ZYGO White Light Interferometry -...
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1
ZYGO White Light Interferometry
Surface Roughness Measurement
August, 2015
Mechanics
• Three dimensional surface structure analyzer
• Light interferometric optical profiler
• Non Contact, non destructive
• Two light paths create interference.
• Vertical (Z axis) by light interference
• Lateral by pixel size calculation
• Data then analyzed and filtered
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New View 7100
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Filters
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Data Filter – 3 Bands
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Filter Settings
• Valuable date can be lost by high filtering.
• Recently, the IPC committee on Metallic Foil
Roughness Measurement decided that all high
frequency roughness data should be without
high filter to optimize results.
• The low frequency filter is useful for removing
any underlying surface “waviness” resulting
from the glass weave.
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Zygo Measurement Definitions
• Ra – The average surface roughness, or average
deviation, of all points from a plane to fit the surface,
measured in microns.
• Rz – Ten point height, or the average absolute value of
the five highest peaks and the five lowest valleys,
measured in microns.
• RSAR – Surface Area Ratio is equal to (surface
Area/Area) -1
• Rq - Root mean square of the average deviation
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Ra – Average Peaks & Valleys
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Rz – 10 Maximum Peaks & Valleys
Rz – Ten point height, or the average absolute
value of the five highest peaks and the five
lowest valleys, measured in microns.
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RSAR - Surface Roughness
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RSAR – Surface Area Ratio is equal to (surface Area/Area) -1
Rq (rms)
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Ra & Rz – Peaks & Valleys
• Ra measures average roughness.
• Rz measures 5 maximum peaks and 5
maximum valley heights.
• Both measure the Macro roughness of large
features
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RSAR – Surface Roughness Analysis
• RSAR data shows the increase in 3-D surface
area relative to the 2-D area - Micro-roughness
from Oxide Alternative.
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Measuring Roughness after Oxide Alternative
• Define the optimum parameters for measuring
the added roughness from Oxide Alternative
Process on different starting copper surfaces.
• Historical Ra and Rz results with RTF copper
after Oxide Alternative do not indicate the
added roughness after processing.
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Results – Before & After Oxide Alternative
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Measurements show the added micro-roughness from Alt. Oxide
No Filters Filter – High 0.6/ Low 500
RTF Cu Ra RSAR Rq Rz Ra RSAR Rq Rz
Start 1.45 1.56 1.78 11.28 1.48 1.59 1.78 11.07
After OA 1.35 2.15 1.69 11.62 1.37 1.97 1.69 10.82
VLP Cu Ra RSAR Rq Rz Ra RSAR Rq Rz
Start 0.29 0.30 0.38 3.77 0.29 0.30 0.37 3.1
After OA 0.49 1.35 0.62 8.26 0.48 1.15 0.6 6.74
RSAR shows the added roughness from Oxide Alternative on both RTF and VLP
Cu.
Results Summary
• Ra, Rz & Rq do not indicate the added
roughness from Oxide Alternative with RTF
copper.
• RSAR is suitable for measuring the micro
roughness from Oxide Alternative process on
both smooth and RTF copper.
• Ra, RSAR and Rq are suitable for measuring
roughness before and after Oxide Alternative
process on smooth copper foil.
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Typical Roughness Results
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Conclusions
Conclusions
• Using Ra and RSAR together will provide
improved measurement of copper surface
roughness.
• Ra and Rz measure the roughness of large
features - macro roughness.
• RSAR is the most suitable for measuring the
overall micro-roughness from Oxide Alternative
process on both smooth and RTF copper
surfaces.
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Conclusions
• Ra is an average roughness measurement of
large features - macro roughness.
• Rz is a maximum roughness measurement and
only reflects the 5 highest and 5 lowest points!
• Rz can have significant variation due to
scratches & dents.
• A perfectly uniform surface would have Rz =
10X Ra.
• Reducing or eliminating the high filter optimizes
roughness measurement.
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Limitations
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These surfaces have the same Ra and Rz but not the same RSAR
Limitations
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The surfaces have the same Rz, but not the same a Ra and RSAR