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Provisional Program MNE 2015Disclaimer: The program is still provisional until all presenters have registered.

The organizers reserve the right to add changes, the final program will be made available shortly before the conference on the website and at the conference registration.

Tuesday Morning 22 September 2015Cluster A - Micro and Nano Patterning

Tuesday Morning 22 September 2015Cluster B - Micro and Nano Fabrication

time

Plenary SessionLecture Hall: World Forum Theatre

Session Chairs: U. Staufer and C.W. Hagentime


Session Chairs: U. Staufer and C.W. Hagen0830 Welcome and Opening of the Conference 0830 Welcome and Opening of the Conference0900 Keynote 1 Nano-Lithography

P. Kruit0900 Keynote 1 Nano-Lithography

P. Kruit0945 Keynote 2 Nano Fountain Probe Technology for In Vitro Single Cell Studies 0945 Keynote 2 Nano Fountain Probe Technology for In Vitro Single Cell Studies

H. Espinosa H. Espinosa

1030 Break and Opening of the Exhibition 1030 Break and Opening of the Exhibition

A3 - Electron and Ion Beam LithographyLecture Hall: AmazonSession Chairs: t.b.a

B4 - 3D Micro Manufacturing and Micro PrintingLecture Hall: YangtzeSession Chairs: t.b.a.

1100 Tue A3-c1 Optimization of electron beam lithographic exposure of PMMA implantation masks with high aspect ratio covering a topographic stepJ.Bolten, A.Prinzen, H.Füser, C.Porschatis, T.Wahlbrink, A.Giesecke, H.Kurz

1100 Tue-B4-c1 Inversed pyramid-shaped cave arrays with nano-opening cap fabricated by laser interferometric lithography and wet etchingJ.Li, C.Gu

1115 Tue A3-c2 Toward Less Than 50 nm-Line and Space Negative Tone Pattern Fabrication by Electron Beam Lithography using NEB-22M.Okada, S.Matsui

1115 Tue-B4-c2 Novel Open Channel Microneedle Array Fabrication by 3D Laser Lithography and Micromoulding TechniquesZ.Faraji Rad, R.Nordon, G.D, L.Bilston, C.Anthony, P.Prewett

1130 Tue A3-c3 Characterization for the photomask fabrication based on a novel technique of high-resolution with a non-chemically amplified resist and a post-exposure bakeH.Miyoshi

1130 Tue-B4-c3 High throughput fabrication of hierarchical photonic nanostructuresN.Schneider, A.Striegel, A.Kolew, M.Schneider, J.Leuthold, M.Worgull

1145 Tue A3-c4 Focused ion beam current density profile derivation from single crystal amorphization region widths – analysis methodY.Greenzweig, Y.Drezner, S.Tan, R.Livengood, A.Raveh

1145 Tue-B4-c4 Fabricating high density metal structures using a six-fold line multiplying schemeJ.Bosgra, E.Kirk, V.Guzenko, C.David

1200 Tue A3-c5 Proximity Effect Quantification and Dose Optimisation for High Resolution Helium Ion Beam LithographyX.Shi, P.Prewett, E.Huq, D.Bagnall, S.Boden

1200 Tue-B4-c5 Monolithic micro-optical components: advancing from novel master fabrication methodology towards high-volume manufacturing schemesL.Jacot-Descombes, V.Cadarso, A.Schleunitz , S.Grützner , J.Brugger, H.Schift, G.Grützner

1215 Tue A3-c6 Fabrication of metallic nanostructures by character projection based electron beam lithography and hard mask lift-off techniqueT.Harzendorf, T.Flügel-Paul, U.Zeitner

1215 Tue-B4-c6 An effective approach for reducing surface roughness of PMMA in grayscale EBL by thermal radiation induced local reflowC.Xu, S.Zhang, J.Shao, Y.Chen

1230until1330

Lunch BreakLunch served in the Exhibition Area

1230until1330


Tuesday Morning 22 September 2015Cluster C - Micro and Nano Systems and Devices

Tuesday Morning 22 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time


Session Chairs: U. Staufer and C.W. Hagentime


Session Chairs: U. Staufer and C.W. Hagen

0830 Welcome and Opening of the Conference 0830 Welcome and Opening of the Conference0900 Keynote 1 Nano-Lithography

P. Kruit0900 Keynote 1 Nano-Lithography

P. Kruit

0945 Keynote 2 Nano Fountain Probe Technology for In Vitro Single Cell Studies 0945 Keynote 2 Nano Fountain Probe Technology for In Vitro Single Cell StudiesH. Espinosa H. Espinosa

1030 Break and Opening of the Exhibition 1030 Break and Opening of the Exhibition

C1.1 - MEMS/NEMS Sensing 1Lecture Hall: World Forum Theatre

Session Chairs: t.b.a.

D5 - System Design and FabricationLecture Hall: Mississippi


1100 Tue-C1-c1 Fabrication, characterisation and behaviour of very low-power gas sensing devices based on single nanowiresJ.Samà, J.Prades, O.Casals, S.Barth, J.Santander, C.Cané, I.Gracia, F.Hernandez-Ramirez, A.Romano-Rodriguez

1100 Tue-D5-invited

Point of Care TechnologyM. Irmscher

1115 Tue-C1-c2 Integration of ZnO nanostructures onto a micro hot plate for gas sensingA.Tommasi, S.Marasso, D.Perrone, D.Mombello, S.Benetto, M.Cocuzza, C.Pirri, R.Mosca, A.Zappettini, D.Calestani

1130 Tue-C1-c3 Integrated smart gas flow sensor with 2.6 mW total power consumption and 80 dB dynamic rangeM.Piotto, F.Del Cesta, P.Bruschi

1130 Tue-D5-c1 Fabrication of a smart contact lens platform for the diagnosis of dry eye diseaseS.Tinku, R.Dahiya, L.Lorenzelli

1145 Tue-C1-c4 Flexible Magnetoresistive Devices with High-Performance SensorsH.Fonseca, E.Paz, R.Ferreira, P.Freitas, J.Gaspar

1145 Tue-D5-c2 Top-down Zinc Oxide Nanowires by Ion Beam Etching for Biosensing ApplicationsK.Sun, I.Zeimpekis, N.Ditshego, C.Hu, O.Thomas, M.de Planque, H.Chong, H.Morgan, P.Ashburn

1200 Tue-C1-c5 High Frequency self-sensing piezoresistive SPM cantilevers with a novel designW.Engl, T.Sulzbach, C.Penzkofer

1200 Tue-D5-c3 On-chip glass microfluidic trap and storage of helical magnetic microrobotA.Barbot, D.Decanini, G.Hwang

1215 Tue-C1-c6 MEMS mechanism for resonance frequency tuningN.Takeda, M.Hara, H.Kuwano

1215 Tue-D5-c4 Fast and Large Area Fabrication of Hierarchical Super Hydrophobic Silicon SurfacesS.Ghio, G.Paternoster, P.Belluti, M.Boscardin , N.Pugno

1230until1330


1230until1330


Tuesday Afternoon 22 September 2015Cluster A - Micro and Nano Patterning

Tuesday Afternoon 22 September 2015Cluster B - Micro and Nano Fabrication

time

A5 - Materials for lithography, resists and resist processingLecture Hall: AmazonSession Chairs: t.b.a.

time

B3 -Electron/Ion Beam deposition,related technologies, applications

Lecture Hall: YangtzeSession Chairs: t.b.a.

1330 Tue-A5-invited

Resist material options for extreme ultraviolet lithographyT. Kozawa

1330 Tue-B3-c1 Mimicking the iridescent color of free-standing Morpho butterfly wing scales fabricated by e-beam lithographyS.Zhang, Y.Chen

1345 Tue-B3-c2 Nanomagnets as building blocks of logic gates -3D nano manufacturing of nanomagnet assemblies by electron beam induced depositionH.Wanzenboeck, M.Shawrav, M.Gavagnin, S.Wachter, P.Taus, E.Bertagnolli, M.Stoeger-Pollach, P.Svedlindh, K.Gunnarsson, .Anders

1400 Tue-A5-c1 Characterization of the anisotropy of semi-crystalline polymers after nanoimprint by spectroscopic ellipsometryS.Wang, J.Rond, C.Steinberg, M.Papenheim, H.Scheer

1400 Tue-B3-c3 Photoluminescence Emission from a nanofabricated Scanning Probe Tip Made of Epitaxial GermaniumM.Bollani, V.Giliberti, E.Sakat, L.Baldassarre, M.Celebrano, J.Frigerio, G.Isella, M.Finazzi, M.Melli, A.Weber Bargioni

1415 Tue-A5-c2 Highly extended PDMS stamp life-time enabled by the new organic photo-curable soft NIL resist “mr-NIL210”M.Messerschmidt, A.Greer, F.Schlachter, J.Barnett, M.Thesen, N.Gadegaard, G.Grützner

1415 Tue-B3-c4 Parallel imaging in a 196-Beam SEMY.Ren, C.Hagen, P.Kruit

1430 Tue-A5-c3 Pattern collapse mitigation in inorganic resists via a polymer freeze techniqueT.Kulmala, R.Fallica, E.Buitrago, Y.Ekinci

1430 Tue-B3-invited

Focused electron beam induced deposition of metallic binary alloy nanostructures employing a heteronuclear precursorM.Huth, F.Porrati, R.Sachser, L., M.Zoerb, H.Plank, C.Gspan, M.Pohlit, J.Müller, S.Barth

1445 Tue-A5-c4 Multiphoton Laser Ablation Lithography (MP-LAL) using 375 nm Continuous Wave Laser Enabling Patterning down to the 30 nm Regime and beyondT.Manouras, E.Angelakos, M.Vamvakaki, P.Argitis

1500 Break and Exhibition 1500 Break and Exhibition

1530 until1800

Tue-A#-p# Poster Session and Exhibitioneven number posters

1530 until1800

Tue-B#-p# Poster Session and Exhibition even number posters

1700 until 1830

Special Sessions

CELINA Lecture Hall: see special program for details

SNM Lecture Hall: see special program for details

1700 until 1830

Special Sessions



Tuesday Afternoon 22 September 2015Cluster C - Micro and Nano Systems and Devices

Tuesday Afternoon 22 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time

C1.2 - MEMS/NEMS Fabrication and ReliabilityLecture Hall: World Forum Theatre

Session Chairs: t.b.a.time

D6 - ApplicationsLecture Hall: Mississippi


1330 Tue-C1-c7 Fabrication of a freestanding nanofluidic gas channel between two metal membranesG.Rademaker, C.Heerkens, L.van Kouwen, K.Hagen, P.Kruit

1330 Tue-D6-invited

Nanowire Based Cell MeasurementsC.Prinz

1345 Tue-C1-c8 Hydrothermal growth of c-axis nanorod-based ZnO films for SAW sensing applicationsG.Rius, C.Perfetti, X.Borrise, L.Sole, K.Abe

1400 Tue-C1-c9 Effect of fluorine surface modification on resonance of a carbon nanoresonator fabricated by FIB/EB dual-beam lithographyR.Kometani, T.Miyakoshi, E.Maeda

1400 Tue-D6-c1 Cell Direction Switching and Metastasis Screening by Designed TopographyS.Zhou, S.Gopalakrishnan, Y.Xu, Y.Lam, S.Pang

1415 Tue-C1-c10 Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI processG.Wood, C.Zhao, S.Pu, S.Boden, I.Sari, M.Kraft

1415 Tue-D6-c2 Substrate-Independent Immobilization of Monolayer Metal Nanoparticles Array via Self-Assembly for Efficient Antibiofilm CoatingsD.Wan, S.Yi

1430 Tue-C1-c11 Novel Saw Tooth Gate for Stiction and Pull-in Voltage Controlled Ohmic Silicon NEMS SwitchL. Boodhoo, F. Alkhalil, H. M. H. Chong, Y. Tsuchiya, W. Redman-White, T. Hasegawa, H. Mizuta

1430 Tue-D6-c3 Magnetization of magnetic nanodot arrays measured using scanning near-field polarization microscopeT.Jin

1445 Tue-C1-c12 Exposing the tribological run-in of polysilicon MEMS sidewalls in sliding contact using in-situ force measurements with AFM-like resolutionJ.Kokorian, M.van Spengen

1445 Tue-D6-c4 Agarose multi-wells for tumor spheroid formation and anti-cancer drug testY.Tang, J.Liu, Y.Chen


1530 until 1800

Tue-C#-p# Poster Session and Exhibitioneven number posters

1530 until1800

Tue-D#-p# Poster Session and Exhibitioneven number posters

1700 until 1830

Special Sessions



1700 until 1830

Special Sessions



Wednesday Morning 23 September 2015Cluster A - Micro and Nano Patterning

Wednesday Morning 23 September 2015Cluster B - Micro and Nano Fabrication

time


Session Chairs: t.b.a. time


Session Chairs: t.b.a.0830 Keynote 3 Development of block copolymers to create complex material

nanopatternsM. Morris, C Cummins, T Ghoshal

0830 Keynote 3 Development of block copolymers to create complex material nanopatternsM. Morris, C Cummins, T Ghoshal

A6 - Directed Self AssemblyLecture Hall: AmazonSession Chairs: t.b.a.

B7 - MetrologyLecture Hall: YangtzeSession Chairs: t.b.a.

0930 Wed-A6-c1 Capture probability of assembly defects in 14 nm half-pitch line/space DSA patternsH.Pathangi

0930 Wed-B7-c1 Imaging and model simulation of trenches on a silicon surface in helium ion microscopyP.Alkemade, T.Yamanaka , E.van Veldhoven, D.Maas, K.Ohya

0945 Wed-A6-c2 Ordering of either nano-dot arrays or nano-lines along EB-drawn resist guide lines using PS-PDMS self-assembly with a molecular weight of 1.46 kg/molS.Hosaka, K.Ohyama, H.Zhang, Y.Yin, H.Sone

0945 Wed-B7-c2 Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterizationT.Hantschel, Z.Xu, K.Paredis, A.Schulze, W.Vandervorst

1000 Wed-A6-c3 Determination of the interfacial energies in chemical guiding patterns for directed self-assembly of block co-polymersL.Evangelio, M.Lorenzoni, J.Fraxedas, F.Perez-Murano

1000 Wed-B7-c3 Electric Fields in Scanning Electron Microscopy SimulationsK.Arat, J.Bolten, T.Klimpel

1015 Wed-A6-c4 Characterization of Half-pitch 15 nm Metal Wire Circuit Fabricated by Directed Self-assembly of PS-b-PMMAY.Kasahara, Y.Seino, H.Sato, K.Kobayashi, H.Kanai, H.Kubota, K.Miyagi, S.Minegishi, K.Kodera, T.Azuma

1015 Wed-B7-c4 Using Piezoresponse Force Microscopy for semiconductor ZnO nanowiresG.Murillo, H.Lozano, N.Domingo, G.Catalan, J.Esteve


Wednesday Morning 23 September 2015 - continuedCluster A - Micro and Nano Patterning

Wednesday Morning 23 September 2015 - continuedCluster B - Micro and Nano Fabrication

A7 - Stencil and Tip Based PatterningLecture Hall: AmazonSession Chairs: t.b.a.

B8 - Self Aligned ProcessesLecture Hall: YangtzeSession Chairs: t.b.a.

1100 Wed-A7-c1 Etching through nanostencils for high resolution and large-scale patterning of optical nanoantenna arraysV.Flauraud, T.van Zanten, M.Mivelle, C.Manzo, M.Garcia parajo, J.Brugger

1100 Wed-B8-invited

Strategies for selective atomic layer deposition on patterned substratesA.J.M.Mackus, F.S.M.Hashemi, S.F. Bent

1115 Wed-A7-c2 Direct fabrication of thin film layer MoS2 field-effect nanoscale transistors by oxidation scanning probe lithographyF.Espinosa Barea, Y.Ryu Cho, K.Marinov, D.Dumcenco, A.Kis, R.Garcia

1130 Wed-A7-c3 Lift-off processes for avoiding substrate damage from charged particles during lithographyM.Spieser, C.Rawlings, H.Wolf, P.Mensch, S.Karg, S.Bonanni, U.Dürig, A.Knoll

1130 Wed-B8-c1 Area selective growth of chalcogenide materials onto patterned substrates by chemical vapor depositionR.Huang, S.Benjamin, C.Gurnani, A.Hector, W.Levason, G.Reid, C.Groot

1145 Wed-A7-c4 Field Emission Scanning Probe Lithography and Etching at Cryogenic Temperatures – A Closed Loop Technology towards beyond CMOS Device ManufacturingM.Kaestner, Y.Krivoshapkina, C.Aydogan, B.Volland, M.Budden, T.Ivanov, A.Ahmad, T.Angelow, S.Lenk, I.Rangelow

1145 Wed-B8-c2 Nanocrystal Self-Assembly of CdSe/CdS Hollow Domes in quasi contact-free conditionsA.Accardo, F.Di Stasio, M.Burghammer, C.Riekel, R.Krahne

1200 Wed-A7-invited

Advanced Scanning Probe LithographyA.Knoll

1200 Wed-B8-c3 Fabrication of High-resolution, Self-aligned Palladium Electrodes for NanoresonatorsL.Jenni, J.Weichart, M.Muoth, K.Chikkadi, M.Haluska, C.Hierold

1215 Wed-B8-c4 Crystallinity variations over the length of vertically aligned carbon nanotubes grown by chemical vapour depositionS.Vollebregt, P.Padmanabhan, C.Silvestri, L.Sarro

1230until1330


1230until1330


Wednesday Morning 23 September 2015Cluster C - Micro and Nano Systems and Devices

Wednesday Morning 23 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time


Session Chairs: t.b.a. time


Session Chairs: t.b.a.0830 Keynote 3 Development of block copolymers to create complex material

nanopatternsM. Morris, C Cummins, T Ghoshal

0830 Keynote 3 Development of block copolymers to create complex material nanopatternsM. Morris, C Cummins, T Ghoshal

time

C5.1 - Micro and Nano devices for Physical Science - Computing

Lecture Hall: World Forum TheatreSession Chairs: t.b.a.

time

D3 - Organ on a ChipLecture Hall: Mississippi


0930 Wed-C5-invited

Quantum ComputingL.DiCarlo

0930 Wed-D3-invited

Organs-on-chip by selective assembly of primary cells enabled by dielectrophoresis in microfluidic devicesM.Stelzle

1000 Wed-C5-c1 Quantum Cellular Automata: Design and Fabrication with the Nanodamascene ProcessG.Droulers, S.Ecoffey, M.Pioro-Ladrière, D.Drouin

1000 Wed-D3-c1 Skin-on-chip : integration of skin tissue and microsystems engineeringL.Bergers, T.Waaijman, T.De Gruijl, A.Van De Stolpe, R.Dekker, S.Gibbs

1015 Wed-C5-c2 Scaling and Integration of Memristive Nanodevices Using Nanoimprint LithographyQ.Xia

1015 Wed-D3-c2 Microelectrode array with integrated sieving structure for automated cell positioningB.Schurink, E.Berenschot, R.Tiggelaar, R.Luttge


Wednesday Morning 23 September 2015 - continuedCluster C - Micro and Nano Systems and Devices

Wednesday Morning 23 September 2015 - continuedCluster D Micro and Nano Technology for Bio/Life Sciences

time

C5.2 - Micro and Nano devices for Physical Science - Nano Tubes and Nano Wires


time

D2 - Lab on ChipLecture Hall: Mississippi


1100 Wed-C5-c3 TEM study of Schottky junctions for reconfigurable silicon nanowire devicesS.Banerjee, M.Löffler, A.Heinzig, J.Trommer, U.Mühle, W.van Dorp, W.Weber, E.Zschech

1100 Wed-D2-c1 Microreactor with integrated micro-mixer and heated nebulizer for mass spectrometric chemical reaction analysisG.Scotti, M.Haapala, S.Nilsson, I.Aumüller, G.Boije af Gennäs, A.Kiriazis, J.Yli-Kauhaluoma, A.Al-Azawi, R.Ras, S.Franssila

1115 Wed-C5-c4 Fabrication of a suspended silicon nanowire single hole transistor by focused ion beam implantationJ.Llobet, E.Krali, C.Wang, X.Borrisé, M.Jones, F.Perez-Murano, Z.Durrani

1115 Wed-D2-c2 Resealable flowcells with integrated oxygen sensing layers for enzymatic reaction studiesM.Viefhues, d.Valikhani, S.Sun, T.Mayr, E.Vrouwe, M.Blom, B.Nidetzky, J.Bolivar

1130 Wed-C5-c5 GaAs/InSb core-shell nanowires and InSb nanotubesT.Rieger, F.Hackemüller, P.Zellekens, J.Janßen, N.Demarina, D.Grützmacher, T.Schäpers, M.Lepsa

1130 Wed-D2-c3 Monolithically integrated photonic platform for Point-of-Need application in food safetyM.Angelopoulou, V.Pagkali, Z.Tsialla, A.Botsialas, A.Salapatas, P.Petrou, E.Makarona, G.Jobst, D.Goustouridis, I.Raptis

1145 Wed-C5-c6 Fabrication and characterization of tunnel barriers in a multi-walled carbon nanotube formed by focused ion beam techniqueH.Tomizawa, T.Yamaguchi, S.Akita, K.Ishibashi

1145 Wed-D2-c4 A Capillary-Driven Microsystem for DNA Amplification Direct from Whole BloodB.Jones, A.Taher, B.Majeed, P.Fiorini, L.Lagae

1200 Wed-C5-c7 Improving the Double Layer Capacitance of Silicon Nanowire Arrays with Room Temperature Ionic LiquidsA.Shougee, L.Qiao, T.Albrecht, K.Fobelets

1200 Wed-D2-c5 Periodic convection of superparamagnetic beads within a microfluidic channel by interlocked, electroplated structures activated by a static fieldJ.Thies, E.Koch, A.Dietzel

1215 Wed-C5-c8 Optimization of 3-D N-channel Twin Silicon Nanowire MOSFETI.Omar, N.Alias

1215 Wed-D2-c6 Nanoimprinted photonic crystal slab sensor for label-free diffusion monitoringK.Tølbøl Sørensen, A.Spandet Havreland, S.Friis Truelsen, P.Gordon Hermannsson, C.Vannahme, A.Kristensen

1230until1330


1230until1330


Wednesday Afternoon 23 September 2015Cluster A - Micro and Nano Patterning

Wednesday Afternoon 23 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time

A1 - Photo LithographyLecture Hall: AmazonSession Chairs: t.b.a.

time

C3 - Meta Materials and their FabricationLecture Hall: YangtzeSession Chairs: t.b.a.

1330 Wed-A1-c1 Towards Single Photon LithographyH.Hardtdegen, M.Mikulics, D.Grützmacher

1330 Wed-C3-invited

Recent progress in hyperbolic, chiral and 3D metamaterials: Physics, Fabrication and ApplicationsJ.Rho, M.Kim

1345 Wed-A1-c2 Fabrication of high-aspect-ratio polarizers with Displacement Talbot LithographyC.Dais, F.Clube, L.Wang, H.Solak

1400 Wed-A1-c3 Through-Wafer Photolithographic Exposure for Control of Resist Sidewall ProfileL.Wang, C.Dais, F.Clube, H.Solak

1400 Wed-C3-c1 Birefringent metamaterial for terahertz wave plateL.Xia, H.Mao, S.Wang, H.Cui, C.Du

1415 Wed-A1-c4 High coherency hybrid-ArF laser: An application to interference lithographyH.Oizumi, T.Onose, Y.Sasaki, H.Igarashi, M.Tamiya, A.Fuchimukai, S.Ito, K.Kakizaki, T.Matsunaga, .Hakaru

1415 Wed-C3-c2 Fabrication of Chiral-Molecular@ Nanoparticle Complex Materials with Great Chiroptical Effect in Visible RegionD.Xie, Y.Su, Y.Hou, F.Gao, J.Du, J.Zhu




Session Chairs: t.b.a.1445 Keynote 4 Advanced centrifugal microfluidics for Point-of-Care Applications

R. Zengerle1445 Keynote 4 Advanced centrifugal microfluidics for Point-of-Care Applications

R. Zengerle

1530 until1800

Wed-A#-p# Poster Session 2 and Exhibitionodd number posters

1530 until1800

Wed-B#-p# Poster Session 2 and Exhibitionodd number posters

Wednesday Afternoon 23 September 2015Cluster C - Micro and Nano Systems and Devices

Wednesday Afternoon 23 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time

C5.3 - Micro and Nano devices for Physical ScienceInstrumentation and ImagingLecture Hall: World Forum Theatre


D4 - Micro and Nanofluidics for Biology and Life SciencesLecture Hall: Mississippi


1330 Wed-C5-c9 Dopant Imaging of Power Semiconductor Device Cross SectionsU.Gysin, E.Meyer, T.Glatzel, H.Rossmann, T.Jung, S.Reshanov, A.Schoener, H.Bartolf

1330 Wed-D4-c1 Preparation of highly porous PLGA microparticles using droplet fission and gelatin porogenG.Kim, C.Kim, A.Ullah

1345 Wed-C5-c10 Experimental system combined with a micromachine and double-tilt TEM holderT.Sato, E.Tochigi, T.Mizoguchi, Y.Ikuhara, H.Fujita

1345 Wed-D4-c2 SU-8 micro-pillars suspended on Si3N4 membranes: a superhydrophobic chip for in-situ X-ray diffraction studies on bio-soft matterA.Accardo, G.Marinaro, M.Burghammer, C.Riekel, F.De Angelis

1400 Wed-C5-c11 Microfabrication of an integrated photoconductive switch and Ultrafast Beam BlankerG.Weppelman, R.van Tol, C.Heerkens, R.Moerland, J.Hoogenboom, P.Kruit

1400 Wed-D4-c3 Active porous valves for droplet flow manipulation in open channel fluidicsN.Vourdas, K.Dalamagkidis, V.Stathopoulos

1415 Wed-C5-c12 NV-center diamond cantilevers: extending the range of available fabrication methodsJ.Kleinlein, T.Borzenko, F.Muenzhuber, J.Brehm, T.Kiessling, L.Molenkamp

1415 Wed-D4-c4 Microfluidic Chips for Studying Mass Transport across Permeable Vascular Walls in Drug DeliveryC.Manneschi, M.Francardi, D.di Mascolo, A.Lee, P.Decuzzi




Session Chairs: t.b.a.Keynote 4 Advanced centrifugal microfluidics for Point-of-Care Applications

R. ZengerleKeynote 4 Advanced centrifugal microfluidics for Point-of-Care Applications

R. Zengerle

1530 until1800

Wed-C#-p# Poster Session 2 and Exhibitionodd number posters

1530 until1800

Wed-D#-p# Poster Session 2 and Exhibitionodd number posters

Thursday Morning 24 September 2015Cluster A - Micro and Nano Patterning

Thursday Morning 24 September 2015Cluster B - Micro and Nano Fabrication

time





0830 Award Ceremony

Quantitative technology, a joy foreverEmile van der Drift, MNE Fellow 2015

0830 Award Ceremony


A4.1 - Soft Lithography 1Lecture Hall: AmazonSession Chairs: t.b.a.

MEE Young Investigator Award LectureLate and Hot News Session


0930 Thu-A4-c1 A new photo-curable PDMS with excellent master replication fidelity for fast fabrication of working stamps in soft UV-NIL applications.M.Thesen, M.Messerschmidt, G.Grützner

0930 MEE-YIA Biomaterial Microsystems for Drug Delivery and BioelectrochemistryS.S. Keller, L. Amato, R.Singh Petersen, C. Caviglia, S.Hemanth, A.Heiskanen, A. Boisen, J. Emnéus

0945 Thu-A4-c2 Athermal nanoimprint lithography based on azobenzene resistC.Neuber, C.Probst, C.Meichner, J.Kumpfmüller, T.Glinser, L.Kador, H.Schmidt

1000 Thu-A4-c3 Injection Moulding of hard and soft substrates with Micro- and Nanostructures.A.Saeed, J.Stormonth-Darling, N.Gadegaard

1000 LHN-1 to be announced1010 LHN-2 to be announced

1015 Thu-A4-c4 High volume soft-stamp NIL, tooling and process designM.Verschuuren, R.van Brakel, R.Voorkamp, M.Knight

1020 LHN-3 to be announced


Thursday Morning 24 September 2015 - continuedCluster A - Micro and Nano Patterning

Thursday Morning 24 September 2015 - continuedCluster B - Micro and Nano Fabrication

A9 - Novel TechniquesLecture Hall: AmazonSession Chairs: t.b.a.

B1 - Pattern TransferLecture Hall: YangtzeSession Chairs: t.b.a.

1100 Thu-A9-invited

Wafer scale 3D-nanofabrication based on retraction edge lithography, corner lithography and anisotropic wet etching of siliconE.J.W. Berenschot, H.V.Jansen, E. Saraljlic, R.M,Tiggerlaar, H.J.G.E.Gareniers, N.Tas

1100 Thu-B1-c1 SnOx high-efficiency EUV interference lithography gratings towards the ultimate resolution in photolithographyE.Buitrago, R.Fallica, T.Kulmala, D.Fan, Y.Ekinci

Thu-B1-c2 High aspect ratio nanopatterning for x-ray diffractive opticsR.Tiberio, M.Rooks, C.Chang, S.Oh, S.Virasawmy, J.Park, A.Sakdinawat

1130 Thu-A9-c1 Development of Paper-based Photolithography for Device ApplicationsM.Cooke, D.Wood

Thu-B1-c3 Effects of thermal nanoimprint lithography on the mechanical properties of PMMA: a comparison between standard NIL and ultrafast NILM.Pianigiani, R.Kirchner, E.Sovernigo, M.Tormen, .Schift

1145 Thu-A9-c2 High aspect ratio 10-nm-scale nanoaperture arrays with template-guided metal dewettingY.Wang, L.Lu, B.Srinivasan, M.Asbahi, Y.Zhang, J.Yang

Thu-B1-c4 Patterning of diamond like carbon films using silicon containing thermoplastic resist (SiPol) as hard maskD.Virganavicius, V.Cadarso, S.Tamulevicius, H.Schift

1200 Thu-A9-c3 Magnetic assembly of microspheres into ordered two-dimensional arraysK.Aoki, M.Fujii

Thu-B1-c5 Polymer injection molding of hard X-ray refractive opticsF.Stöhr, J.Michael-Lindhard, H.Simons, A.Jakobsen, J.Hübner, F.Jensen, O.Hansen, H.Poulsen

1215 Thu-A9-c4 Approach for novel 3-dimensional imaging by built-in lens mask lithographyY.Hirai, T.Tanaka, H.Kikuta, M.Yasuda, H.Kawata

Thu-B1-c6 Pattern Fidelity in 3-D Structures during Pattern Transfer from Atomically Precise TemplatesJ.Ballard, S.Schmucker, J.Owen, J.Randall

1230until1330


1230until1330


Thursday Morning 24 September 2015Cluster C - Micro and Nano Systems and Devices

Thursday Morning 24 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time





0830 Award Ceremony


0830 Award Ceremony


C1.3 -MEMS/NEMS for Energy HarvestingLecture Hall: YangtzeSession Chairs: t.b.a.

D1.1 - Mechanical Sensing ElementsLecture Hall: Mississippi


0930 Thu-C1-c1 Design and fabrication of trapezoidal organic micro-beams for mechanical energy harvesting from environmental sourcesH.Nesser, H.Debèda, I.Dufour, C.Ayéla

0930 Thu-D1-c1 In-line picogram-resolution microchannel resonator for protein adsorption measurement operating at atmospheric pressureJ.Groenesteijn, R.Steenwelle, J.Lotters, R.Wiegerink

0945 Thu-C1-c2 AlN layers for bistable energy harvesting microdevicesR.Dias, H.Fonseca, M.Costa, L.Rocha, J.Gaspar

0945 Thu-D1-c2 Fabrication of holder-type piezoresistive cantilever for embryo mass measurementH.Sone, T.Kawakami , A.Saito, S.Hosaka, T.Sakata

1000 Thu-C1-c3 Triboelectric nanogenerator with honeycomb-like nanofiber microstructuresS.Jang, H.Kim, Y.Kim, J.Oh

1000 Thu-D1-c3 The Helium Ion Microscope as an ideal complement of FIB technologies for one nanometre-scale graphene nanopore fabricationJ.Gierak, E.Bourhis, T.Lottin, A.Madouri, L.Auvray, F.Montel, A.Morin, J.Mathé, E.Majorovits

1015 Thu-C1-c4 AlN-based flexible piezoelectric skin for energy harvesting from human motionF.Guido, M.Todaro, A.Qualtieri, L.Algieri, M.De Vittorio

1015 Thu-D1-c4 Iron Oxide Nanoparticle Assembly on DNA OrigamiD.Schiffels, F.Vargas-Lara, J.Douglas, J.Liddle


Thursday Morning 24 September 2015 - continuedCluster C - Micro and Nano Systems and Devices

Thursday Morning 24 September 2015 - continuedCluster D Micro and Nano Technology for Bio/Life Sciences

C1.4 -MEMS/NEMS graphene devicesLecture Hall: World Forum Theatre


D1.2 - Sensing SystemsLecture Hall: Mississippi


1100 Thu-C1-c5 Graphene membrane fabrication methods for NEMS applications with sealed cavitiesS.Wagner, C.Weisenstein, S.Kataria, M.Lemme

1100 Thu-D1-invited

Three-dimensional (3D) Scaffolds for Bioartificial Organ-on-a-Chip Systems and BioelectroanalysisS.Monhanty, A.Heiskanen, L.Amato, S.Keller, C.Canali, M.Hemmingsen, L.B.Larsen, M.Alm, P.Thomsen, O.G.Martinsen, A.Aspegren, A. Martinez-Serrano, M.Dufva, A. Wolff, J.Emneus

1115 Thu-C1-c6 Modification of boron-nitride-encapsulated graphene using a focused He+ beamG.Nanda, S.Goswami, P.Alkemade

1130 Thu-C1-c7 P3HT:PCBM and graphene inks for organic solar cellsJ.Kastner, A.Fuchsbauer, F.Tomarchio, N.Decorde, M.Wagner, I.Gnatiuk, D.Holzinger, B.Unterauer, K.Bretterbauer, A.Ferrari

1130 Thu-D1-c5 Highly Sensitive Raman analysis and electrical recording of living cells using vertical plasmonic nanoantennasM.Dipalo, G.Messina, R.La Rocca, V.Shalabaeva, F.De Angelis

1145 Thu-C1-c8 Piezoresistive transduction of graphene-based nanoelectromechanical systemsM.Kumar, H.Bhaskaran

1145 Thu-D1-c6 Fast prototyping of plastic microfluidic devices with Vis/IR transparent view-port for live cell imagingG.Grenci, G.Birarda, A.Ravasio, M.Suryana, S.Maniam, H.Holman

1200 Thu-C1 invited

Transfer-Free Fabrication of Large-Area Nanocrystalline Graphene Nanoelectromechanical Switch ArrayJ.Sun, M.Schmidt, H.Chong, M.Muruganathan, H.Mizuta

1200 Thu-D1-c7 A disposable miniaturized blood extraction device with flexible parylene microneedlesF.Lee

1215 Thu-D1-c8 Automated characterization of Biopolymer Degradation with a Blu-Ray Readout PlatformA.casci ceccacci, L.Morelli, F.Bosco, R.Burger, C.Chen, E.Hwu, A.Boisen

1230until1330


1230until1330


Thursday Afternoon 24 September 2015Cluster A - Micro and Nano Patterning

Thursday Afternoon 24 September 2015Cluster B - Micro and Nano Fabrication

time

A4.2 - Soft Lithography 2Lecture Hall: AmazonSession Chairs: t.b.a.

time

B2 - Plasma EtchingLecture Hall: YangtzeSession Chairs: t.b.a.

1330 Thu-A4-inv Photonic Crystals for visible light fabricated by reverse nanoimprinting of a high refractive index materialC. Pina-Hernandez, Q. Fillot, S. Dhuey, A. Koshelev, G. Calafiore, M. Sainato, K. Munechica, S. Cabrini

1330 Thu-B2-c1 Fabrication of shape memory / silicon bimorph nanoactuatorsF. Lambrecht, C. L.I. ván Aseguinolaza, V.Chernenko. M. Kohl

1345 Thu-B2-c2 Supercritical CO2 etching of metal thin films for magnetoresistive memory processingM.Rasadujjaman, Y.Nakamura, M.Watanabe, E.Kondoh, M.Baklanov

1400 Thu-A4-c5 Smart elastomer substrates for flexible systemsR.Seghir, S.Arscott

1400 Thu-B2-c3 Plasma Directed Assembly: A non-lithographic nanoassembly technology for polymeric nanodot and silicon nanopillar fabricationA.Smyrnakis, A.Zeniou, V.Constantoudis, E.Gogolides

1415 Thu-A4-c6 Multiplexed microfluidic stamp inking for automated micro-contact printing processA.Esteve, J.Foncy, J.Cau, E.Crestel, E.Trévisiol, C.Vieu, L.Malaquin

1415 Thu-B2-c4 Low-damage cryogenic etch of porous organosilicate low-k dielectricL.Zhang, A.Goodyear, M.Cooke, J.de Marneffe, S.De Gendt, M.Baklanov





1445 Keynote 5 Promises, Problems, and Practicalities of Nanomaterial ElectronicsAaron Franklin


1545 Closing Remarks and Farewell 1545 Closing Remarks and Farewell

Thursday Afternoon 24 September 2015Cluster C - Micro and Nano Systems and Devices

Thursday Afternoon 24 September 2015Cluster D Micro and Nano Technology for Bio/Life Sciences

time

C2 - Micro and Nano Fluidic SystemsLecture Hall: World Forum Theatre


D1.3 - Optical Sensing ElementsLecture Hall: Mississippi


1330 Thu-C2-c1 Effect of Different Fluids on Rectified Motion of Leidenfrost Droplets on Micro/Sub-Micron RatchetsJ.Ok, S.Park

1330 Thu-D1-c9 Microring resonator based evanescent field sensor with homogeneously integrated P-I-N detectorA.Samusenko, M.Ghulinyan, D.Gandolfi, R.Guider, T.Chalyan , L.Pavesi

1345 Thu-C2-c2 Lateral porous silicon membranes fabricated within 2D microchannelsthrough local ion implantationY.HE, D.Bourrier, T.Leichile

1345 Thu-D1-c10 Monitoring of the extracellular changes in the cell medium by SERS analysisV.Shalabaeva, R.La Rocca, M.Dipalo, G.Messina, E.Miele, F.De Angelis

1400 Thu-C2-c3 Luminescent and absorptive metal-coated droplets for micro-velocimetryO.Mesdjian, Y.Chen, J.Fattaccioli

1400 Thu-D1-c11 Fabrication and application of ultrathin gold nanohole films as complementary dual sensing platformR.Tiefenauer, B.Dielacher, J.Junesch, K.Tybrandt, J.Vörös

1415 Thu-C2-c4 A novel piezo actuated high stroke polymer membrane for micropumpsA.Shabanian, F.Goldschmidtboeing, S.Vilches, P.Woias

1415 Thu-D1-c12 Label-free biosensing of ErbB2 protein marker detection by an organic distributed feedback laser based on perylenediimide derivativeA.Retolaza, J.Martinez-Perdiguero, S.Merino, M.Morales-Vidal, P.Boj, J.Quntana, J.Villalvilla, M.Díaz-García







1545 Closing Remarks and Farewell 1545 Closing Remarks and Farewell

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