The Theory and Application of Surface Plasmon

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    The theory and application of

    surface plasmon

    Speaker: Yi-Tsung Chang Ph.D

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    Outline

    Introduction of surface plasmon Fundamental studies of surface plasmon

    Bragg scattering of surface plasmon polaritons on extraordinarytransmission through Al (Ag) film perforated with periodic hole arraysand random distribution hole

    Dispersion of surface plasmon polaritons on Al (Ag) film withhole arrays

    Introduction of plasmonic thermal emitter Infrared thermal emitter

    High performance mid-infrared narrow-band plasmonic thermal emitterTwo color squared-lattice plasmonic thermal emitterThe coupling characteristics between surface plasmon on top andbottom metals of infrared plasmonic thermal emitter

    Conclusions

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    Applications

    Thermal emitter

    QDIP

    LED

    Filter

    Bio-plasmonic Sensitive imaging system

    Waveguide

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    Theory of SP on planar metal

    Dispersion relation of SPsField distribution of SPs

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    Theory of SP on periodic hole structure

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    Theory of SP on periodic holes array

    2/12/1

    22 )(3

    4

    +

    ++=

    md

    mdsp nmnma

    For normally incident light

    aGGyx

    2==

    rr

    (A) Square lat t ice

    (B) Hexagonal lat t ice

    += yx

    aGX

    rr

    r

    2

    1

    2

    3

    3

    4y

    aG

    y

    r

    r

    3

    4=

    2/1

    2/122 )(

    ++=

    md

    mdsp nma

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    Example

    2/12/1

    22

    max )(

    3

    4

    +

    +=

    md

    mdnmnma

    yxxsp GnGmkk =

    1=air

    m16at1069.14 =Al9.11=si

    Momentum conservation law

    For normally incident

    += y2

    1x

    2

    3

    a3

    4GX

    rr

    r

    ya3

    4Gy

    r

    r

    =md

    mdspk

    +=

    air/Al interface

    Al/Si interfaceairAl

    Si

    SPs occurredAs a = 5 m

    air/Al Interface max (1, 0) 4.33 m

    Al/Si interface max (1, 0) 15 m

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    The momentum conservation law of SPs

    Squared holes arrayHexagonal holes array

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    Structure 1 Hexagonally-ordered aluminum holes array

    Top v iew Side view

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    Structure 2 - superperiodic microcell arrays

    (a) (b) (c)

    Top view

    Side view

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    Structure 3 - random distribution of holes

    10 m

    Hole

    Al

    Top view Side view

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    Structure 4 - random distribution of micro-cells

    ( c)

    a = 7 mr = 1 m

    (d)

    Mix

    (b)

    a = 5 mr = 1 m

    (a)

    a = 3 mr = 1 m

    Top view

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    Structure 1 - hexagonally-ordered holes array

    mnmnmamd

    md

    15)(3

    4valuelTheoretica

    2/12/1

    22

    max

    +

    ++=

    Transmission spectra and dispersion relations

    (a) (b)

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    Transmission spectra and dispersion relations

    Structure 1 - hexagonally-ordered holes array

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    Structure 1 - hexagonally-ordered holes array

    (e) ( f )

    Transmission spectra and dispersion relations

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    Al/Si structure square lattice array of large area

    a

    r

    a = 5, 6, 7 m

    r = 2 m

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    Al/Si structure Transmission spectra

    a( m)

    sp

    ( m)

    5 17.3

    6 20.7

    7 24.2

    2/1

    2/122 )(

    +

    +=

    md

    mdsp nma

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    Squared holes array a = 5 m r = 2 m

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    (-1, 0) Ag/Si

    (0, 1) Ag/Si

    (1, 0) Ag/Si

    (-1, 1) Ag/Si

    (1, 1) Ag/Si

    (-1, 0) air/Ag

    Squared holes array a = 6 m r = 2 m

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    Squared holes array a = 7 m r = 2 m

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    Structures 2 superperiodic microcell arrays

    p = 16, 17,1 8 ,19, 20

    and 21 m

    Total: 6 set s

    p = 21, 22, 23 , and 24 m

    Tot al: 4 set s

    Top view

    p = 26, 27, and 28 m

    Tot al: 3 set s

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    Fabry-Perot type waveguide resonancesFabry-Perot Etalon

    Micro-cell array

    T i

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    3X3 micro-cell

    Unit:m

    T: theoretical value; M: experimental value; x: disappear

    Order 3 (p/3) Order 4 (p/4) Order 5 (p/5)3x3 micro-cell

    superperiod T M T M T M

    P = 16 18.4 18.5 13.8 x 11 10.9

    P = 17 19.6 19.8 14.7 14.8 11.7 11.8

    P = 18 20.7 20.6 15.5 15.7 12.4 12.8

    P = 19 21.9 21.8 16.4 16.6 13.1 13.2

    P = 20 23 x 17.3 17.4 13.8 14

    P = 21 24.2 x 18.1 18.2 14.5 14.6

    Top view

    2/1

    2/122' )(

    ++=

    md

    mdsp nma

    a

    = p/d = p/average hole period

    Top view

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    4X4 m icro-cell

    Unit:m

    T: theoretical value; M: experimental value; x: disappear

    Order 4 Order 5 Order 64x4 micro-cell

    superperiod T M T M T M

    P = 21 18.1 18.4 14.5 14.6 12.1 11.4

    P = 22 19 19.3 15.2 15.4 12.7 12

    P = 23 19.8 20 15.9 16 13.2 12.5

    P = 24 20.7 20.6 16.6 16.8 13.8 13

    Top view

    2/1

    2/122' )(

    ++=

    md

    mdsp nma

    a = p/d = p/average hole period

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    5X5 m icro-cell

    Unit:m

    Order 5 Order 6 Order 75x5 micro-

    cellsuperperiod

    T M T M T M

    P = 26 18 18.3 15 14.1 12.8 x

    P = 27 18.6 18.7 15.5 15.7 13.3 13.4

    P = 28 19.3 19.3 16.1 16.2 13.8 13.8

    T: theoretical value; M: experimental value; x: disappear

    2/1

    2/122' )(

    +

    +=

    md

    mdsp nma

    a = p/d = p/average hole period

    Top view

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    Microcell structure with incident light of x-polarized

    kspG

    kx(0,0)

    (0,1)

    (0,-1)

    (1,0)X-polarized

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    Squared lattice

    X-polarized

    (-1,0) Ag/Si

    (1,0) Ag/Si

    (-1, 1) Ag/Si

    (1, 1) Ag/Si

    Un-polarized

    a = 5 m r = 1 m

    Top view

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    Micro-cell

    X-polarized Un-polarized

    a = 5 m r = 1 m

    p = 16 m

    Top view

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    Micro-cell

    SP coupling mode

    X-polarized Un-polarized

    a = 5 m r = 1 m

    p = 17 mTop view

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    Micro-cell

    X-polarized Un-polarized

    a = 5 m r = 1 m

    p = 18 m

    Top view

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    Micro-cell

    X-polarized Un-polarized

    a = 5 m r = 1 m

    p = 19 mTop view

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    Structure 3 - random distributed holes

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    Hole dist r ibut ion and t ransmission spect ra

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    Transmission spectra with

    randomly arranged hole

    S 4

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    3 3

    Side view

    St ructure 4

    What random and mixt ure micro-cell

    Microcell

    16 16

    9 9

    12 12

    (b) a = 5 m r = 1 m

    (D) Mix (a = 3, 5 and 7 m r = 1 m)

    (a) a = 3 m r = 1 m

    (c) a = 7 m r = 1 m

    Top view Top view

    (c)

    (d)

    (b)

    (a)

    St ructure 4

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    (c) (d)

    a = 7 mr = 1 m

    Mix

    (b)(a)

    Top view

    a =3 mr = 1 m

    a = 5 mr = 1 m

    St ructure 4

    random dist ribut ion of micro-cells

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    Transmission spectra of random microcell

    (B)

    a= 5 mr= 1 m

    (C)

    a= 7 mr= 1 m

    (D)Mix

    (A)

    a= 3 mr= 1 m

    47

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    (A)

    a = 3 m r = 1 m

    (B)

    A = 5 m r= 1 m

    (D) Mix

    Transmission spect ra of random microcell

    They can be exploited in wavelength-selective infrared devices.

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    SPP dispersion relations of sample B

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    LED

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    QDIP

    2 4 6 8 10 12-5

    0

    5

    10

    15

    20

    25a=2.1 m, d=1.2 m

    Responsivity(a.u.)

    Wavelength ( m)

    Patterned

    Blank

    6.3

    metal

    QDIP

    95

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    Plasmonic emitter (1)

    Emission spectra of the plasmonic

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    Emission spectra of the plasmonic

    thermal emitter

    Device A, t = 100 nm

    )())(3

    4( 2

    122

    dnjijia ++=

    of SiO2 =1.38

    Hexagonal lattice (a=3 m)

    Ag/air(1,0)=2.6 m

    Ag/SiO2(1,0)=3.6 m

    (1,0)Ag/SiO2

    0.48 m

    (1,0)Ag/air

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    Plasmonic emitter (2)

    Si

    Ag 100 nm

    SiO2Ag 200 nm

    Ti 20nm

    Mo 300nm

    Fig. 1

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    Plasmonic emitter (3)

    0 5 10 15 20 250.0

    0.2

    0.4

    0.6

    0.8

    1.0

    1.2

    (1,0)

    air/Ag

    (1,0)

    Ag/SiO2

    SiO2

    Emittanc

    e(a.u.)

    Wavelength ( m)

    Square lattice a = 3 m L = 1.5 m

    Temperature (0C)

    80

    120

    180

    240

    300

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    Summary

    Hexagonal structure

    { It has been demonstrated that the transmission peak splitsinto two, and this effect is most obvious when the diameter

    of the hole is close to half of the lattice constant.

    { The symmetry of the fabricated hexagonal structure isextremely good as transmission peak positions do move asthe sample is rotated around the incident light.

    { At larger incident angles, the six degenerate (1,0) Al/Sisurface plasmon modes split into four or three modesdepending on the symmetry axis.

    { The plasmon dispersion relations - especially those of thehigher order modes are established.

    { As the hole size becomes smaller, higher order SP modestend to appear, thus yielding the complete dispersionrelation between Al and Si surface plasmon polaritons.

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    Superperiodic microcell

    { Fabry-Perot type waveguide resonances on Ag film withperforated short-range (where is the number of isolated holes, =3, 4 and 5) hole array arranged in long-range periodic structure,and the dispersion relations of SPP of superperiodic micro-cellarrays have been observed with light of polarized and unpolarized.

    { When the distance between adjacent micro-cells is changed, the(1,0) Ag/Si SP modes of Fabry-Perot type in integer order of asuper-periodic structure are discovered.

    { When the ratio of periodicity between the super structure and themicro-cell increases from 3 to 6, the intensities of the lower orderSP modes gradually declines to zero, simultaneously the higherorder SP modes gradually increases, respectively. This suggeststhat only SP modes with integer value close to the periodicity ratioof super/micro-cell can exist in the super-periodic structure.

    Summary

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    Random distribution hole

    {

    It has been demonstrated that the metallic holes with randomdistribution show primary enhanced transmission peaks that arerelated to the 1st nearest neighbor distance in a cluster of disorderedholes. The FWHM of the transmission peak is dependent on the holesize and the number of near neighbor holes. It is broadened when the

    hole size increases and the number of neighboring holes decreases.

    Random microcell

    { It has been demonstrated that the periodicity of sub-wavelength holesin a random arrangements of micro-cell arrays determines the peakwavelength of the transmission spectrum. The multiple samples allowmulti-peak transmission when micro-cells with different latticeconstants are added, transmitting multicolored light, which can beexploited in wavelength-selective infrared devices.

    Summary

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    Summary

    Good match between experiment and theoreticalvalues represents that when SiO2 layer is thin,strong coupling of SPPs causes neffincrease.

    When the central SiO2 layer of the sandwiched

    structure is flat without holes, the emissionspectrum is narrower than that of the perforatedone.

    Thermal radiation generated in SiO2 layer induced

    both top and bottom surface plasmons, the topperiodic metal film acts as a filter.

    While the SiO2 layer is thick, cavity modedetermined by waveguide thickness appears on the

    emission spectra.

    Plasmonic thermal emitter

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    Thanks for your attention