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M.S. Thesis defense – 06/30/2010

Haptic controlled X-Y-ZMEMS gripper system

Presented by: Ashwin Vijayasai

Committee membersDr. Tim Dallas (Chair)

Dr. Richard GaleDr. Stephen Bayne

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OUTLINE• Motivation• Objective• Introduction• Literature review• Setup overview• MEMS microgripper: description and

characterization• Haptic Interface• Three axis positioner• Stepper-motor Characterization• Experimental Setup• Handling and manipulation results

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“…You know, in the atomic energy plants they have materials and machines that they can’t handle directly because they have become radioactive. To unscrew nuts and put on bolts and so on, they have a set of master and slave hands, so that by operating a set of levers here, you control the “hands” there, and can turn them this way and that so you can handle things quite nicely.” - Richard Feynmen[1][1] There's plenty of room at the bottom, Feynman, R.P.; IEEE JMEMS, vol 1, issue 1, 1992 , pp 60 - 66

MOTIVATION

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OBJECTIVE

1. Ability to handle micro-scale objects in the range 0-100µm.

2. Ability to manipulate the micro-objects at sub-micron resolution (~0.5µm) with meso-scale (~25mm) travel.

3. Provide tactile interaction with micro-scale objects (Haptic interface).

Novint Falcon[3]

Zygote [2]

[2] Pronuclear Injection – Transgenic mice production, Eppendorf®[3] Image reproduced from Novint® Falcon™, Novint Technologies Inc.

50 µm

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INTRODUCTION

•Researchers have integrated MEMS devices in micro-positioning tools and demonstrated handling, grasping, and construction of micro-structures, micro-beads, and other devices.•MEMS based micro-positioning and handling tools can be used in various applications

1. Micro-assembly2. Transgenic mice3. IVF and ICSI4. Single cell analysis5. Cell sorting

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1. Reliability2. Travel range3. Step resolution4. Operating speed5. Handling forces6. Experimental setup7. Bio-compatibility

DESIGN CONSIDERATIONS

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LITERATURE REVIEW

Micromanipulation of micro-objects using electrostatic microgripper and its bio-compatibility was reported by Felix et al.[3].

Handling of microbeads aligned in a ultrasonic field [6]

[3] B. Felix, N. Adrian, O. Stefano, J. B. Dominik, S. Yu, D. Jurg, J. N. Bradley, “Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field”, in JMEMS, vol. 16, Iss. 1, 2007, pp. 7-15.

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LITERATURE REVIEW

Our method differs from the work discussed by Trinh Chu et al.[4]. They do not have haptic based control of axial motion and gripper actuation.

[4] D. Trinh Chu, L. Gih-Keong, J.F. Creemer, P.M. Sarro, “Electrothermal microgripper with large jaw displacement and integrated force sensors”, in JMEMS, vol. 17, Iss. 6, 2008, pp. 1546-1555.

Handling of glassbeads [4]

[5] K. Kim, X. Liu, Y. Zhang, Y. Sun, “Micronewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback” in IEEE Int. conf. on robotics and automation, 2008, pp. 3100-3105.

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LITERATURE REVIEW

Our method differs from the work discussed by Kim et al.[5] in the electrostatic gripper design by improving compatibility to various biological samples.

Handling of He-la cells [5]

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SETUP OVERVIEW

Feature FT-G100 FT-G60

Operating Voltage (volts) 0-200 0-150Operating Range (µm) 0-100 0-60

Force Sensor Yes No

Feedback to HapticMeasured output from force

sensor while handlingSimulated force signals from

LabVIEWGripper arms operating while

actuationOne arm actuates Both arm actuates

Gripper arm length (mm) 3.0 1.9Gripper arm penetration

length in liquid sample (mm) 2.5 1.311

MEMS MICROGRIPPER

A’ – Gripper actuating armA’’ – Comb-fingersB – Force sense circuitC’ – Gripper actuating armsC’’ – Comb fingers

FT-G100 FT-G60

F = k . Voltage

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DISPLACEMENT CHARACTERISTICSFT-G100 FT-G60

…(i) …(ii)

R2 = 0.99 R2 = 0.99

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HAPTIC INTERFACE• Haptic gives the

ability to perceive and manipulate micro-scale objects.

• It is a 3 DOF device• The X,Y,Z on the

diagram shows the axial operation of manipulator assembly.

Schematic Diagram of Haptic Controls

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1. Micromanipulator, Probing Solutions Inc.2. Rotary motion of Y, Z couplers produces axial motion of rod3. The Y, Z from the diagram shows the axial operation of

manipulator assembly4. Coupled screw causes deviation of orthogonal axial motion in

the rod

THREE AXIS POSITIONER

Schematic representation of Y, Z positioner

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THREE AXIS POSITIONER

Schematic representation of X positionerAssembly of X positioner

1. Linear stage (Newport)2. Rotary motion of X coupler produces axial motion of stage3. The stage motion is shown in the assembly

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Comparison of axial motion and lateral motion

Axial Motion Lateral Motion

Position Shift per ...Iteration

AxisDisplacement …(α) in µm

AxisDisplacement … (β) in µm

(α1, β1) in µm

S.No

1 + Z 745.28 - Y 11.90 (0.91,0.05)2 - Z 745.27 + Y 11.90 (0.90,0.05)3 + Y 649.98 - Z 12.33 (0.88,0.04)4 - Y 651.56 + Z 12.39 (0.89,0.04)

RESULTS

Calibration conditions:1. Half-step mode of stepper motor2. 1 complete rotation of stepper motor3. Clockwise and counter clockwise4. 10 iterations

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STEPPER MOTOR RESOLUTION

Step modes

Step resolution

(µm)

Step resolution

(µm)

Step resolution

(µm)

X axis Y axis Z axis

Full 2.3 3.3 3.7Half 1.1 1.6 1.9

Quarter 0.6 0.8 0.9Eighth 0.3 0.4 0.5

Axial step resolution of all X-Y-Z axes operating at Half step mode

Operational Step modes

X and Y combined result

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EXPERIMENTAL SETUP

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LABViEW CONTROLS (VI)Automatic Positioner Video Feed

Force senseOperation Speed Haptic Controls

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MANIPULATION RESULTS POLYSTYRENE BEADS MEMS DEVICES MEMS CHESSBOARD

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MANIPULATION SEQUENCE

Manipulation of Polystyrene beads to form assembled structure

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ASSEMBLED MICROSPHERES

Microscope image of assembled polymer beads taking the shape of a double T (TTU symbol).

Glass Slide

Polystyrene

bead ˜ 45µm

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MANIPULATION RESULTS POLYSTYRENE BEADS MEMS DEVICES MEMS CHESSBOARD

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SUMMiT – V PROCESS

Cross-sectional view of SUMMiT - V process

Packaged chip

AutoCAD layout

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2009 NANO CATEGORY MEMS CHIP

A – Microscopic bird’s eye view of chipB – Portion of the chip with detachable devicesC – Microscopic image: Microgripper is positioned for handling MEMS devices

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SUMMiT-V MICROGRIPPER (SMG)

A – SMG arm tip initial opening 7µmB – bond pad with steps at endC – Mechanical stop (spring )D – Hot/ Cold arm actuator

FEA modeling using ANSYSApplied voltage 4 voltsObserved total opening 31µm

DESIGN

MODELING

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Cross-sectional view of slider mechanism

Experimental setup showing FT-G60 on a holder, assembly platform, Y-Z manipulator rod, X stage.

SUMMiT-V MICROGRIPPER (SMG)

Slider travel distance ~27µm

OFF-CHIP DEVICES - SMG

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MANIPULATION RESULTS POLYSTYRENE BEADS MEMS DEVICESMEMS CHESSBOARD

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MICRO-CHESSBOARDFabricated by Sandia National Labs, 2009

• 1mm x 1mm• Inspiration from SPICE (Susan Polger)• P1 – P4 (P4 – stub)• Off – chip manipulation• Test the limits of X-Y-Z positioner

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1 2

4 5

7 8

3

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GAME ON – ‘QUEEN’ CALLS CHECK!

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Sandia Lab news, June 4 2010

• 450µm x 450µm• Robotic arm moving pieces• P1 – P4 (P4 – stub)• On – chip manipulation

RECENT MEDIA ATTENTION

http://www.sandia.gov/LabNews/100604.html

http://www.popsci.com/gadgets/article/2010-06/microbarbershop-micro-chessboard-actually-work-winning-sandia-design-awards

TTU daily news, July 16 2010

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CONCLUSION• A mesoscale (~24mm) to microscale (~0.3µm) controlled manipulation

system has been designed, developed and integrated with a high-fidelity three-dimensional force feedback haptic device.

• Demonstrated micro – object handling using MEMS gripper and haptic interface.

• This system will be used for precision handling of biological cells, other small objects, and micro assembly applications.

Results achieved:1. Travel range – ~0 to ± 12mm2. Step resolution – ~<0.5µm3. Operating speed achieved ~100µm/min. (VI controlled)4. Handling forces – observed 50µN while handling SF-9 cells

1. 1 conf. paper published, SPIE – MEMS MOEMS, Jan 2010. 2. MEMS micropositioning tool, RSI AIP (exp. Jul, 2010).3. MEMS device handling and assembly (exp. Jul-Aug, 2010).

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ACKNOWLEDGMENTSDr. Tim Dallas

Dr. Richard Gale

Dr. Stephen Bayne

Kim Zinsmeyer, Phil Cruzan (Phy.)

Dr. Gullermo Altenberg (TTU HSC)

Dr. Michael Sanfrancisco (Biology)

Dr. Brenda Rodgers (Biology)

Dr. Lauren Gollahon (ESB & Biol.)

Dr. Siva Vanapalli (Chemical)

FUNDING & SUPPORT

Ganapathy Sivakumar

Alex Holness (MANDE 2009)

Kiran Kolluru

Charlie Anderson

Gabriel Ramirez

Piyush Gupta

Sahil Oak

Sandesh Rawool

Sunder Rajan

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BACKUPSLIDES

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$200

$200

$200

$700

$1500$400

$500

$300

~$4000

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OTHER SIMILAR WORK

1. Y. Sun and B.J. Nelson, “Biological cell injection using an autonomous microrobotic system,” Int. J. Robot. Res., Vol. 21, No. 10-11, pp. 861- 868, 2002.

2. W.H. Wang, X.Y. Liu, D. Gelinas, B. Ciruna, and Y. Sun, “A fully automated robotic system for microinjection of zebrafish embryos,” PLoS ONE, Vol. 2, No. 9, e862. doi:10.1371/ journal. pone.0000862, 2007.

3. Y. Kimura and R. Yanagimachi, “Intracytoplasmic sperm injection in the mouse,” Biol. Reprod., Vol. 52, pp. 709-720, 1995.

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VOLTAGE COMPARISON

*Results obtained from fluid media environment

S.No Sample Specimen Size (µm)

Voltage for grabbing , VG(volts)

Voltage for manipulation,

VM (volts)

1 SF-9 cells 10-15 160-165 165-170

2 Polystyrene beads 40-46 120-123 125-128

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OFF-CHIP DEVICES - CHEVRON

Off – chip Chevron fabricated using SUMMiT V process.

Device operating range:1. V = 0 – 15V (at

22mA)2. Displacement

0μm to 12μm

Glass slide

100μm 100μm

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OFF-CHIP DEVICES - SMG

Sandia Microgripper (SMG) fabricated using SUMMiT V process.

Device operating range:1. V = 0 – 15V (at

22mA)2. Working range

8μm to 32μm

Liquid media

60μm