Today’s SPM in Nanotechnology
description
Transcript of Today’s SPM in Nanotechnology
![Page 1: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/1.jpg)
04/22/23 1
Today’s SPM in Nanotechnology
An introduction for Advanced Applications
Qun (Allen) Gu, Ph.D., AFM Scientist, Pacific Nanotechnology
IEEE Bay Area Nanotechnology Council, August, 2007
![Page 2: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/2.jpg)
04/22/23 2
Content
- AFM fundamentals: Principle, instrument, applications
- Field Modes
EFM
KPM
MFM
- Shark Modes (C-AFM, I-V)
- Lithography
LAO
Scratch
DPN
![Page 3: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/3.jpg)
04/22/23 3
What is an SPM
• An SPM is a mechanical imaging instrument in which a small, < 10 nm in radius, probe is scanned over a surface. By monitoring the motion of the probe, the surface topography and/or surface physical properties are measured with an SPM.
![Page 4: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/4.jpg)
04/22/23 4
Forces
![Page 5: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/5.jpg)
04/22/23 5
AFM System
Computer Software for gathering and processing images resides on the computer.
Electronic Controller Generates electronic signals that control all functions in the stage
StageScanner (laser, PD, PZ), Optical Microscope, sample stage.
![Page 6: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/6.jpg)
04/22/23 6
AFM System
ForceTransducer
Z Piezo
X-Y Piezo
Sample
FeedbackController
Compare
Set Force
XY Raster Electronics
Image Out
![Page 7: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/7.jpg)
04/22/23 7
AFM Light Lever
Sample
So
Photo detector
Cantilever
Laser
When the cantilever moves up and down, the position of the laser on the photo detector moves up and down.
Differential Amplifier
![Page 8: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/8.jpg)
04/22/23 8
Feedback Control
• A control system which monitors its effect on the system it is controlling and modifies its output.
• Measure, Compare, Update
Car on a road
![Page 9: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/9.jpg)
04/22/23 9
Comparison
Non-destructive; 3D Magnification; Ambient air; Surface physical property
![Page 10: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/10.jpg)
04/22/23 10
AFM Applications
• Life Sciences• Cells, Bio-molecules, Biomaterials
• Material Sciences• Semiconductors, Ceramics, Polymers
• High Technology• Data Storage, Optics, Semiconductors,
Biotech.• Low Technology
• Paper, Steel, Plastics, Automobile
![Page 11: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/11.jpg)
04/22/23 11
Life Sciences
![Page 12: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/12.jpg)
04/22/23 12
Material Sciences
![Page 13: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/13.jpg)
04/22/23 13
High Technology
![Page 14: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/14.jpg)
04/22/23 14
Low Technology
![Page 15: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/15.jpg)
04/22/23 15
AFM Modes: Advanced Applications
• Field Modes• KPM/EFM• Magnetic Force
• Electrical Modes (Shark)• Lithography
• LAO• Scratching• DPN
• Material Sensing Modes• Lateral Force• Vibrating Phase
• Mechanical• Force/Distance• Indenting
• Liquid
![Page 16: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/16.jpg)
04/22/23 16
Field Modes
1st Scan
2nd Scan
Charged/magnetic samples
F = Fsurface + Felectrostatic + Fmagnetic + Fother
- Electrostatic force/magnetic force interaction (> tens of nm)
- Qualitative/Quantitative
- Resolution depends on sample, probe coating
![Page 17: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/17.jpg)
04/22/23 17
Probe/Surface InteractionA Free oscillations
B Oscillation damped by a surface
Frequency
Am
plitu
de
Tip-sample interaction = A spring in series with cantilever
(Linear approximation)
![Page 18: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/18.jpg)
04/22/23 18
INSTRUMENTATION
1. Lock-in technique: at constant fD, cantilever Δf results in ΔA (a) and Δφ (b), which can be interpreted as a force signal. (No FB)
2. Frequency Modulation (servo controller): Measure Δf: at the constant phase (phase lag is zero in a phase locked loop).
![Page 19: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/19.jpg)
04/22/23 19
KPM/EFM
Sample
Laser
Photo Detector
Nano-R / Nano-IController(ω 0)
Lock-In Amp (ω )
SPT-20
Surface Potential of the sample VSVDC
VAC cosωt
Feedback control adjusts to minimize the amplitude and records VDC.This recorded VDC is equal to VS.
KPM Image
T-B Signal(ω+ω 0)
Bimorph Piezo(ω 0)
Amplitude of frequency ω
EFM Image
V0cosω0t
Schematic of the EFM・KPM Mode
Sample
Laser
Photo Detector
Nano-R / Nano-IController(ω 0)
Lock-In Amp (ω )
SPT-20
Surface Potential of the sample VSVDC
VAC cosωt
Feedback control adjusts to minimize the amplitude and records VDC.This recorded VDC is equal to VS.
KPM Image
T-B Signal(ω+ω 0)
Bimorph Piezo(ω 0)
Amplitude of frequency ω
EFM Image
V0cosω0t
Schematic of the EFM・KPM Mode
![Page 20: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/20.jpg)
04/22/23 20
EFM
Calculate the change in the resonant frequency(ω): Use Equations for fields above a surface and calculate the derivative of the field.
++++
Vibration Amplitude
Charged region
Electric field
CantileverVibration
![Page 21: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/21.jpg)
04/22/23 21
Electric Forces (EFM)
Topography Electric Force
+v-v -v
![Page 22: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/22.jpg)
04/22/23 22
KPM
Vs: Contact potential difference or work function difference
- DC component: static attractive force between electrodes (topo)
- component: a force between charges induced by AC field (KPM)
- 2 component: a force induced to capacitors only by AC voltage (SCM)
Lock-in Amp detects the signal at , feedback control minimizes this component by adjusting VDC, so VS+VDC = 0
![Page 23: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/23.jpg)
04/22/23 23
EFM/KPM
Surface potential distribution
Capacitance (C-z, C-V)
Polarization of adsorbed molecules
Polarization or piezo effect of ferroelectric
Charge distribution
Carrier distribution in semiconductor
Local work function
others
![Page 24: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/24.jpg)
04/22/23 24
EFM/KPM
10X10 um topography and KPM images of a DVD-RW surface
![Page 25: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/25.jpg)
04/22/23 25
Corrosion Study
Surface potential mapping for a metal alloy surface: enhanced corrosion (higher cathodic reaction) observed in the boundaries.
![Page 26: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/26.jpg)
04/22/23 26
Semiconductor
Puntambekar et al., Appl. Phys. Lett., Vol. 83, No. 26, 29 December 2003
![Page 27: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/27.jpg)
04/22/23 27
Semiconductor
![Page 28: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/28.jpg)
04/22/23 28
Nanowires embedded in alumina matrix. (Right) EFM images show the electrical discontinuity of the nanowires.
C. A. Huber; Science, 263, 1994), pp. 800-802.
Nanomaterials
![Page 29: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/29.jpg)
04/22/23 29
MFM
A magnetically sensitive cantilever interacts with the magnetic stray field of the sample. Resulting changes in the status of the cantilever are measured by the deflection sensor, and recorded to produce an image.
![Page 30: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/30.jpg)
04/22/23 30
MFM
F = Fmag + Felec + Fvan
Fvan = AHR/6z2 Felec = V2R/z2
R=10 nm, Z=50 nm, F’elec, F’van ~ 10-6 N/m
F’mag ~ 1/(a+z)2 a: domain width; z: distance
Sharp tip and small V, F’elec F’van << F’mag (at Z > 20 nm)
![Page 31: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/31.jpg)
04/22/23 31
MFMConstant frequency mode:
Maintain the frequency by adjusting z Topography convolution; AC+DC Felec as servo force
Lift-mode:
Monitoring fr or the phase shift during 2nd pass
Constant height:
Applying small bias to compensate Felec by work function difference; Highest S/N (no FB noise)
![Page 32: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/32.jpg)
04/22/23 32
MFM
A topography (left) and MFM image (right) for a hard disk.
![Page 33: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/33.jpg)
04/22/23 33
MFM
A topography (left) and MFM image (right) for a degassed hard disk. MFM image acquired by raising the magnetic tip ~80 nm above the surface. The bit microstructures were never found on this sample surface.
![Page 34: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/34.jpg)
04/22/23 34
MFM
A topography (left) and MFM image (right) for a Magnetic recording tape
![Page 35: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/35.jpg)
04/22/23 35
SHARK Mode
• Monitor Current Between Tip and Sample while scanning in contact mode
• Measure current map and Topography Simultaneously
v
A/D
![Page 36: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/36.jpg)
04/22/23 36
SHARK Example
Glass Substrate
Gold
![Page 37: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/37.jpg)
04/22/23 37
Electrical Test
LPM Software allows probing the sample; SP, Voltage ramping, holding time
![Page 38: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/38.jpg)
04/22/23 38
SHARK Example
Conducting Substrate
Insulating Matrix
NanoTube
![Page 39: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/39.jpg)
04/22/23 39
Nano-Lithography
-Change surface chemical composition
-Deposit materials on a surface
-Physically scratch surface
![Page 40: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/40.jpg)
04/22/23 40
Nano-Lithography
-Draw Line as vector
- Draw an array of dots “dot matrix”
![Page 41: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/41.jpg)
04/22/23 41
Local Anodic Oxidation
Silicon
50 nm Lines
Si + H2O SiO2+ H+
![Page 42: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/42.jpg)
04/22/23 42
Local Anodic Oxidation
Humidity
Linewidth SP/Voltage
Scan rate
![Page 43: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/43.jpg)
04/22/23 43
Local Anodic Oxidation
The formation of a single (tunneling) barrier within a thin metal film is shown. The tip repeatedly scans along a single line, monitoring the conductance through the device while oxidising. The image shows the 70nm wide metallic wire(black), defined by AFM induced oxide barrier, 21 nm wide.
![Page 44: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/44.jpg)
04/22/23 44
Scratching
When Scratching With the AFM, there is a torsion on the cantilever so the probe area changes.
![Page 45: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/45.jpg)
04/22/23 45
DIP-PEN NANOLITH
Transfer ink materials (small molecules) onto substrate in a pre-defined pattern
![Page 46: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/46.jpg)
04/22/23 46
DIP-PEN NANOLITH
(Left) amino-modified polystyrene particles onto carboxylic acid alkanethiol (-) template. (Right) Opposite electrostatic assembly of citrate-stabilized gold nanoparticles onto carboxylic acid alkanethiol (-) surrounding a hydrophobic, uncharged dot array (ODT).
![Page 47: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/47.jpg)
04/22/23 47
DIP-PEN NANOLITH
High Resolution and Accuracy:14 nm linewidths, 5 nm spatial resolution; Automated registry
Versatile Chemical and Material Flexibility: Alkylthiols (e.g. ODT & MHA), Fluorescent dye, Silazanes, Alkoxysilanes, Conjugated polymer, DNA, Proteins, Sols, Colloidal particles, Metal salts
Simple Operation and Experimental Procedures:Can deposit direct-write, without need for resists; Operates in ambient conditions (no UHV); Patterning and imaging by the same instrument.
Efficient and Scalable:Patterning and imaging routines are automated via InkCAD;parallel pen arrays scale to 52 parallel pens; 2D nano PrintArrays™ in development: 2D arrays of 55,000 pens.
![Page 48: Today’s SPM in Nanotechnology](https://reader035.fdocuments.us/reader035/viewer/2022062501/56815b67550346895dc95aa7/html5/thumbnails/48.jpg)
04/22/23 48
Summary
AFM is a Hot Instrument in nanotechnology applications
- High Resolution: a few nm X/Y, A in Z
- Versatile: Measure electrical/magnetic field, tens of nm
I-V Curve measurement, conductive mapping
Nanolithography (LAO/DPN); Force measurement
- Non-destructive, Ambient/water environments, affordable
- Weakness: Limited Z, Low speed, …