8/15/2019 3.4U Notes
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Silicon DRIE vs. Germanium DRIE A Comparison in the ... DRIE... · Ge R9 PR: 5um gap 67um, 3.4u/min, AR=13.5:1 . CNF TCN, page 16 Plasmatherm Versaline Silicon DRIE Si DRIE-IAT-AS200-PR
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3.4U - Underwater Inspection Controller
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