WT-2000, RT-2200/2500/RT-3000sheeT ResisTance measuRemenT4 Point Probe (Multiple heads) & Non-contact probes (JPV & EDDY) combined in one tool for better operability and long-term stability.

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This material is for information purposes only. Equipment acceptance is based on contracted specifications.

Facts о 4PP is an established, time proven technique with several limitations:

о Limited range for each 4PP leading to regular probe change о Accuracy is time dependent: due to wear of the probes о Long term stability is jeopardized by the lifetime of the probes

Sheet resistance measurement

4PP

JPV

EDDY

Semilab’s new generation of sheet resistance measurement tools combine 4PP with non-contact measurement techniques in a range of platforms from the cost effective, low automation platform (WT) to full SEMI standard compliant platforms (RT). In addition to the more conventional 4PP, non-contact measurement can be applied to BEOL (metal layers thickness) using eDDY or to FEOL (implant monitoring) using JPV.

Benefits о 1- 4 Permanent 4PP heads

о Different ranges & Applications о Lower CoO

о Combining non-contact probes: о Reduced PM and calibration о Better long-term stability о Fast / high resolution mapping

Sample1 (Implant) Sample2 (Metal)