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SURFACE AND INTERFACE ANALYSISSurf. Interface Anal. 2004; 36: 7180Published online in Wiley InterScience (www.interscience.wiley.com). DOI: 10.1002/sia.1650
Noise filtering and deconvolution of XPS data
by wavelets and Fourier transform
Catherine Charles,1
Gervais Leclerc,2
Pierre Louette,2
Jean-Paul Rasson1
and Jean-Jacques Pireaux2
1 Department of Mathematics, Facult es Universitaires Notre-Dame de la Paix, B-5000 Namur, Belgium2 Department of Physics, LISE Laboratory, Facult es Universitaires Notre-Dame de la Paix, B-5000 Namur, Belgium
Received 10 September 2002; Revised 15 October 2003; Accepted 15 October 2003
In experimental sciences, the recorded data are often modelled as the noisy convolution product of an
instrumental response with the true signal to find. Different models have been used for interpreting
x-ray photoelectron spectroscopy (XPS) spectra. This article suggests a method of estimate the true XPS
signal that relies upon the use of wavelets, which, because they exhibit simultaneous time and frequency
localization, are well suited to signal analysis.
First, a wavelet shrinkage algorithm is used to filter the noise. This is achieved by decomposing the
noisy signal into an appropriate wavelet basis and then thresholding the wavelet coefficients that contain
noise. This algorithm has a particular threshold related to frequency and time.
Secondly, the broadening due to the instrumental response is eliminated through a deconvolution
process similar to that developed in the previous paper in this series for the analysis of HREELS data. This
step mainly rests on least-squares and on the existing relation between the Fourier transform, the wavelet
transform and the convolution product. Copyright 2004 John Wiley & Sons, Ltd.
KEYWORDS: XPS; wavelets; deconvolution; Poisson noise
INTRODUCTIONWith reference to the two other papers in this series (this
issue), wavelet analysis of XPS data must concentrate on
different areas than applications to High-resolution elec-
tron energy-loss spectroscopy (HREELS) data, for differ-
ent reasons.
First, a simple consideration of the fundamental differ-
ences in the excitation processes reveals that in HREELS the
elemental vibrational excitations have in general an intrinsic
linewidth close to zero, at least at the scale of probe elec-
trons that have an energy (110 eV for example) defined
to 1 meV 8 cm1: Fourier transform infrared spectrashowing vibrational bands with a resolution of 0.1 cm
1
arenot uncommon, justifying the fact that a deconvolution pro-
cedure of HREELS data should consider the true signal as a
Dirac delta function. In XPS, in contrast, intrinsic core-level
linewidths are in the range of 0.1 (metals) to 0.4 eV (carbon),
while stand-alone spectrometers have intrinsic resolution
(monochromatized x-ray source and analyser contributions)
in the same energy range: peaks are naturally broad and
should be approximated by finite Gaussian or Lorentzian
shape (or a combination thereof).
Correspondence to: Jean-Jacques Pireaux, Department of Physics,
LISE Laboratory, Facultes Universitaires Notre-Dame de la Paix,B-5000 Namur, Belgium. E-mail: [email protected]/grant sponsor: Belgian FNRS.Contract/grant sponsor: Belgian Prime Ministers Office;Contract/grant number: PAI/UIAP(4/10).
Secondly, the literature is rich in contributions onspectra acquisition and data handling in XPS. All the
basic principles are illustrated in Sherwoods reference
review,1 while some state-of-the-art concerns have been
listed and commented more recently; as a result of an
international workshop entitled X-Ray photoelectron Spec-
troscopy: from Physics to Data, a compilation of recent
developments in available handbooks and databases, in
data processing software and standard test data is pre-
sented and well documented.2 But, when processing XPS
core-level spectra one should stay aware of the genuine
algorithms hypotheses, and include easy-to-interpret sta-
tistical diagnostics to judge objectively the quality of the
regression.3
The purpose of this contribution is therefore to explore
what specific contribution(s) wavelet analysis could bring
to XPS data: noise filtering and deconvolution (recovery
of the true signal) will be tested on synthetic (theoret-
ical) spectra and then applied to real spectra. As in the
previous paper in this series (this issue) for the work
on HREELS data processing, care will be taken to try
to recover real peak intensities, a prerequisite to keep
quantification through data analysis. Note that this con-
tribution will not discuss issues related to the choice and
use of routines (linear, polynomial, Shirley, Tougaard, etc.)
to estimate background, or the algorithms to allow com-positional depth profile data to be deduced from angle-
resolved XPS measurements, which are beyond the scope of
this work.
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72 C. Charles et al.
WAVELET ANALYSIS MODEL AND METHOD
As a mathematical model of the XPS spectrum, it is chosen
to use
tri Poi C aC bi with i D s li, i D 1 . . . n 1
where X Po
indicates that X is a Poisson randomvariable of parameter , s D sjlggjD1 is a Gaussian (orLorentzian or combination thereof) instrumental function
(transmission function of the spectrometer), lgg 2 IN, l Dlj
nlgg1jD1 refers to the true signal to be estimated and is
modelled as a sum of different Lorentzians, a is a constant
instrumental noise and b D biniD1 is a variable physicaland statistical noise (linear, Shirley, etc.); i is the channel
number. Note that this model considers the true signal
as a sum of Lorentzians but the method presented in this
paper to estimate this signal is easy to generalize to a sum
of Gaussians.
The non-ideality of the spectra arises through several
sources: the convolution of the electronic scattering functionwith the instrumental response, the constant noise, the vari-
able background and the occurrence of Poisson-distributed
random noise.
In this paper a new method is proposed that filters the
Poisson noise and reduces the broadening caused by the
instrumental response. The suggested methods rely mostly
upon wavelet signal processing. The choice of wavelets was
justified in the first paper of this series (this issue) and
also applied to HREELS spectra in the second paper of
this series (this issue) the reader who wishes to gain a
basic understanding of wavelet theory and wavelet signal
processing is referred to these papers.In the proposed method, the noise is filtered using a
wavelet shrinkage technique. Most publications concerned
with the filtering of XPS spectra have focused so far on esti-
mation of a signal to which an additive zero-mean normal
noise is superposed. However, XPS is a technique in which
the detection is performed by an electron counting device.
Particle counting usually follows a Poisson probability dis-
tribution. Consequently, the signal in each channel can be
modelled by this distribution. The proposed approach is
based on an idea by Donoho and Johnstone:4 6 decomposing
the noisy signal in an appropriate wavelet basis and then
thresholding the noisy coefficients. The DonohoJohnstone
technique was developed for Gaussian noise. Recently,Kolaczyk7 has suggested a similar wavelet shrinkage tech-
nique but for a specific case of Poisson-distributed noise. Our
second paper in this series has introduced a wavelet shrink-
age method related to the unconstrained Poisson process
generalizing Kolaczyks algorithm. The same methodology
will be applied to XPS spectra. The constant and variable
noise are removed by subtraction.
Once the filtering step is completed, the broadening due
to Gaussian instrumental function is eliminated via a similar
deconvolution process to that for HREELS. This will be
explained later. This article concludes with an analysis of the
results on the basis of the quadratic error, graphics and thetheory of XPS.
As in the second paper concerning HREELS, most of the
examples presented here use synthetic data.
NOISE FILTERING
Consider the model for an XPS spectrum described by
Eqn. (1). The first step consists of removing the random
(statistical) noise. The problem is then
given the observations
x D xin1iD0 where each xi Poi, estimate in1iD0 2
This problem is solved by using the wavelet shrinkage
method explained in the previous paper (this issue).
To summarize briefly the calculation, the noise removal
algorithm (LTFTIPSH) proceeds in three steps:
(1) Decomposition of the observations in the Haar wavelet
basis.
(2) Thresholding at each scale and at each time of the
coefficients relative to the details.
(3) Application of the inverse Haar transform to the
threshold coefficients.
We prefer using the translation-invariant Haar wavelet
transform to avoid a step estimator.
Below is a presentation of some results (real experimental
data) obtained so far with this LTFTIPSH algorithm. Figure 1
is a survey spectrum of a clean copper foil, with quite
good signal-to-noise ratio. Figure 2 reports a widescan of an
organic layer with more noise and Fig. 3 illustrates a narrow-
scan spectrum with (probably; see later) six core-level peaks.
The advantages and efficiency of this algorithm are
explained in detail in the second paper of this series. It is
clear from the displayed data that the LTFTIPSH algorithm
does not introduce any spurious information and operatesequally well in spectral areas with low and high intensity
counts. Some comparisons with other filtering methods are
made in Ref. 8.
The second step consists of removing the constant and
variable noise, as in conventional XPS data-handling codes.
Given the mathematical model of Eqn. (1), a is estimated as
the minimum oftr and b as linear of Shirley background, for
example. Figure 4 presents such a result for the real C1s C K2pexperimental spectrum shown previously.
Figure 5 illustrates the result of two filterings. The first
filters the random noise using the LTFTIPSH algorithm and
the second subtracts the constant and variable noise.
LOCALIZED LEAST-SQUARES
The previous section has explained how our XPS spectra
are filtered. After filtering, the problem stated in Eqn. (1) is
reduced to the following deconvolution problem
given tri D s li 1 i n, estimate l D linlggC1iD1 3
The reader is reminded of the following hypotheses:
(1) tri corresponds to the experimental spectrum, i.e. the
number of detected electrons versus binding energy.(2) s D silggiD1 is a Gaussian (or Lorentzian or combinationthereof) function featuring the spectrometer transmis-
sion function (a Gaussian function is 1/p
2ex2/22 ,
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Deconvolution of XPS data by wavelets 73
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x 104
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BINDING ENERGY (eV)
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7
8x 104
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Figure 1. (a) Experimental XPS spectrum of copper foil after gentle ArC sputtering. (b) Noise filtering of (a) using theLTFTIPSH algorithm.
0200400600800100012000
0.5
1
1.5
2
2.5x 104 x 104
BINDING ENERGY (eV)
COUNTS
0200400600800100012000
0.5
1
1.5
2
2.5
BINDING ENERGY (eV)
COUNTS
(a) (b)
Figure 2. (a) Experimental XPS spectrum of a thin organic layer on silicon wafer. (b) Noise filtering of (a) using the
LTFTIPSH algorithm.
COU
NTS
BINDING ENERGY (eV)
310 305 300 295 275290 285 280
2500
2000
1500
1000
500
0
COU
NTS
BINDING ENERGY (eV)
310 305 300 295 275290 285 280
2500
2000
1500
1000
500
0
(a) (b)
Figure 3. (a) Experimental XPS spectrum of carbon and potassium contamination on a dental titanium implant. (b) Noise filtering of
(a) using the LTFTIPSH algorithm.
where and are, respectively, the mean and the stan-
dard deviation; a Lorentzian function is 1 2 C x 2 ,where and are, respectively, the mean and the stan-
dard deviation).
(3) l is a sum of Lorentzian functions, representing the
true spectrum.
This problem is similar to the HREELS problem, con-
sequently it is proposed to resolve it by using the same
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74 C. Charles et al.
COUN
TS
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BINDING ENERGY (eV)
310 305 300 295 290 285 280
2500
2000
1500
1000
500
0
Figure 4. The XPS spectrum of Fig. 3(a) and an estimation of
its constant and variable noise.
COUNTS
275
BINDING ENERGY (eV)
310 305 300 295 290 285 280
2500
2000
1500
1000
500
0
-500
Figure 5. The XPS spectrum of Fig. 3(a) after noise filtering
and background subtraction.
strategy: localization of peaks by wavelets and estimation of
their intensities by localized least-squares (LLS). This section
focuses on the LLS procedure.
Assume that the instrumental response s is known
and that the true spectrum is one Lorentzian function
or one ensemble of Lorentzian functions. Under this setof assumptions, it is not proposed to use the algorithm
suggested in the HREELS case
minl
i
[tri sli]2
because it does not impose the Lorentzian character of
the result. However, it would be interesting to take
into account this particular hypothesis to obtain a better
estimation. Moreover, this HREELS algorithm was based on
the resolution of a minimization problem that owns a small
number of variables (only some components ofl are differentto zero). However, there are a larger number of variables in
the XPS case, because a Lorentzian is never zero. Thus, the
previous algorithm risks being heavy on calculation time.
Consequently, it is proposed to minimize
min1,1,2,2,...
j
[trj s lj]2 where lt D
i
1
i
2i C t i24
In this case, theparameters i, i of the different Lorentzians
are the only variables and l is imposed to be one ensemble ofLorentzian functions. Therefore, if an initial point 0i ,
0i is
chosen for each Lorentzian sufficiently close to the solution,
this method is expected to converge towards the global
minimum that is the best solution to the problem.
It is therefore necessary to choose a good initialization.
The first idea has been to choose the inverse Fourier
Transform of TR/S, where TR (S) is the Fourier transform
of tr (s). If the deconvolution is realized by the Fourier
transform, its main disadvantage is a possible division by
zero. However, in the XPS case, the instrumental function s
consists of a Gaussian (or Lorentzian or combination thereof)
and it is known that its Fourier transform is never null.
For example
g1t D1p2
expt2/2 ! G1 D exp2/2
gt D1p2
expt2/22 ! G D exp22/25
However, even if this Fourier transform is theoretically never
zero, in practice, if or is sufficiently large the Fourier
transform of the Gaussian (Lorentzian) function becomes
very small for large (see Eqn. (5)).In this case, thecomputer
classifies it as zero. It is suggested bypassing this difficultyas follows. As in Eqn. (38) of the first paper in this series
dtrj,k D
l dsj,.
k; ctrj,k D
l csj,.
k 6
where dfj,k and c
fj,k are the wavelet coefficients related to
details and to a rough approximation, respectively, of the
functionf at scalej and time k. These formulae mean that the
convolution product is preserved by the wavelet transform.
Therefore, iftr and s are decomposed in a wavelet basis and
if the Fourier transform of dtrj,. is divided by the Fourier
transform of dsj,., the Fourier transform of an estimator of
l is obtained. Often, a quite good estimation is obtainedwith a good choice of wavelets. Between all the estimations
obtained with all the wavelets, the one that has the smallest
error is chosen and termed el. The error is defined as the
quadratic error between the trace and the convolution of the
estimated el and s. The parameters 0i and 0i relative to el are
estimated by
min1,1,2,2,...
j
i
1
i
2i C xj i2 elj
27
The initial point of the LLS method for XPS is 0i , 0i iD1,... .
Figure 6 illustrates the entire method. Figure 6(a) repre-sents a synthetic XPS spectrum generated by convoluting
l, the true signal (sum of two Lorentzians of parameters
1 D 3.54, 1 D 100, 2 D 4.55, 2 D 120), with s, the Gaussian
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Deconvolution of XPS data by wavelets 75
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0.005
0.01
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0.02
0.025
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0.035
0.04
(a) (b)
(d)(c)
Figure 6. (a) Synthetic XPS spectrum (total envelope) and the true signal l (two discrete peaks) to estimate. (b) Estimation el
(deconvolution by Fourier and wavelets) and the true signall. (c) The Lorentzians obtained with
0
i and 0
i (solution of theoptimization problem (Eqn. (7)) and the true signal l. (d) Final result (solution of the optimization problem (Eqn. (4)) and the
calculated true signal l.
instrumental function D 10. The convolution productis termed tr. First tr and s are decomposed in a wavelet
basis. Secondly, for each scale, the Fourier transform of the
wavelet coefficients of tr are divided by the Fourier trans-
form of the wavelet coefficients ofs; then the inverse Fourier
transform of this division is calculated. The results are some
estimations of l. Estimation el is that particular one giving
the smallest error between the trace and the convolution of
this estimation with s. In Fig. 6(b) it can be seen that thisestimation el recovers the two peak positions but also many
ghost peaks. Thirdly, in order to impose the Lorentzian char-
acter of the estimation of the true signal l, the parameters
01 , 01,
02 ,
02 of the significant peaks of el are estimated
by resolving the optimization problem (Eqn. (7)) Figure 6(c)
illustrates the sum of the two Lorentzians obtained with 01 ,
01, 02 ,
02 and l. Finally, the optimization problem (Eqn. (4))
is resolved with 01 , 01 ,
02 ,
02 as the initial point. The solution
of this final problem or deconvolution result for this local-
ized peak structure and the true signal l are represented in
Fig. 6(d).
The final result in Fig. 6(d) is satisfactory. The differencebetween l, thetrue signalto be calculated, andthe estimation
is small. This result is better evaluated by comparing
the positions and intensities of the peaks in Table 1. The
Table 1. Parameters and estimated parameters of the
Lorentzians of Fig. 6(d)
Estimation of Estimation of
100 3.54 100 3.57
120 4.55 120 4.03
positions are exactly recovered, the intensity of the first peakis well estimated and the intensity of the second peak is
underestimated by some 10%.
In order to analyse the efficiency of the method when
two Lorentzians form only one peak in tr, the results when
the distance between the two Lorentzians decreases while
the intensity is kept equal and constant (Table 2) have to be
analysed. As in HREELS, eval is defined as the FWHM of
the instrumental function divided by the distance between
the positions of the two Lorentzians. In the same way, inra
is defined as the ratio of the smallest Lorentzian parameter
to the largest Lorentzian parameter. The positions of the two
Lorentzians are exactly recovered and the intensities are wellestimated even when the peaks are very close to each other.
Note that the two Lorentzians visually form only one peak
in tr in all these cases.
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76 C. Charles et al.
Table 2. Parameters and estimated parameters of two
Lorentzians with the same intensity but with a different
interdistance
eval
Estimation
of
Estimation
of
2.35 100 3 100 3.13110 3 110 2.83
1.567 100 3 100 3
115 3 115 2.93
1.175 100 3 100 2.98
120 3 120 2.98
Table 3. Parameters and estimated parameters of
Lorentzians with the same position
inra
Estimation
of
Estimation
of
1/2 100 1 100 0.94
120 2 120 1.28
2/3 100 2 100 1.97
120 3 120 2.53
3/5 100 3 100 2.95
120 5 120 3.97
Table 3 analyses the results when the distance between
the two Lorentzians is constant and the intensity of the two
Lorentzians differs. The positions of the two Lorentzians are
exactly recovered, the smallest intensity is well estimated
but the largest intensity is not so well estimated. Note thatthe two Lorentzians visually form only one peak in tr for all
these cases.
DECONVOLUTION WITH WAVELETS
The procedure for solving the deconvolution problem of
Eqn. (1)consistsof applying theLLS approach to thedifferent
features of the filtered spectrum. Detection of the position of
the peaks and estimation of the instrumental function g are
well explained and discussed in the two other papers of this
series. Below is a presentation of some results of this new
method applied to synthetic filtered spectra.
In Fig. 7 is presented an illustration of the methodonce the position of the peaks in tr is detected and the
instrumental function is estimated. In Fig. 7(a), a synthetic
XPS spectrum has been generated by convoluting the true
signal l (sum of five Lorentzians of different intensities) with
Gaussian instrumental function s. The convolution product
is termed tr. First tr and s are decomposed in a wavelet basis.
Secondly, for each scale, the Fourier transform of the wavelet
coefficients of tr is divided by the Fourier transform of the
wavelet coefficients ofs and the inverse Fourier transform of
this division is taken. These results are some estimations ofl.
Estimation el is the one that gives the smallest error between
the trace tr and the convolution of this estimation with s.Figure 7(b) presents the estimated el and the true signal l.
Thirdly, in order to impose the Lorentzian character of the
estimated el, the parameters 0i , 0i i of the significant peaks
of el are calculated by resolving the optimization problem
(Eqn. (7)) for each peak of tr. Figure 7(c) illustrates the sum
of the Lorentzians obtained with 0i , 0i and l. Finally, for
each peakthe optimization problem (Eqn. (4)) is resolved with
0i , 0i as initial point. The solution of this final problem and
the true signal l are represented in Fig. 7(d). This result is
excellent as allthe intensities andpositions of theLorentziansare recovered.
Figure 8 presents another synthetic spectrum obtained
with five Lorentzians of different intensities convoluted with
a Gaussian; the same strategy as for Fig. 7 has been applied
to this spectrum. The true signal (the sum of the five
Lorentzians) and their estimation are shown in Fig. 8(b).
For better evaluation of the result, parameters and of
the true Lorentzians and their estimation via the wavelet
algorithm are presented in Table 4.
With the graphics in Fig. 8 and the values in Table 4 it
can be seen that the positions of the Lorentzians are well
recovered and estimation of the true signal is satisfactory.
Only Lorentzian 4 (that, with another Lorentzian, leads to
one single peak in tr) has its intensity not so well estimated
(eval D 1.175 and inra D 1/2).
OTHER RESULTS
Some results corresponding to experimental XPS spectra are
reported in Figs 9 13. The noise filtering algorithm and the
deconvolution method presented earlier have been applied.
In Fig. 9, the same experimental spectrum as that shown
and filtered in Figs 35 is presented; the estimated original
XPS function (represented multiplied by a factor of 0.153)
has been added. In order to evaluate the result obtained withthe new method, the result has been compared with data
from a standard curve-fitting procedure. The curve-fitting
method estimates the Lorentzians once the number of peaks,
their positions, their widths and the type of noise are chosen.
This comparison is reported in Table 5. The positions of the
peaks are very similar and the intensity of the peaks differs
slightly. Note that one additional peak is discovered with the
wavelet-based code.
The spectral analysis is completed in 12 min on a
Pentium III biprocessor (900 MHz). In fact, thenoise filtering,
the estimation of s and the estimation by Fourier and
wavelets take
1 min. Only theresolution of theoptimization
problems is time consuming.Below are two other results of the new procedure applied
to very noisy experimental XPS spectra: a single Ca 2p
doublet (Figs 10 and 11) and a structured C 1s spectrum
(Figs 12 and 13).
Table 4. Parameters and estimated parameters of
the Lorentzians of Fig. 8
Estimation of Estimation of
1 3 1 2.95
50 2 50 1.74
100 1 100 0.83120 2 119 1.14 x
220 3 220 2.97
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(a)
(c) (d)
(b)
Figure 7. (a) Synthetic XPS spectrum and the true signal l to estimate. (b) Estimation el (deconvolution by Fourier and wavelets)
and the true signal l. (c) The Lorentzians obtained with 0i
and 0i
(solution of the optimization problem (Eqn. (7))) and the true
signal l. (d) Final result (solution of the optimization problem (Eqn. (4)) for each peak) and the true signal l.
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0
0.01
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1 2 3 4 5
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0
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0.06(a) (b)
Figure 8. (a) Synthetic XPS spectrum trand the true signal l to estimate. (b) The true signal land its estimation.
Note that in Fig. 10 the estimated original XPS function
is represented multiplied by a factor of 0.338. In order
to appreciate the result, the estimated Lorentzians are
reconvoluted with the calculated instrumental function, the
constant andShirley noise added;the final resultis compared
with the experimental spectrum without any further curve-
fitting. It can be seen in Fig. 11 that the reconvolution isindeed very satisfactory.
A similar type of very good result is obtained in Figs 12
and 13. Note that in Fig. 12 the estimated original XPS
function is represented multiplied by a factor of 0.272. In
order to appreciate the result, the estimated Lorentzians
are reconvoluted with the estimated instrumental function,
the constant and Shirley noise added; the final result is
compared with the experimental spectrum without any further
curve-fitting (Fig. 13).
The National Institute of Standards and Technology(NIST) provide well-characterized spectral data for assessing
quality in computer-based data analysis procedures.911 The
NIST data analysed here are simulations of XPS spectra.
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78 C. Charles et al.
COUN
TS
275
BINDING ENERGY (eV)
280285290295300305310
2500
2000
1500
1000
500
0
Figure 9. The XPS spectrum and its estimated original
XPS function.
Table 5. Parameters of the Lorentzians of Fig. 9
estimated via the wavelet method (W) and
curve-fitting (CF)
W IntensityW CF IntensityCF
286.25 2107.84 286.25 2107.84
287.37 667.20 287.49 492.22
289.29 352.45 289.28 305.68
291.05 51.74
293.93 1542.34 293.91 1531.50
296.57 783.83 296.41 781.25
COUNTS
335
BINDING ENERGY (eV)
340345350355
1300
1200
1100
1000
900
800
700
600
500
400
300
Figure 10. The XPS Ca 2p spectrum and its estimated original
XPS function.
Because the XPS spectra are simulations, peak parameters
are known from the models and are not estimates. The
test data are designed to help the analyst to assess data
analysis procedures from the errors in the analysts peak
parameter determinations. Performance is measured bydeviations of the analysts parameter estimates from the true
values for these parameters. The noise filtering algorithm
and the deconvolution method are applied to 22 spectra
COUN
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Figure 11. The XPS Ca 2p spectrum and its estimation with
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Figure 12. The XPS C 1s spectrum and its estimated original
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Figure 13. The XPS C 1s spectrum and its estimation with
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(18 doublets and 4 singlets). Following a factorial design,
the doublet spectra present varying degrees of overlap
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Deconvolution of XPS data by wavelets 79
between peaks (valley, shoulder, no shoulder), varying
levels of relative intensity between peaks (Ii II iI) and
varying levels of Poisson noise (low noise, high noise).
The results are encouraging. Figure 14 presents the result
of deconvolution and the reconvolution without any other
curve-fitting for these 22 spectra. As the reader can see,
the program recovers the 18 doublets and the 4 singlets. Theintensities are well estimatedexceptfor thespectra generated
by two peaks of the same intensity (II). In these cases, the
algorithm tends to the solution of one large peak and a very
small peak.
CONCLUSION
This article has tried to show how wavelets can be used
to estimate the original XPS function or the true signal.
The first part of the method consists of filtering the noisy
spectrum to eliminate the Poisson noise. It has be seen
in the second paper of this series that the LTFTIPSH
algorithm is a wavelet shrinkage technique specific to this
kind of signal. Subtraction of the constant and variable
noise is done traditionally. The second step consists of
deconvoluting the filtered spectrum. It is proposed touse a method similar to the HREELS method presented
in the second paper of this series. The positions of the
Lorentzians are estimated via the wavelets. In order to
deconvolute each peak, the localized least-squares method
is used with parameters and of the Lorentzians as
variables. Initialization of this optimization problem is done
by means of combined wavelets and Fourier transform.
The results for XPS spectra are satisfactory. The positions
and the intensity of the peaks are well recovered. This
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Figure 14. Twenty-two XPS spectra: their estimated original XPS function and their reconvolution.
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Figure 14. (Continued).
method possesses the advantage of having a fast algorithm
(implemented in MatLab from WaveLab Toolbox available
at http://playfair.stanford.edu/wavelab).In this series of three papers the potential, if not the
real efficiency, of the wavelet shrinkage technique in the
field of noise filtering of surface science experimental data
has been demonstrated. It has also been illustrated that the
wavelets are well adapted to the detection of singularities.
However, because the convolution product is preserved
by the wavelet transform, the use of wavelets is not yet
the general solution to the deconvolution problem but
the wavelet transform can be combined with the Fourier
transform for some improvements, as was seen with the
XPS data.
AcknowledgementsC.C. is indebted to the Belgian FNRS for a Research Fellow grant.Part of the research at LISE is financed through the PAI/UIAP(4/10)
programme of the Belgian Prime Ministers Office (Federal Servicesfor Scientific, Technical and Cultural Affairs).
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Copyright 2004 John Wiley & Sons, Ltd. Surf. Interface Anal. 2004; 36: 7180