Unique Technologies for Thin Film Solar Cells
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Unique Technologies for... Thin Film Solar Cells Type of thin film solar cell Single Crystal Polycrystalline Polycrystalline thin film Others Amorphous Thin film solar cell Compound Semiconductor II-VI (CIS, CdTe, etc.) III-V (GaAs, InP, etc.) Others Si Amorphous Si Sunlight a-Si Poly-Si Tansparent electrode Zn0, Sn0 2 Back-side electrode Zn0/Ag Series contact hole Contact hole A-Si Metal electrode Film substrate Back-side electrode SnO2 a-Si a-SiGe Metal Unique Technologies for the Flat Panel Display and Solar Cell Industries. ULVAC is a leading supplier of PVD and CVD equipment with an extensive line-up of products and knowledge to assist with the turnkey set-up of a solar cell manufacturing line rapidly and at very competitve cost. Metals & Metal Oxides Crystal Type
Transcript of Unique Technologies for Thin Film Solar Cells
Unique Technologies for...
Thin Film Solar CellsType of thin film solar cell Single Crystal
PolycrystallinePolycrystalline thin filmOthers
Amorphous
Thin film solar cell
Compound Semiconductor
II-VI (CIS, CdTe, etc.)III-V (GaAs, InP, etc.)Others
Si
Amorphous Si
Sunlight
Glass
a-Si Poly-Si
Tansparent electrode Zn0, Sn0
2
Back-side electrode Zn0/Ag
Series contact hole
Contact holeA-Si
Metal electrode
Film substrate
Back-side electrode
GlassSnO2a-Si
a-SiGeMetal
Unique Technologies for the Flat Panel Display and Solar Cell Industries. ULVAC is a leading supplier of PVD and CVD equipment with an extensive line-up of products and knowledge to assist with the turnkey set-up of a solar cell manufacturing line rapidly and at very competitve cost.
Metals & Metal Oxides
Unique Technologies for...
Thin Film Solar Cells
Crystal Type
PE-CVD Systema-Si, µc-Si, Passivation SiN
Multi-Chamber Type PE-CVD System CMD-950
Cluster-Type Small Substrate CME-200
In-Line Type Plasma CVD System CCV-1000
Sputtering SystemMetals (Al, Ag, etc.), Metal oxides (ZnO, ITO, etc.)
Multi-Chamber Type Sputtering System SMD-950
Cluster-Type Small Substrate SME-200
In-Line Type Sputtering System SCH-135
