Thermal Management Using Planarized CVD- … Management Using Planarized CVD-Diamond Substrates The...

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The International Journal of Microcircuits and Electronic Packaging, Volume 23, Number1, First Quarter 2000 (ISSN 1063-1674) © International Microelectronics And Packaging Society 99 Thermal Management Using Planarized CVD- Diamond Substrates Sushila B. Singh Hameed Naseem High Density Electronics Center (HiDEC) High Density Electronics Center (HiDEC) Department of Mechanical Engineering Department of Electrical Engineering 204 Mechanical Engineering Building 3217 Bell Engineering Center University of Arkansas University of Arkansas Fayetteville, Arkansas 72701-1201 Fayetteville, Arkansas 72701-1201 Phone: 501-575-4793 Phone: 501-575-6052 Fax: 501-575-8720 Fax: 501-575-7967 e-mail: [email protected] e-mail: [email protected] Arun Krishnamoorthy W. D. Brown High Density Electronics Center (HiDEC) High Density Electronics Center (HiDEC) Department of Electrical Engineering Department of Electrical Engineering 3217 Bell Engineering Center 3217 Bell Engineering Center University of Arkansas University of Arkansas Fayetteville, Arkansas 72701-1201 Fayetteville, Arkansas 72701-1201 Phone: 501-575-2392 Phone: 501-575-6045 (Currently at Intel, Hillboro, OR) Fax: 501-575-7967 e-mail: [email protected] Ajay P. Malshe* High Density Electronics Center (HiDEC) Department of Mechanical Engineering 204 Mechanical Engineering Building University of Arkansas Fayetteville, AR 72701-1201 Phone: 501-575-6561 Fax: 501-575-6982 e-mail: [email protected] * Contact Author Abstract CVD diamond (CVDD) substrates offer an outstanding solution for various advanced electronic packaging applications such as high power 3-D MCM S , laser diodes, and high power MOSFETs. In the manufacturing of such substrates, various post-synthesis process- ing steps, such as polishing, cutting, and metallization, add significantly to the cost of the package. Recently, the authors introduced a planarization-by-filling process to reduce the cost of polishing and increase the ease of manufacturing. The process involves surface planarization of coarsely-lapped diamond substrates using a filler material such as polyimide, which is regularly used in electronic packaging industry. In the past, the researchers demonstrated successfully the applicability of this planarization process. In this paper, the authors present Finite Element analysis (FEA) and experimental results of thermal management using polyimide planarized CVDD substrates, for wirebond and Flip Chip die attachment configurations. Specifically, these results are directed at determining the maximum die temperature for various power densities using liquid convection for edge cooling. Also, the paper presents results of a thermal stress study, using thermal shock, for GaAs laser diodes mounted, using gold-tin hard solder, on a CVDD substrate planarized using PI-2610 and 2611 polyimides. It is found that the planarization-by-filling process not only gives an easy and inexpensive solution to the high surface roughness of CVDD, but also adds value to the package by providing a compliant layer between the GaAs die and CVDD without sacrificing thermal management performance.

Transcript of Thermal Management Using Planarized CVD- … Management Using Planarized CVD-Diamond Substrates The...

Thermal Management Using Planarized CVD-Diamond Substrates

The International Journal of Microcircuits and Electronic Packaging, Volume 23, Number1, First Quarter 2000 (ISSN 1063-1674)

© International Microelectronics And Packaging Society 99

Thermal Management Using Planarized CVD-Diamond SubstratesSushila B. Singh Hameed NaseemHigh Density Electronics Center (HiDEC) High Density Electronics Center (HiDEC)Department of Mechanical Engineering Department of Electrical Engineering204 Mechanical Engineering Building 3217 Bell Engineering CenterUniversity of Arkansas University of ArkansasFayetteville, Arkansas 72701-1201 Fayetteville, Arkansas 72701-1201Phone: 501-575-4793 Phone: 501-575-6052Fax: 501-575-8720 Fax: 501-575-7967e-mail: [email protected] e-mail: [email protected]

Arun Krishnamoorthy W. D. BrownHigh Density Electronics Center (HiDEC) High Density Electronics Center (HiDEC)Department of Electrical Engineering Department of Electrical Engineering3217 Bell Engineering Center 3217 Bell Engineering CenterUniversity of Arkansas University of ArkansasFayetteville, Arkansas 72701-1201 Fayetteville, Arkansas 72701-1201Phone: 501-575-2392 Phone: 501-575-6045(Currently at Intel, Hillboro, OR) Fax: 501-575-7967

e-mail: [email protected] P. Malshe*High Density Electronics Center (HiDEC)Department of Mechanical Engineering204 Mechanical Engineering BuildingUniversity of ArkansasFayetteville, AR 72701-1201Phone: 501-575-6561Fax: 501-575-6982e-mail: [email protected]

* Contact Author

Abstract

CVD diamond (CVDD) substrates offer an outstanding solution for various advanced electronic packaging applications such as highpower 3-D MCM

S, laser diodes, and high power MOSFETs. In the manufacturing of such substrates, various post-synthesis process-

ing steps, such as polishing, cutting, and metallization, add significantly to the cost of the package. Recently, the authors introduceda planarization-by-filling process to reduce the cost of polishing and increase the ease of manufacturing. The process involvessurface planarization of coarsely-lapped diamond substrates using a filler material such as polyimide, which is regularly used inelectronic packaging industry. In the past, the researchers demonstrated successfully the applicability of this planarization process.In this paper, the authors present Finite Element analysis (FEA) and experimental results of thermal management using polyimideplanarized CVDD substrates, for wirebond and Flip Chip die attachment configurations. Specifically, these results are directed atdetermining the maximum die temperature for various power densities using liquid convection for edge cooling. Also, the paperpresents results of a thermal stress study, using thermal shock, for GaAs laser diodes mounted, using gold-tin hard solder, on a CVDDsubstrate planarized using PI-2610 and 2611 polyimides. It is found that the planarization-by-filling process not only gives an easyand inexpensive solution to the high surface roughness of CVDD, but also adds value to the package by providing a compliant layerbetween the GaAs die and CVDD without sacrificing thermal management performance.

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Key words:

CVD Diamond, Thermal Management, Planarization, ThermalStress, and Laser Diodes.

1. Introduction

CVD diamond (CVDD) is a candidate material for electronicpackaging due to its exceptionally good thermal, mechanical,and electrical properties1-3. It can be used as a substrate materialfor packaging of high power MOSFETs, 3-D MCMs, and laserdiodes. For example, advancements in the field of opto-electron-ics have resulted in generation of high power diode lasers withcontinuous wave output ranging from 10W up to 60W. Theseproducts are being used in various fields, such as space commu-nication, material processing, and medical electronics, amongother applications4-6. Such devices demand efficient thermalmanagement since their performance, optical emission charac-teristics, decreases drastically with increasing chip temperature7-15.

Typically, as-grown CVDD substrates have a very high sur-face roughness due to preferred columnar growth, along withrandomly arranged poly-crystalline structure and also it has highhardness. The surface roughness limits its immediate applicabil-ity as a packaging substrate for example, diamond’s high surfaceroughness (R

a > 20-50 µm). Thus, planarization of CVDD is

necessary if the material is to be used in electronic packaging.Planarization involves either subtractive methods, such as lap-ping and polishing, or additive methods, such as filling withover-layers of polyimide or metal, or a combination of the two.Achieving an extremely smooth diamond substrate surface us-ing conventional lapping polishing process is a very expensiveand time-consuming step.

Also, the coefficient of thermal expansion of diamond canpose challenge for die attachment, in particularly while usinghard solders. For example, in the case of laser diode packaging,the CTE mismatch between diamond (0.8-1.2 ppm/°C) and GaAs(5.6-5.8 ppm/°C) leads to an unstable mechanical interface7,15.Nevertheless, due to the tremendous thermal management ben-efits offered by diamond along with continuously dropping costof it, efforts continue to be directed at finding solutions to theprocessing challenges presented by CVD diamond to electronicpackaging applications16.

In the past, the authors have successfully demonstrated theconcept of diamond substrate planarization-by-filling usingpolyimide. In this paper, they present results of a parametricthermal management study on such substrates under variousambient conditions. Finite Element analysis (FEA) was performedto predict maximum chip temperature when polyimide planarizedCVD diamond is used as a substrate. Experiments were per-formed to validate the FEA findings. For a thermal stress study,GaAs laser diode dice were attached to polyimide planarized

CVDD substrates using Au-Sn hard solder. The samples werethen subjected to several thermal shock cycles and examined fordie/substrate delamination and substrate and/or die cracking.

2. Finite Element Analysis (FEA)

A FEA model, using ANSYS (version 5.3) was constructedto predict maximum chip temperature for polyimide planarizedas well as unplanarized CVDD as a substrate material. Thesestudies were performed on combination of following packagingparameters;

• Wirebond and Flip Chip dice,• Edge cooled and planarized/unplanarized CVDD substrate,• for studying and optimizing this edge-cooled CVDD based

electronic software.

2.2. Cooling Setup

In determining the proper cooling setup for this work, manymethods were considered. For a target power density of 40W/cm2, natural air convection is inadequate. Hence, a decision wasmade to use a combination of natural air and forced liquid cool-ing. An edge cooling test fixture with an “L” shape was de-signed to cool the CVD diamond substrate. A channel for liquidcoolant was placed 3 mm from the point where the CVD dia-mond substrate attaches to the fixture using thermally conduct-ing epoxy (‘Ablebond’). A FEA model was constructed for study-ing and optimizing this edge-cooled setup using ANSYS (ver-sion 5.3) software.

Once the model was constructed and meshed, the heat fluxand convection coefficients were applied. Heat flux was appliedto the top surface of the chip in the case of a wirebonded die.Cooling convection was applied to the inner surface of the liquidchannel, and free natural convection was applied to all otherexternal surfaces17. Parameters, such as heat flux and convec-tion coefficient, were varied and the steady-state temperature ofthe chip was obtained. In order to decrease the time for each runand minimize the cumulative error, the model for the edge-cooledsetup was reduced to an equivalent model. In reducing the fullmodel to an equivalent model, one cannot reduce the elementcount in the FEA model for an edge- cooling setup by modifyingnodes near the die, epoxy, planarization layer, or the substratesince it drastically affects the performance of the model. Also,the element count in the cooling block cannot be reduced sincethis also modifies the heat flow mechanism through the heat sink.It should be noted that fins, although they are very important forcooling, do not take part in convection cooling at low coolingtemperatures and high coolant flow. Therefore, if the fins arereduced in such a way that they form an equivalent representa-tion in each section of the heat sink, the problem can be solvedmuch more efficiently. The idea is to simulate the full setup withfins for the highest power dissipation conditions and then elimi-nate the fins in a systematic way, keeping only one fin per side

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and applying an equivalent convection (number of fins timesnatural convection coefficient) to achieve the same result. Themost challenging condition is when no liquid convection is ap-plied and the maximum heat flux is generated. In these experi-ments, the heater chip, “PST-2” (Flip Chip Technologies), wasoperated at 10 W of total power, or 40W/cm2.

The parameter, maximum chip temperature, was evaluatedfor a full model and the result was used as a benchmark. Itsvalue is around 169.391°C. Fine-tuning of the model with stra-tegic placement of fins yielded a maximum chip temperature of169.4 °C. This value is approximately equal to that of the fullmodel, and hence, the reduced model can be considered as athermal equivalent (Figure 1).

Figure 1. Equivalent reduced model.

2.2. Parameter variation

Parameters, such as chip power (power density), cooling con-vection coefficient, and cooling temperature, were varied. Thecooling convection coefficient was varied from 100 W/m2 K to1000 W/m2 K in steps of 100. This range covers low convection(100 W/m2K), medium convection (200-400 W/m2K), high con-vection (500-700 W/m2K), and very high convection (»1000 W/m2K). The cooling temperature were varied from 0°C to 25°C insteps of 5°C, and the power was varied from 10 W/cm2 to 40 W/cm2 in steps of 10 W/cm2.

2.3. Transient analysis

To obtain the transient response of the model initially, fullconvection of 250 W/m2K at 10°C was applied to the surface ofthe liquid cooling channel, which was modeled and meshed likea solid. Natural air convection was applied to the rest of theexternal area. After a sufficient delay time to ensure that steady-state conditions were reached, the convection coefficient was re-duced to zero and the simulation was allowed to continue. Therate of temperature rise was noted and the time required to reach

the maximum allowed limit of 100°C was calculated from thegraph (Figure 2). This information provides the maximum safeshutdown time for the testing system in the event of that thecooling system fails.

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3. Experimental Work

CVDD substrates from Norton Diamond Film (Northboro,Massachusetts), having a thermal conductivity of 1000 W/m×K,were used for the experiments. The diamond substrates werelapped and polished to a final surface roughness (Ra) of the or-der of 0.2 µm. However, surface pits in CVDD can create seri-ous problems during photolithography and metallization pro-cesses18. Therefore, it is important to fill these pits in CVDD andplanarize it. The authors have successfully demonstratedplanarization of CVDD using polyimide19,20. The same proce-dure was applied to planarize the CVDD used in this work.DuPont polyimides 2610 and 2611 were used to planarize thesubstrates by spin coating 7µm thick layer of polyimide onto them.The process produces excellent planarization of the CVDD sur-face without adhesion, blistering, or cracking problems. Theprocess is discussed in detail elsewhere20. Figure 3(a) shows typi-cal microcavities (or surface pits) in unplanarized CVDD. Fig-ure 3(b) shows CVDD after planarization with polyimide.

Heater test dice were attached and wirebonded to bothplanarized and unplanarized CVDD substrates. Following dieattachment and wirebonding, the edges of the substrate were in-serted, following coating with “Ablebond” thermal grease, into a1mm wide, machined seat in the edge-cooled fixture, for experi-mental evaluation. Liquid cooling was provided. Once the test-ing setup was complete, electrical power was provided to thechip. The maximum temperature of the chip for various inputpowers and cooling conditions was measured by placing thermo-couples (J type) at various positions, including one right on thetop of the chip. The coolant (water) temperatures at the sump,inlet, and outlet were measured with a thick K-type thermocouple.

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The temperature measurement was also performed using a diodechain on the heater die and an IR camera in order to confirm theaccuracy of thermocouple temperature measurements at variouslocations on the chip and substrate21.

Figure 3a. Unplanarized CVDD (Ra = 10µm).

Figure 3b. Planarized CVDD (Ra = 4.9µm).

4. Results and Discussion

Thermal modeling of the edge-cooled test structures forunplanarized and planarized wirebond setups were performed.

Simulations were performed for five different coolant tempera-tures (0°C to 25°C), ten different cooling convection coefficients(100 W/m2K to 1000 W/m2K), and for four different power lev-els (10 W/cm2 to 40 W/cm2). Graphs for the experimental re-sults were obtained for each setup using the diode chain voltageof the heater chips to calculate the temperature using the correla-tion equation obtained from the calibration. From the tempera-ture graph, R

thermal for each case was calculated using the back-

ward difference method.

4.1. FEA Results

4.1.1. Edge-Cooled Unplanarized CVD Diamond inWirebond Configuration

Figure 4 shows that, for power dissipation of 10 W/cm2 athigh convection rates (500 W/m2.°C), and room temperature(25°C), the chip temperature is between 50-60°C. This can befurther reduced either by increasing the convection coefficient(using a high capacity pump) or reducing the cooling tempera-ture (using a chiller). For power dissipation of 40 W/cm2, thechip temperature is about 120°C. The surface plots, shown inFigure 4(a) and 4(b), indicate that there are two modes of heattransfer. At higher levels of convection and lower coolant tem-peratures, the heat transfer is essentially by liquid convection,and hence, the slope is low. For low convection and higher cool-ant temperatures, free convection is dominant. Hence, the slopeis higher.

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4.1.2. Edge-Cooled Planarized CVD Diamond inWirebond Configuration

Figure 5 shows the effect of planarization on maximum chiptemperature. At lower power of 10 W/cm2, for any value of con-vection coefficient, the difference in maximum chip temperaturefor unplanarized and planarized substrates is only about 15°C.This shows that 7µm layer of polyimide does not present a majorthermal barrier. At higher power density, this difference increases.However, the increase can be easily compensated either by re-ducing the thickness of the over layer or by substituting it withhigh thermal conductivity material, such as diamond-filled poly-mer or metal.

Figure 5. FEA results of edge cooled planarized CVDDwith wirebonded chip for power densities, (a) 10 W/cm2,and (b) 40 W/cm2.

4.1.3. Edge-Cooled Unplanarized CVD Diamond inFlip Chip Configuration

Similar to wirebond die attach, Flip Chip die attachment caseshows two modes of heat transfer. At higher level of convection(500 W/m2.°C), and lower coolant temperature liquid convec-tion is dominant, while free convection is dominant at lower con-vection rates (100 W/m2.oC) and higher coolant temperature.Figure 6 shows maximum chip temperature at power density level

of 10 W/cm2 and 40W/cm2 for various convection rates and cool-ant temperatures.

Figure 6. FEA results of edge cooled unplanarized CVDDwith Flip Chip die for power densities, (a) 10 W/cm2 and,(b) 40 W/cm2.

4.1.4. Edge-cooled planarized CVD diamond in FlipChip configuration

The simulation results for edge cooled setup with planarizedCVD diamond in Flip Chip configuration are shown in Figure 7.Similar to wirebond case, at lower power of 10 W/cm2, for anyvalue of convection coefficient, the difference for unplanarizedand planarized substrates is only about 15°C.

Convection Co-eff W/m2°C

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Figure 7. FEA results of edge cooled planarized CVDDwith Flip Chip die for power densities, (a) 10 W/cm2 (b) 40W/cm2.

4.2. Experimental Results

4.2.1. Edge-Cooled Unplanarized CVD Diamond inWirebond Configuration

Figure 8(a) shows the effect of varying convection forunplanarized (U), wirebonded (W) test structures at 25oC. Theconvection rates used are 3 GPH, 6 GPH, and 12 GPH. There isno marked difference in maximum chip temperature for any varia-tion in cooling convection. This implies that the liquid convec-tion is the maximum at all levels. It is also seen that the slope atthe lower power density levels (<15 W/cm2) is small and at thehigher power density levels is high. This is primarily due to thefact that at these power density levels, heat dissipation is moredependent on free air convection. The graph in Figure 8(b) showsthe effect of reducing the coolant temperature to 5°C forunplanarized wirebonded die at a convection of 12GPH. At lowerpower density levels (<15 W/cm2), the reduction in maximum isalmost equal to the reduction in coolant temperature, which isexpected. This shows that the heat dissipation is more depen-dent on free air convection at higher power density levels, and

less affected by a reduction in coolant temperature. The averagethermal resistance21 (R

thermal) is 3.48°C/W.

Figure 8. Experimental results of edge cooled unplanarizedCVDD with wirebonded chip for (a) various coolingconvection rates at coolant temperature of 25°C, and (b)reduced coolant temperature of 5°C.

4.2.2. Edge-Cooled Planarized CVD Diamond inWirebond Configuration

The experimental results prove the FEA findings for planarizedsubstrates. It is seen that there is very little effect due to varia-tions in the flow of liquid (Figure 9(a)). The curve exhibits aslope change similar to what is observed for unplanarized sub-strates. Reducing the coolant temperature yields an almost pro-portional reduction in the maximum temperature as can be seenin Figure 9(b). The thermal resistance was calculated and theaverage R

thermal is about 3.566°C/W with a standard deviation of

0.73421. This is very close to that of the unplanarized case (3.44°C/W).

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Figure 9. Experimental results of edge cooled planarizedCVDD with wirebonded chip for (a) various coolingconvection rates at coolant temperature of 25°C, and (b)reduced coolant temperature of 5°C.

4.2.3 Edge-cooled unplanarized CVD diamond in flip-chip configuration

Experimental results on the effect of varying convection andreduced coolant temperatures are shown in Figure 10. Experi-mental results are very close to FEA results except for higherpower results (>20W/cm2). As shown in Figure 10(a) maximumtemperature varies with cooling convection. Reduction in cool-ing temperature reduces the chip temperature proportionally asshown in Figure 10(b). The thermal resistance was calculatedand the average R

thermal is about 4.27°C/W with a standard devia-

tion of 1.6721. This value is about 24% more than the wirebondedcase. This is due to the fact that thermal management in thisconfiguration depends fully on the liquid convection and is in-sensitive to free convection. This means that a better underfillwould be required for better thermal management of Flip Chip.

Figure 10. Experimental results of edge cooled unplanarizedCVDD with Flip Chip for (a) various cooling convection ratesat coolant temperature of 25°C, and (b) reduced coolanttemperature of 5°C.

4.2.4 Edge-Cooled Planarized CVD Diamond in FlipChip Configuration

Figure 11 shows effect of varying convection and reduced tem-perature on maximum chip temperature in the case of planarizedFlip Chip configuration. Unlike unplanarized Flip Chip con-figuration, experimental results on planarized ones show no in-fluence of variation in cooling convection on maximum chip tem-perature. The average thermal resistance for this configurationwas found to be 5.3867 oC/W, with standard deviation21 of 1.216.This increase as compared to unplanarized Flip Chip configura-tion is mainly due to inefficient heat transfer through the under-fill and also due to addition of planarization layer.

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Figure 11. Experimental results of edge cooled planarizedCVDD with Flip Chip for (a) various cooling convection ratesat coolant temperature of 25°C, and (b) reduced coolanttemperature of 5°C.

5. Laser Diode Attachment toPlanarized CVDD

Although soft solders like In-Pb can be used to provide com-pliance between GaAs and CVDD, for important reasons suchas high mechanical reliability, better creep resistance of the dieattach, and high thermal conductivity of hard solders like Au-Snare preferred. The attachment of GaAs die to a diamond surfaceusing hard solders is one of the major challenges to the routineuse of diamond in the packaging industry. One of the objectivesof this work was to experimentally determine if a polyimideplanarization layer provides any compliance for a GaAs die at-tached to CVDD. Experiments were conducted by attachinglaser diode bars from Coherent Semiconductor Inc. (Santa Clara)to diamond substrates using Au-Sn (80-20) hard solder. Laserdiode bars were attached to unplanarized as well as planarized,

CVDD substrates. These bars have 19 emitters and operate at apower density of 400 W/cm2. The samples were visually andSEM (Hitachi) inspected and subjected to thermal shock testingto obtain initial results on GaAs to diamond adhesion reliability.Thin strips of gold solder dispersed in 90% flux were placed onthe substrates and the dice were placed on them. The sampleswere then subjected to reflow at 365°C in an IR oven under ni-trogen ambient. The samples were then inspected with an opticalmicroscope and a SEM. Immediately following the reflow at365 °C, the laser bar on the unplanarized diamond substrate de-tached from the substrate by breaking away from the die attachinterface, whereas, the die on the planarized substrate was intact(see Figure 12). The planarized die, which survived the 365 °Creflow, was then subjected to a thermal shock test (-55oC to 120oC).The GaAs sample was observed for micro-cracks after each in-terval of five thermal shocks. At the end of fifteen cycle, a largenumber of microcracks on the die surface, along the die thick-ness, and even in the solder layer were observed (see Figure 13).However, the die did not detach from the diamond substrate. Theprocess was repeated to test for failure reproducibility. The re-searchers believe that the curvature in the detached die, and thedetachment event, are the signatures for major interfacial stressdue to a CTE mismatch. Further, the die remained intact on theplanarized substrates due to the compliance (CTE of polyimideis ~3 ppm /oC) provided by the polyimide layer. Further work isbeing conducted on this subject at the present time.

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Figure 12. GaAs diode bars after 365°C reflow, on planarized(top) and unplanarized (bottom) CVDD substrates. Bent diewith a new flat die for comparison (right).

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Figure 13. GaAs diode bar on planarized CVDD; beforethermal shock (top) and after 15 thermal shocks (bottom).

6. Summary and Conclusions

The results of thermal analysis show that a 7µm thickpolyimide planarization layer on a diamond substrate does notcreate a significant thermal barrier. It increases the maximumchip temperature by 15°C at lower power level of 10 W/cm2 com-pared to unplanarized substrates in wirebond as well as Flip Chipconfiguration.

Initial results on GaAs die attached to planarized CVDD us-ing Au-Sn hard solder show that the GaAs dice can successfullywithstand a 365oC solder reflow and up to fifteen thermal shocksbefore microcracks appear on the die surface. These results dem-onstrate that high power electronic packaging applications, suchas packaging of laser diodes, can be realized with CVDD sub-strates, which have been planarized using polyimide as a fillermaterial. The planarization-by-filling process not only gives aneasy and inexpensive solution to the high surface roughness ofCVDD, but also adds value to the package by providing a com-pliant layer between the GaAs die and CVDD without sacrific-ing thermal management performance.

7. Future Directions

The studies carried out in this work show that it is possible toachieve good thermal management and reduced stress, usingpolyimide planarized CVDD. In the future, findings of this workcan be directly applied to packaging of higher power laser diodeapplications. This needs, however, more research on finding fillermaterial like polyimide which have higher thermal conductivityand at the same time provide compliant layer to allow hard sol-der die attachment on CVDD.

Acknowledgment

The authors express their sincere appreciation to the DefenseAdvanced Research Projects Agency (DARPA) for its support tothis work. Authors also acknowledge Dr. John Nightingale (Co-herent Semiconductor Inc.) for providing GaAs laser diode barsfor the experimentation.

References

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About the authors

Sushila Singh received her Ph.D. Degree from the Depart-ment of Electronic Science, University of Poona, Pune, India, in1996. After Ph.D., she worked as a Project Associate for Opto-electronics, a Division of the Society for Applied Microwave Elec-tronics Engineering Research (SAMEER), Department of Elec-tronics, Government of India. Presently, she is a Visiting Re-search Assistant Professor at the Department of Mechanical En-gineering, University of Arkansas, Fayetteville, Arkansas. Herthree distinct fields of research interest are electronic packagingof MEMS, optical interconnects for electronic packaging, and

optoelectronic devices for communication and computation. Shehas authored over 20 publications. She is a member of IMAPS.

Arun Krishnamoorthy earned his B.S. Degree in Electronicsand Communication Engineering from Bhopal University,Bhopal, India. He worked for 10 years in R&D of a state ownedthermal power utility developing new circuit designs for thermalcontrol equipment and for high performance distributed digitalcontrolled data acquisition systems. Contented with working onboard level design, Mr. Krishnamoorthy moved to Arkansas,United States, to pursue chip and package level design techniquesfor thermal management. In August 1999, he earned his M.S.Degree in Electrical Engineering from University of Arkansas.His graduate work at HiDEC (High Density Electronic Center,University of Arkansas) was mainly on thermal control and pack-aging strategies for electronic packages on CVD Diamond sub-strates. Arun is currently a product engineer with Intel Corpora-tion, Oregon and involved in thermal characterization of highperformance microprocessors, enabling dynamic thermal con-trol solutions and verification of thermal profiles during and af-ter tests through various contact and non-contact mechanisms.

Ajay P. Malshe, Ph.D. (1992), is an Assistant Professor at theDepartment of Mechanical Engineering and an adjunct facultyat the High Density Electronics Center (HiDEC), Department ofElectrical Engineering, University of Arkansas, Fayetteville,Arkansas. His background is materials science and engineering,and has authored more than 70 publications and holds three pat-ents. His two distinct fields of research interest are electronicpackaging, and materials and manufacturing. The electronicpackaging related subjects of his interest are nano and microsystems packaging and integration, and high-density electronicspackaging. He is active in IMAPS, ASME, and other relatedprofessional societies.

H. A. Naseem is currently a Profes-sor of Electrical Engineering at the Uni-versity of Arkansas, Fayetteville. Hejoined the University in 1985 as an As-sistant professor. He was promoted tothe rank of Associate Professor in 1990and Full Professor in 1995. He estab-lished Arkansas Advanced Photovolta-ics Research Center at the University andwas among the key faculty involved inthe establishment of the High Density

Electronics Center (HiDEC). Dr. Naseem received his B.Sc. (Hon.School) and M.Sc. (Hons. School) Degrees in Physics from thePanjab University, Chandigarh, India. He received his M.S.Degree (Physics) and Ph.D. (Materials Engineering Science) fromVirginia Polytechnic Insitute and State University, Blacksburg,in 1980 and 1984, respectively. He worked as a PostdoctoralResearch Associate at Southern Methodist University, Dallas in1984-85.

Dr. Naseem has received numerous teaching and research

Thermal Management Using Planarized CVD-Diamond Substrates

The International Journal of Microcircuits and Electronic Packaging, Volume 23, Number1, First Quarter 2000 (ISSN 1063-1674)

© International Microelectronics And Packaging Society 109

awards including Texas Instruments Outstanding Faculty Award,Philips Petroleum Company Outstanding Researcher Award andArkansas Academy of Electrical Engineering OutstandingTeacher Award. He has been a state and national merit scholar-ship holder throughout his college and university tenure. Hewas awarded University Grants Commission and Council of Sci-entific and Industrial Research fellowships to pursue post-gradu-ate research in India. He has published over 100 research papersin refereed journals and proceedings. He has also given numer-ous invited papers at national and international conferences. Hehas been issued three patents by the U.S. Patent Office, and sev-eral are pending.

William D. Brown received the B.S.Degree in Electrical Engineering fromthe University of Arkansas, Fayetteville,in 1969, the M.S. Degree from Penn-sylvania State University, UniversityPark, in 1970; and the Ph.D. Degreefrom the University of New Mexico,Albuquerque, in 1975. From 1969 to1977, he was a Member of the Techni-cal Staff at Sandia National Laborato-ries in Albuquerque, New Mexico. In

1977, he joined the faculty of the Electrical Engineering Depart-ment at the University of Arkansas where he presently holds therank of University Professor and serves as the Associate Dean forResearch in the College of Engineering. His research interestsinclude microelectronic materials and devices, and solid-stateand semiconductor physics. Dr. Brown’s research has resulted inover 200 technical journal/proceedings publications and 6 U.S.patents. He has contributed to the book, Electronic Manufactur-ing Processes published by Prentice Hall, and has contributed toand edited the books Nonvolatile Semiconductor Memory Tech-nology and Advanced Electronic Packaging: With Emphasis OnMultichip Modules, both published by the IEEE PRESS. Hepresently serves on the Board of Directors of the National Elec-trical Engineering Department Heads Association (NEEDHA)and the Executive Committee of the Board of Directors of theElectrochemical Society. He is a registered Professional Engi-neer in the State of Arkansas and holds memberships in IEEE,IMAPS, ECS, MRS, AVS, the Arkansas Academy of Science,