Test station for ALICE pixel chip Confidential Information COMMENT by Y. Kwon Strategy : make sure...
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![Page 1: Test station for ALICE pixel chip Confidential Information COMMENT by Y. Kwon Strategy : make sure commitment can be achieved before main commitment to.](https://reader035.fdocuments.us/reader035/viewer/2022070410/56649ecf5503460f94bdd6f0/html5/thumbnails/1.jpg)
Test station for ALICE pixel chip
COMMENT by Y. Kwon
• Strategy : make sure commitment can be achieved before main commitment to company (= offering conditional purchase).
• Chip test can be achieved with 50 laterally, 50 overdrive vertically.
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Test station for ALICE pixel chip
COMMENT by Y. Kwon
• Mechanically achievable accuracy better than 30 .
• Current vision & robot accuracy within 30 , z < 30 (at max).
• For target accuracy ( 5 , z < 5 ), new vision and robot is needed (claim by EC3).
Note) Numbers quoted here are not Gaussian or FWHM resolution, but any smearing fits within the ranges.
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Test station for ALICE pixel chip
COMMENT by Y. Kwon
• Do we really want to go to the final specification?• Use current version? Cheaper & ready for chip
test (~1-2 month).• Conditional order? ~120 kCHF
Note) Two WorldSkills medalists in EC3. WorldSkills is an international skills competition for youth ( 기능올림픽 / 國際技能 - 大會 ).
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Test station for ALICE pixel chip
EC3 R&D Division
June.2015
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Test station for ALICE pixel chip5
https://drive.google.com/file/d/0B6EVlprPvkkUcjdnYUNrcm5zdkE/view?usp=sharing
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Test station for ALICE pixel chip
1. Concept
2. Status
3. Plan
Contents
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Test station for ALICE pixel chip7
Pick & place scheme
X axis robot
Y axis robot
Z1 axis robot
Z2 axis robot(Probe contact)
Stone plate
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Test station for ALICE pixel chip
Z2
Top view
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X Y
θZ1
V
350mm 300mm
Stroke 800 mm
Stroke 450 mm
300mm
350 mm
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Test station for ALICE pixel chip
Z2
Side view
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P&P head: θ + Vision
10kg less
θ
700mm
50mm
Stone plate 100~150mm
Stroke 350 mmStroke 100 mm
V
Test box
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Test station for ALICE pixel chip
Test box
10
30mm
100~150mm
Test box
Stone plate
310mm
350mm
340mm
Level adjust bolt
Fixed bolt 300mm
340mm
Crystal chuck
Vacuum line
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Test station for ALICE pixel chip
Detail
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Vacuum chuck
Vacuum pass line
15.2mm
30.2mm
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Test station for ALICE pixel chip
Chip tray
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Tray for 20x10 chips
15.2mm 2mm
2mm
30.2mm
350mm
350mm
4mm
1. Tray material: Teflon coated metal
2. Hole depth: 150~200 ㎛
3. 20 by 10 array: Total 200 chips
4. 1chip 3min: 1 tray 10 hours
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Test station for ALICE pixel chip
Probe card
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114mm
141mm
Needles
<90mm
101mm
Cable
Connector
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Test station for ALICE pixel chip
Target spec
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No Model No. Description Accuracy Unit Remark
1 - Motion movement for repeatability ±5 µm X,Y,Z1,Z2
2Rotation movement for repeatability
±0.01 deg Θ
3 Transfer accuracy ±10 µm Target goal
4 Surface flatness ±20 µm -
5 Vision camera accuracy ±5 µm Target goal
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Test station for ALICE pixel chip
1. Mechanical alignment ±30 ㎛ (X, Y).
2. Space between sensor and grip 30 ㎛ at
pick up & place (Vacuum grip).
3. Improvement in mechanics and vision in
progress (High performance robot and
vision device will make it).
4. A detailed plan exists.
Current status
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Test station for ALICE pixel chip16
Pick & place
Y axis movement X axis movement
Z axis movement
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Test station for ALICE pixel chip17
Robot mechanics
NoModel
No.Description Accuracy Unit Remark
1 - Motion movement for repeatability ±25 µm X,Y,Z
2 Rotation movement for repeatability ±0.1 deg Θ
3 Transfer accuracy ±30 µmWith vision
Measure accuracy
4 Surface flatness ±30 µmTray edge to chuck center
5 Vision camera measure accuracy ±5 µmContinuous
measure
Crystal chuckTray
X axis gantry robot
Y axis cartesian robot
Z axis cartesian robot
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Test station for ALICE pixel chip18
Vision measurement
Before measurement After measurement
End compensation
1. After measurement X, Y distance- X axis : + direction, 1680 micron- Y axis : - direction, 2537 micron
2. End compensation X, Y distance- X axis : + direction, 1 micron- Y axis : no direction, 0 micron
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Test station for ALICE pixel chip19
P&P head implementation
Theta angle adjust
Tension adjust
Vacuum grip
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Test station for ALICE pixel chip20
P&P vacuum grip
Material : Teflon
Vacuum hole
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Test station for ALICE pixel chip21
Crystal chuck
Material : Quartz
Vacuum line
Air blow line
30.05 + (2 x 0.03) mm
15.05 + (2 x 0.03) mm
Shallow hole(sensor slot)
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Test station for ALICE pixel chip22
Tray
Material : Teflon-coated metal
30.05 + (2 x 0.03) mm
15.05 + (2 x 0.03) mm
Shallow hole(sensor slot)
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Test station for ALICE pixel chip
Test result
1. Multiple transport into sensor slots in the tray and
the chuck ( 100 times) -> The whole system fits
better than 30 ㎛ .
2. However we believe the achieved level is
the limit of the current vision and robot
system. Proposed upgrade in the next
page is desirable (Main spending is
required).
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Test station for ALICE pixel chip
Desired upgrade
1. Vision system upgrade : 50k CHF
Current equipment
Fact’ Target spec.
Camera CCD 5M pixelFOV : 9 mm
Lens Magnification : 2X, Working distance : 110 mm
Light White ring type lightWorking distance : 20 mm
Measureaccuracy
∂X, ∂Y : ±5 ㎛Θ : ±0.01 degree
Upgrade equipment
Fact’ Target spec.
Camera CCD 2M pixelFOV : 37 mm
Lens Magnification : 1X, Working distance : 250 mm
Light White bar type lightWorking distance : 10 mm
Measureaccuracy
∂X, ∂Y : ±30 ㎛Θ : ±0.1 degree
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Test station for ALICE pixel chip
Desired upgrade
2. Robot system upgrade : 50k CHF
Current equipment Upgrade equipment
Fact’ Target spec.
X axis Gantry type : stroke 1200 ㎜Belt : max speed 1.5m/sMoving accuracy : ±20 ㎛
Y axis Cartesian type : stroke 300 ㎜Ball screw : C7, max speed 0.5 m/s Moving accuracy : ±10 ㎛
Z axis Cartesian type : stroke 100 ㎜Ball screw : C7, max speed 0.5 m/s Moving accuracy : ±10 ㎛
Θ axis Rotary type : stroke 270degreeBelt : max speed 90degree/sMoving accuracy : ±0.1degree
Fact’ Target spec.
X axis Gantry with LM type : stroke 800 ㎜Ball screw : C5, max speed 0.5m/sMoving accuracy : ±5 ㎛
Y axis Cartesian type : stroke 450 ㎜Ball screw : C5, max speed 0.5 m/s Moving accuracy : ±5 ㎛
Z1 axis Cartesian type : stroke 100 ㎜Ball screw : C5, max speed 0.1 m/s Moving accuracy : ±5 ㎛
Θ axis Rotary type : stroke 10degreeBelt : max speed 10degree/sMoving accuracy : ±0.01degree