Us 6531330
description
Transcript of Us 6531330
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(12) United States Patent Lay et al.
US006531330B2
US 6,531,330 B2 Mar. 11, 2003
(10) Patent N0.: (45) Date of Patent:
(54)
(75)
(73) (*)
(21) (22) (65)
(30) Jul.
(51) (52) (58)
METHOD OF FABRICATING THIN FILM TRANSISTOR FLAT PANEL DISPLAY
Inventors: Chung-Wen Lay, Taipei (TW); Meng-Yueh Wu, Hsinchu (TW)
Assignee: AU Optronics Corp., Hsinchu (TW) Notice: Subject to any disclaimer, the term of this
patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
Appl. No.: 10/200,831 Filed: Jul. 22, 2002
Prior Publication Data
US 2003/0017636 A1 Jan. 23, 2003
Foreign Application Priority Data 23, 2001 ..................................... .. 90117932 A
Int. Cl.7 .............................................. .. H01L 21/00 US. Cl. ....................... .. 438/30; 438/149; 438/151;
438/479; 438/517 Field of Search ........................ .. 438/30, 149, 151,
438/479, 517
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(56) References Cited
U.S. PATENT DOCUMENTS
6,372,535 B1 * 2002/0121639 A1 *
4/2002 Lyu 9/2002 S0 et al.
* cited by examiner
Primary ExaminerJohn F. Niebling Assistant ExaminerStanetta Isaac (74) Attorney, Agent, or FirmLadas & Parry (57) ABSTRACT A method of fabricating a thin ?lm transistor (TFT) ?at panel display. The method merely comprises four mask steps of: (1) using the ?rst mask process for patterning the ?rst conductive layer/gate insulating layer/amorphous silicon layer of the TFT, (2) using the second mask process for de?ning the passivation layer and the etching stopper, (3) using the third mask process for forming the Source/Drain, and (4) using the fourth mask process for forming the pixel electrode, Whereby simplifying the fabricating process of the TFT ?at panel display.
12 Claims, 19 Drawing Sheets
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103 101 102
103 101 102
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U.S. Patent Mar. 11,2003 Sheet 1 0f 19 US 6,531,330 B2
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1
FIG. 1A ( PRIOR ART ) 5 2
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FIG. 1B ( PRIOR ART )
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FIG. 1C ( PRIOR ART ) 2 5
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FIG. 1D ( PRIOR ART )
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U.S. Patent Mar. 11,2003 Sheet 2 0f 19 US 6,531,330 B2
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FIG.2A
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FIG. 2B
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U.S. Patent Mar. 11,2003 Sheet 3 0f 19 US 6,531,330 B2
FIG. 2D
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U.S. Patent Mar. 11,2003 Sheet 4 0f 19 US 6,531,330 B2
11 I
fDLp fDLg 1 1 \ 1 1 / 1 1 / \ / / \ @400 1 ( \ 1 ( \ 103 101 103 101
102 102
FIG. 3A
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U.S. Patent Mar. 11,2003 Sheet 5 0f 19 US 6,531,330 B2
II I
0p3 104 (IS)
I I "?g/3| ' ~\./105 1 \ ' 1\
104g / 1 1 1 / 11 @9104 11 1 T/ /\ ~100
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FIG. 3C
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U.S. Patent Mar. 11,2003 Sheet 6 0f 19 US 6,531,330 B2
FIG. 4A
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f / ~~100 I ( \ 1 f ( \
103 101 104 103 101 102 102
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U.S. Patent Mar. 11,2003 Sheet 7 0f 19 US 6,531,330 B2
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FIG. 4C
FIG. 4D
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U.S. Patent Mar. 11,2003 Sheet 8 0f 19 US 6,531,330 B2
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FIG.5A
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FIG. 5B
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U.S. Patent Mar. 11,2003 Sheet 9 0f 19 US 6,531,330 B2
FIG. 5C
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U.S. Patent Mar. 11,2003 Sheet 10 0f 19 US 6,531,330 B2
1 1 1 l
f-DLp f DLg
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1 / / / \ / / ~100 I ( \ / ( 103 101 103 101
102 102
FIG. 6A
II 1
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U.S. Patent Mar. 11,2003 Sheet 11 0f 19 US 6,531,330 B2
11 1
0P3 104
l KDLP } 106J/ N106 , 105d/ 1 105 1 1
104-I / 1 1 / 1 12,104 / \ L 7 / /\ ~100 I ( \ 1 I ( \
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FIG. 6C
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U.S. Patent Mar. 11,2003 Sheet 12 0f 19 US 6,531,330 B2
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FIG. 7A
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FIG. 7B
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U.S. Patent Mar. 11,2003 Sheet 14 0f 19 US 6,531,330 B2
/ / \ / \ V100 103 101 103 101
102 102
FIG. 8A
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0P3 104
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I02 102 DLg
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U.S. Patent Mar. 11,2003 Sheet 15 0f 19 US 6,531,330 B2
1 104VJ/ 1 ~~104 \1 / /\ 1 7/ 1 ( \ 1 K1 ( \ 103 101 104 103 101
102 102 DLg
FIG.8C
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FIG. 8D
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U.S. Patent Mar. 11,2003 Sheet 16 0f 19 US 6,531,330 B2
DLg
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FIG. 9A
SL\' 0p1 0p2
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FIG. 9B
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U.S. Patent Mar. 11,2003 Sheet 18 0f 19 US 6,531,330 B2
/ DLp DLg \
FIG. 10A
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II. \_/106 III] r 71: ? SL I M104 2 ,6 1 '4 . '/ 1 1 "'4
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FIG. 10B
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U.S. Patent Mar. 11,2003 Sheet 19 0f 19 US 6,531,330 B2
11 I
S107(T2) 103 103 limlios 1% SL 305
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FIG. 10C