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Development of EUV sources with tin fuelDevelopment of EUV sources with tin fuel
and rotating disk electrodesand rotating disk electrodes
V.V. BorisovBorisov
StateState ResearchResearch CenterCenterofofRussianRussian FederationFederation
TROITSK INSTITUTE FOR INNOVATIONTROITSK INSTITUTE FOR INNOVATION & FUSION RESEARCH& FUSION RESEARCH(SRC RF TRINITI)(SRC RF TRINITI)
SRC RF TRINITI 2006 EUVL Symposium
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Evolution of discharge
produced plasma source
at SRC RF TRINITI
Rotating
disc cathode
Tin layer Rotating disc anode
EUV light
Insulator
AnodeCathode
2001
Xe, CE=0.5%
2002Sn, CE=2%
2003Sn, CE=2%
& long electrode life time
Sn
Laser beam
Cathode
Preionizer
Insulator
Cooling
EUV light
Laser beam
Cooling
Anode
Xe gas
EUV light
SRC RF TRINITI 2006 EUVL Symposium
ROTATING DISC ELECTRODES (RDE)
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RDE SOURCE
Design # 1
SRC RF TRINITI 2006 EUVL Symposium
Features.Capacitors are arrangedoutside the vacuumchamber and connect withRDE by liquid metal slidingcontacts.Operation with solid or liquid
tin is possible.
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RDE SOURCE
Design # 2
SRC RF TRINITI 2006 EUVL Symposium
Features.
Capacitors are placed insidethe vacuum chamberbetween the rotating discelectrodes.Operation with solid or liquidtin is possible.
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RDE SOURCE
Design # 3
SRC RF TRINITI 2006 EUVL Symposium
Features.Tin is delivered by passing
the rotating disc electrodesthrough the baths withliquid tin.The liquid tin into the bathsis used for both heat
removal from electrodesand sliding contacts.Simple system of tinsurface regeneration.
Laser
Vacuum chamber
Turbopump
Discharge
HeaterCoolingcanal
Bath withliquid tin
Pulse
powersystem
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0 4 8 12 16 20 24
Energy input, J
0
0.5
1
1.5
2
2.5
CE,%
Conversion efficiency as function of input energy
SRC RF TRINITI 2006 EUVL Symposium
High- effective operation at high input energies (Ein
~ 8 J /pulse) gives the possibility to
achieve the required EUV source parameters at acceptable repetition rates (7 10 kHz).
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Effects of Sn vapor plum generation
at the cathode or at the anode
SRC RF TRINITI 2006 EUVL Symposium
EUVEne
rgy,a.u.
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Configuration of EUV emitting region
for different discharge conditions
a b c
SRC RF TRINITI 2006 EUVL Symposium
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Operation with liquid tin:
increase of the tin droplets production
0 5 10 150
40
80
EUVene
rgy/pulse,
mJ/2s
r/2%BW
Time,ms
Output power 240 W/2 sr at 4 kHz
Design #3
SRC RF TRINITI 2006 EUVL Symposium
The use of liquid tin provides simplemethod of tin surface regeneration forrotating disc electrodes, but leads to highlevel of tin droplets production.
Design # 2
O ti ith lid ti ll t f t i
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Time, 50 msec/divEU
VEnergy,mJ/2
sr
70
Operation with solid tin: small amount of tin
droplets production
SRC RF TRINITI 2006 EUVL Symposium
Rotating disc electrodes
0 200 400
Pulse number
0 200 400
Pulse numberEUVEnergy,mJ/2
sr
70
EUV signals after 6 mil lions pulses at 3 kHz if
the system of tin surface regeneration is not used
EUVEnergy,m
J/2
sr
70
Time, 50 msec/div
Tin surface after 6 millions pulses if systemof t in sur face regenerat ion is not used
decrease of EUV energy with pulse number
Ion detector signals, provided by laser beam
Non- rotating disc electrodes:
EUV signals with fresh sol id t in surface at 3 kHz
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Output power 220 W/2
sr at 3 kHz
SRC RF TRINITI 2006 EUVL Symposium
Start of operation
1 hour of operation
2 hours of operation
Long time operation of EUV source with
tin surface regeneration system
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EUV source operation at 20 kW input
power and 4 kHz
Output power 280 W/2 sr
SRC RF TRINITI 2006 EUVL Symposium
0 1000 2000 3000 4000 5000
0
50
100
150
200PRR=4000Hz; Ein=5J ;
EUVE
nergy,mJ/2
sr
Time, msec
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Pulse-to-pulse stability over 100 shots
for solid (a) and for liquid (b) tin
0 20 40 60 80 1000,0
0,2
0,4
0,6
0,8
1,0
1,2
1,4
NormalisedEUV
=11,5%
0 20 40 60 80 1000,0
0,2
0,4
0,6
0,8
1,0
1,2
1,4
=8,6%
NormalisedEUV
b)
a)
SRC RF TRINITI 2006 EUVL Symposium
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SRC RF TRINITI 2006 EUVL Symposium
Several designs of RDE source have been investigated at SRC RFSeveral designs of RDE source have been investigated at SRC RF
TRINITI during the two last years. RDE sources can operate withTRINITI during the two last years. RDE sources can operate with solidsolid
and/or liquid tin at input power up to 20 kW and pulse repetitioand/or liquid tin at input power up to 20 kW and pulse repetition rate up ton rate up to
4 kHz. The obtained experimental results do clearer both the ma4 kHz. The obtained experimental results do clearer both the mainin
problems to meet HVM requirements and the directions of next efproblems to meet HVM requirements and the directions of next efforts.forts.
Conclusion
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