8/7/2019 The design examples illustrate the practical performace of his design methodology

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The design examples illustrate the practical performace of his design methodology.

Glass cost control is applied to a night scope objective.

Sensitivity control is applied to a night scope objective, a compact zoom lens, and an

Arf lithography lens.

Prototyping of zoom lens is applied to a compact zoom lens. Design with aspheric surfaces is shown for a compact zoom lens and an Arf

lithography lens.

Ghost control is applied to a sensor lens.

Glass cost control for night scope objective

For the control of the chromatic aberration over a wide range of wavelength, abnormal

dispersion glasses are effective. With the accurate glass model including the abnormal

dispersion, the good combination of glasses is automatically found by the global optimization.

When the glasses are used as design parameters, the fictitious glasses tend to reach the

boundary of the allowed region. Such a solution is not practical because glasses are very

expensive at the boundary. The glass cost can be controlled as a design target. With this

function the low cost glasses are effectively selected.

Design conditions: F1.4, field angle 6deg., f =100mm, total lens length 200mm, wavelength

450-950nm.

Calculation time: global optimization 48 min. (40 solutions), MTF optimization 9 min. (28

solutions).

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8/7/2019 The design examples illustrate the practical performace of his design methodology

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Compact zoom lens with aspherics

The global optimization with escape function is also effective for the zoom lens and aspherics.

The target of this example is the design of a high quality compact zoom lens with the zoom

range of f =28-103mm.

For this problem 2 group zoom system is used and 2 aspherical elements are used. Thestarting point of the optimization was generated by the prototyping method. In this design the

position of aspherical elements is extended to continuous variables and the best position of

aspherical elements is determined by the global optimization. The sensitivity to surface

irregularity of aspheric surfaces is controlled.

Design conditions: f =28-103mm, F3.7-9.1, length from 1st surface to image surface

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Sensitivity control for ArF lithography lens

The sensitivity control is also effective for high NA lenses. Many aspheric surfaces are used

for modern lithography lenses. In this design the position of aspheric surfaces is extended to

continuous variables and the best position of aspheric surfaces is determined by the global

optimization.

Design conditions: NA=0.85, image size 27.7mm, magnification -1/4, total track 1250mm,

wave length 193.306nm.

Calculation time: global optimization 1183 min. (10 solutions), MTF optimization 53 min.

(3 solutions).

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Ghost control for sensor lens

The ghost image is detected systematic in a very short time. The problematic ghost image is

controlled during the optimization.

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Design conditions: FNO=2.0, tangent of the field of view =0.25, focal length 50mm, overall

length