563 1737 E-mail: [email protected]
Cadence Design Systems GmbH Mozartstrasse 2 85622 Feldkirchen Germany
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