TCT study of silicon epitaxial and MCZ detectors V. Eremin 1, M. Boscardin 2, M. Bruzzi 3, D....

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TCT study of silicon epitaxial and MCZ detectors V. Eremin 1 , M. Boscardin 2 , M. Bruzzi 3 , D. Creanza 4 , A. Macchiolo 5 , D. Menichelli 3 , C. Piemonte 2 , E. Verbitskaya 1 1. Physico Technical Institute - St.Petersburg, 2. IRST-Trento 3. Dip. Energetica- INFN Firenze 4. Dip. Interateneo Fisica – INFN Bari 5. Dip. Fisica – INFN Firenze CERN, October 16 -18, 2006 V, Eremin … , PTI, RD50, Oct. 2006

Transcript of TCT study of silicon epitaxial and MCZ detectors V. Eremin 1, M. Boscardin 2, M. Bruzzi 3, D....

TCT study of silicon epitaxial and MCZ detectors

V. Eremin1, M. Boscardin2, M. Bruzzi3, D. Creanza4, A. Macchiolo5, D. Menichelli3, C. Piemonte2, E. Verbitskaya1

1. Physico Technical Institute - St.Petersburg, 2. IRST-Trento3. Dip. Energetica- INFN Firenze4. Dip. Interateneo Fisica – INFN Bari5. Dip. Fisica – INFN Firenze

CERN, October 16 -18, 2006

V, Eremin … , PTI, RD50, Oct. 2006

Outline

1. Samples and experiment

2. Input data for TCT responce treatment

3. TCT response in bulk and epi detectors

4. Electric field reconstruction

5. E(x) in cooled detectors

6. Long term annealing effect

7. Conclusions

V, Eremin … , PTI, RD50, Oct. 2006

Operation effective deep levels in irradiated detectors

Mid gap levels (MGL) – Current generation, space charge introduction

Conductance band

Valence band

Mid-gap acceptor

Mid-gap donor

Parameters of MGL

Both are nearly neutral

Jgen ~ Σ (Nmgl* σ *exp(-Emgl/kT)) ~ F1/Tau ~ Σ Ndl ~ F

MGL1 : donor Et – Ev = 0.48eV σ = 1*10 -15 cm2

MGL2: acceptor Et – Ev = 0.56eV σ = 1*10 -15 cm2

Neff = Σ(NDD+) - Σ(NDA

-)

V, Eremin … , PTI, RD50, Oct. 2006

0.0E+00

1.0E-03

2.0E-03

3.0E-03

4.0E-03

5.0E-03

6.0E-03

7.0E-03

8.0E-03

9.0E-03

1.0E-02

0.E+00 2.E+15 4.E+15 6.E+15 8.E+15 1.E+16 1.E+16

F, n/cm2

Cu

rren

t, A

/cm

2

Generation current in Si PIN detectors

T= 290K

V, Eremin … , PTI, RD50, Oct. 2006

Life time degradation in Si

10 )/1()(

Trapping probability (protons)

te0 1x103

e5.5x103

th0 1x103

h8x103

1.0E-12

1.0E-11

1.0E-10

1.0E-09

1.0E-08

1.0E-07

1.0E-06

1.0E-05

1E+12 1E+13 1E+14 1E+15 1E+16 1E+17 1E+18

Fluence, neutrons/cm2

Tra

pp

ing

tim

e,

s

neutrons, e

neutrons, h

protons, e

protons, h

Parameterization for data of G. Gramburger ….

V, Eremin … , PTI, RD50, Oct. 2006

Samples and technique

V, Eremin … , PTI, RD50, Oct. 2006

MeasurementSample # Material Radiation Fluence eq.n. T, C Time, min T, K

13-SMG-15 epi neutrons 8.50E+14 no 29312-SMG-15 epi neutrons 8.50E+14 80 60 29312-SMG-19 epi neutrons 1.70E+15 80 30 293, 26312-SMG-22 epi protons 80 60 293, 263187-SMG-9 MCZ neutrons 4.20E+14 no 293, 263187-SMG-2 MCZ neutrons 4.20E+14 80 12 293

Annealing

Technique:TCT setup at PTITCT setup response 0.8 nsTemperature range 77 – 373KLaser wavelength 830um

0.0E+00

1.0E-05

2.0E-05

3.0E-05

4.0E-05

5.0E-05

6.0E-05

7.0E-05

8.0E-05

9.0E-05

0 2 4 6 8 10 12 14

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

Detector W13-SMG-15epi, 150um Neutron irradiated: Feq = 8.5 E14 cm-2Annealing: no

Operational parameters:T = 293K

Extracted valuesTau tr = 3nsVfd = 180V

Amax vs. reverse vias

0.0E+00

1.0E-05

2.0E-05

3.0E-05

4.0E-05

5.0E-05

6.0E-05

7.0E-05

8.0E-05

9.0E-05

0 100 200 300

V (Volt)A

max

(mV

)

Collected charge

0.0E+00

2.0E+05

4.0E+05

6.0E+05

8.0E+05

1.0E+06

1.2E+06

1.4E+06

1.6E+06

1.8E+06

2.0E+06

0 100 200 300

Bias, V

Qco

ll, p

airs

series # Vb, V Ir, nA Qc, prs

0 6 -34 1.07E+051 21 -89 3.64E+052 39 -133 5.62E+053 57 -173 7.22E+054 74 -210 8.50E+055 92 -248 9.25E+056 110 -291 1.06E+067 127 -335 1.16E+068 143 -387 1.33E+069 159 -446 1.40E+06

10 173 -517 1.49E+0611 186 -607 1.60E+0612 197 -727 1.67E+0613 203 -882 1.74E+0614 203 -1097 1.71E+0615 196 -1389 1.64E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

TCT data for silicon epi as irradiated detector

V, Eremin … , PTI, RD50, Oct. 2006

Sample parameters Constantsd [cm] 1.50E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 3.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -3.00E+06

Ub [V] 186

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System function

E1, V/cm 2600

W1, cm 0.005Eb, V/cm 2100

Wb, cm 0.01

E2, V/cm -1.77E+20

W2, cm 0

Detector W13-SMG-15epi, 150um Neutron irradiated: Feq = 8.5 E14 cm-2Annealing: no

Operational parameters:V = 186VT = 293K

Extracted valuesTau tr = 3nsVfd = 180V

E(x) reconstruction for silicon epi as irradiated detector

0

20

40

60

80

100

-1 1 3 5 7 9Time, ns

Cu

rre

nt,

mkA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

3.E+4

4.E+4

4.E+4

5.E+4

5.E+4

0 0.002 0.004 0.006 0.008 0.01 0.012 0.014 0.016

x.cm

E,V

/cm

V, Eremin … , PTI, RD50, Oct. 2006

series # Vb, V Ir, nA Qc, prs

0 7 -22 2.04E+051 24 -57 4.06E+052 44 -79 5.65E+053 65 -94 6.65E+054 85 -105 8.41E+055 106 -114 1.08E+066 127 -122 1.24E+067 147 -129 1.43E+068 168 -136 1.51E+069 190 -141 1.64E+06

10 211 -149 1.83E+0611 232 -156 1.87E+0612 253 -167 1.87E+0613 274 -174 1.99E+0614 295 -183 1.97E+0615 316 -193 1.96E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

0.0E+00

2.0E-05

4.0E-05

6.0E-05

8.0E-05

1.0E-04

1.2E-04

0 2 4 6 8 10 12 14

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

TCT data for silicon epi annealed detector

Detector W12-SMG-15epi, 150um Neutron irradiated: Feq = 8.5 E14 cm-2Annealing: 80C@60min

Operational parameters:T = 293K

Extracted valuesVfd = 150V

Collected charge

0.0E+00

5.0E+05

1.0E+06

1.5E+06

2.0E+06

2.5E+06

0 100 200 300 400

Bias, V

Qco

ll, p

air

s

Amax vs. reverse vias

0.0E+00

2.0E-05

4.0E-05

6.0E-05

8.0E-05

1.0E-04

1.2E-04

1.4E-04

0 100 200 300 400

V (Volt)

Am

ax

(m

V)

V, Eremin … , PTI, RD50, Oct. 2006

0

20

40

60

80

0 2 4 6 8 10Time, ns

Cu

rren

t, m

kA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

3.E+4

0 0.002 0.004 0.006 0.008 0.01 0.012 0.014 0.016

x.cm

E,V/

cm

Sample parameters Constantsd [cm] 1.50E-02

Uc[V] 0Neff [1/cm^3] 0.00E+00

tau(e), [s] 3.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.20E+06

Ub [V] 147

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 2000

W1, cm 0Eb, V/cm 2000Wb, cm 0.004E2, V/cm 23272.727W2, cm 0.011

E(x) reconstruction for silicon epi annealed detector

Detector W12-SMG-15MCZ, 150um Neutron irradiated: Feq = 8.5 E14 cm-2Annealing: 80C@60min

Operational parameters:V = 147VT = 293K

Extracted valuesTau tr = 3 nsVfd = 150V

V, Eremin … , PTI, RD50, Oct. 2006

0

20

40

60

80

100

-1 1 3 5 7 9

Time, ns

Cu

rre

nt,

mkA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

3.E+4

4.E+4

4.E+4

5.E+4

5.E+4

0 0.002 0.004 0.006 0.008 0.01 0.012 0.014 0.016

x.cm

E,V/

cm

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.80E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5200

W1, cm 0.0035Eb, V/cm 2200Wb, cm 0.015E2, V/cm 21808.696W2, cm 0.0115

epi, 150um Neutron irradiated: Feq = 8.5 E14 cm-2W13-SMG-15: non annealedW12-SMG-15: annealed 80C@60 min

Operational parameters:T = 293K

Extracted valuesTau tr = 3 ns

Annealing effect in silicon epi detectors

non annealed

annealed 80C@60 min

0

20

40

60

80

0 2 4 6 8 10Time, ns

Cu

rre

nt,

mkA

annealed

non annealed

V, Eremin … , PTI, RD50, Oct. 2006

series # Vb, V Ir, nA Qc, prs

0 7 -22 2.04E+051 24 -57 4.06E+052 44 -79 5.65E+053 65 -94 6.65E+054 85 -105 8.41E+055 106 -114 1.08E+066 127 -122 1.24E+067 147 -129 1.43E+068 168 -136 1.51E+069 190 -141 1.64E+06

10 211 -149 1.83E+0611 232 -156 1.87E+0612 253 -167 1.87E+0613 274 -174 1.99E+0614 295 -183 1.97E+0615 316 -193 1.96E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

TCT data for silicon epi annealed detector

Detector W12-SMG-19epi, 150um Neutron irradiated: Feq = 1.7 E15 cm-2Annealing: 80C@30min

Operational parameters:T = 293K

Extracted valuesTau tr = 1.5 nsVfd = 190V

0.0E+00

2.0E-05

4.0E-05

6.0E-05

8.0E-05

1.0E-04

1.2E-04

1.4E-04

0 5 10 15

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

Collected charge

0.0E+00

2.0E+05

4.0E+05

6.0E+05

8.0E+05

1.0E+06

1.2E+06

1.4E+06

1.6E+06

0 100 200 300

Bias, V

Qc

oll

, p

air

s

0.0E+00

2.0E-05

4.0E-05

6.0E-05

8.0E-05

1.0E-04

1.2E-04

1.4E-04

0 100 200 300

V (Volt)

Am

ax (

mV

)

V, Eremin … , PTI, RD50, Oct. 2006

TCT data for silicon epi annealed and cooled detector

Detector W12-SMG-19-10epi, 150um Neutron irradiated: Feq = 1.7 E15 cm-2Annealing: 80C@30min

Operational parameters:T = 263K

Extracted valuesTAu tr = 1.5 nsVfd = 198V

0.0E+00

2.0E-05

4.0E-05

6.0E-05

8.0E-05

1.0E-04

1.2E-04

1.4E-04

0 2 4 6 8 10 12 14

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

series # Vb, V Ir, nA Qc, prs

0 9 -1 1.11E+051 36 -2 2.79E+052 63 -4 3.26E+053 90 -5 4.22E+054 117 -5 4.84E+055 145 -5 5.85E+056 171 -6 8.23E+057 198 -6 1.01E+068 226 -5 1.11E+069 254 -5 1.20E+06

10 281 -6 1.34E+0611 309 -5 1.40E+0612 336 -5 1.44E+0613 362 -6 1.44E+0614 390 -6 1.49E+0615 418 -5 1.51E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

Amax vs. reverse vias

0.0E+00

2.0E-05

4.0E-05

6.0E-05

8.0E-05

1.0E-04

1.2E-04

1.4E-04

0 100 200 300 400

V (Volt)

Am

ax (

mV

)

Collected charge

0.0E+00

2.0E+05

4.0E+05

6.0E+05

8.0E+05

1.0E+06

1.2E+06

1.4E+06

1.6E+06

0 100 200 300 400 500

Bias, V

Qco

ll,

pair

s

V, Eremin … , PTI, RD50, Oct. 2006

0

20

40

60

80

0 2 4 6 8 10Time, ns

Cu

rre

nt,

m

kA

0

20

40

60

0 2 4 6 8 10Time, ns

Cu

rre

nt,

m

kA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

3.E+4

4.E+4

4.E+4

5.E+4

5.E+4

0 0.002 0.004 0.006 0.008 0.01 0.012 0.014 0.016

x.cm

E,V/

cm

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.80E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5200

W1, cm 0.0035Eb, V/cm 2200Wb, cm 0.015E2, V/cm 21808.696W2, cm 0.0115

Detector W12-SMG-19epi, 150um Neutron irradiated: Feq = 1.7 E15 cm-2annealed 80C@30 minRT; -10C

Operational parameters:V = 174V

Extracted valuesTau tr = 1.5 ns

Cooling effect in silicon irradiated epi detectors

-10C

RT-10C

RT

V, Eremin … , PTI, RD50, Oct. 2006

TCT data for proton irradiated silicon epi detector

Detector W12-SMG-22epi, 150um Proton irradiated: Feq = 7 E14 cm-2Annealing: 80C@60min

Operational parameters:T = 293K

Extracted valuesVfd = 54V

series # Vb, V Ir, nA Qc, prs

0 9 -1 1.11E+051 36 -2 2.79E+052 63 -4 3.26E+053 90 -5 4.22E+054 117 -5 4.84E+055 145 -5 5.85E+056 171 -6 8.23E+057 198 -6 1.01E+068 226 -5 1.11E+069 254 -5 1.20E+06

10 281 -6 1.34E+0611 309 -5 1.40E+0612 336 -5 1.44E+0613 362 -6 1.44E+0614 390 -6 1.49E+0615 418 -5 1.51E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

0.0E+00

5.0E-05

1.0E-04

1.5E-04

2.0E-04

2.5E-04

0 2 4 6 8 10 12 14

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

Collected charge

0.0E+00

1.0E+06

2.0E+06

3.0E+06

4.0E+06

0 50 100 150Bias, V

Qco

ll, p

airs

Amax vs. reverse vias

-0.00005

0

0.00005

0.0001

0.00015

0.0002

0.00025

0 50 100 150

V (Volt)A

max

(mV)

V, Eremin … , PTI, RD50, Oct. 2006

TCT data for silicon epi annealed detector

Detector W12-SMG-22-10epi, 150um Proton irradiated: Feq = 7 E14 cm-2Annealing: 80C@60min

Operational parameters:T = 263K

Extracted valuesVfd = 92V

0.0E+00

5.0E-06

1.0E-05

1.5E-05

2.0E-05

2.5E-05

3.0E-05

0 5 10 15

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

Collected charge

0.0E+005.0E+041.0E+051.5E+052.0E+052.5E+053.0E+053.5E+054.0E+054.5E+055.0E+05

0 50 100 150 200

Bias, V

Qco

ll,

pair

s

Amax vs. reverse vias

0.0E+00

5.0E-06

1.0E-05

1.5E-05

2.0E-05

2.5E-05

3.0E-05

0 100 200

V (Volt)

Am

ax

(m

V)

series # Vb, V Ir, nA Qc, prs

0 9 0 6.48E+041 19 0 3.22E+042 30 0 6.92E+043 40 -1 1.44E+054 51 -1 2.07E+055 61 -1 1.71E+056 72 -2 2.72E+057 82 -2 3.41E+058 93 -2 3.61E+059 104 -1 3.55E+05

10 114 -2 4.09E+0511 125 -2 4.65E+0512 135 -1 4.14E+0513 146 -2 4.39E+0514 156 -2 4.63E+0515 167 -2 4.58E+050 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

V, Eremin … , PTI, RD50, Oct. 2006

0

2

4

6

8

10

12

14

0 2 4 6 8 10

Time, ns

Cu

rre

nt,

mk

A

0.E+0

1.E+3

2.E+3

3.E+3

4.E+3

5.E+3

6.E+3

7.E+3

8.E+3

9.E+3

1.E+4

0 0.002 0.004 0.006 0.008 0.01 0.012 0.014 0.016

x.cm

E,V/

cm0

20

40

60

80

100

120

0 2 4 6 8 10

Time, ns

Cu

rre

nt,

m

kA

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm^3] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.80E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5200

W1, cm 0.0035Eb, V/cm 2200Wb, cm 0.015E2, V/cm 21808.696W2, cm 0.0115

Detector W12-SMG-22epi, 150um Proton irradiated: Feq = 7 E14 cm-2annealed 80C@30 minRT; -10C

Operational parameters:V = 92V

Extracted valuesTau tr = 4 ns

Cooling effect in proton irradiated epi silicon detectors

-10C

RT

-10C

RT

V, Eremin … , PTI, RD50, Oct. 2006

0.0E+00

1.0E-05

2.0E-05

3.0E-05

4.0E-05

5.0E-05

6.0E-05

7.0E-05

5 10 15 20 25 30

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

series # Vb, V Ir, nA Qc, prs

0 7 -20 1.80E+051 24 -56 4.87E+052 44 -83 6.13E+053 64 -103 7.91E+054 83 -122 8.89E+055 103 -138 9.40E+056 124 -155 1.09E+067 143 -168 1.35E+068 164 -181 1.51E+069 185 -191 1.66E+06

10 206 -200 1.84E+0611 227 -210 1.91E+0612 248 -220 2.00E+0613 268 -228 2.09E+0614 289 -236 2.15E+0615 310 -246 2.21E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

Detector W187-SMG-9MCZ, 300um Proton irradiated: 26 MeV, Feq = 4.2 E14 cm-2Annealing: no

Operational parameters:T = 293K

Extracted valuesVfd = 206V

TCT data for silicon MCZ as irradiated detector

Amax vs. reverse vias

0.0E+00

1.0E-05

2.0E-05

3.0E-05

4.0E-05

5.0E-05

6.0E-05

7.0E-05

0 100 200 300 400

V (Volt)

Am

ax

(m

V)

Collected charge

0.0E+00

5.0E+05

1.0E+06

1.5E+06

2.0E+06

2.5E+06

0 50 100 150 200 250 300 350 400Bias, V

Qco

ll,

pair

s

V, Eremin … , PTI, RD50, Oct. 2006

0

5

10

15

20

25

30

35

40

45

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cu

rren

t, m

kA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

0 0.005 0.01 0.015 0.02 0.025 0.03 0.035

x.cm

E,V

/cm

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.80E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5200

W1, cm 0.0035Eb, V/cm 2200Wb, cm 0.015E2, V/cm 21808.696W2, cm 0.0115

Detector W187-SMG-9MCZ, 300um Proton irradiated: 26 MeV, Feq = 4.2 E14 cm-2Annealing: no

Operational parameters:V = 184 VT = 293K

Extracted valuesTau tr = 6 nsVfd = 180V

E(x) reconstruction for silicon MCZ as irradiated detector

V, Eremin … , PTI, RD50, Oct. 2006

0.0E+00

5.0E-06

1.0E-05

1.5E-05

2.0E-05

2.5E-05

3.0E-05

3.5E-05

4.0E-05

5 10 15 20 25 30

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

series # Vb, V Ir, nA Qc, prs

0 9 -1 8.42E+041 30 -1 2.55E+052 52 -3 3.94E+053 74 -3 3.95E+054 95 -3 4.83E+055 117 -4 6.24E+056 139 -5 7.35E+057 160 -5 7.91E+058 182 -5 8.97E+059 204 -4 9.05E+05

10 226 -5 9.48E+0511 248 -5 9.97E+0512 269 -6 1.08E+0613 290 -6 1.14E+0614 313 -5 1.14E+0615 334 -6 1.12E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

TCT data for silicon MCZ as irradiated cooled detector

Detector W187-SMG-9MCZ, 300um Proton irradiated: 26 MeV, Feq = 4.2 E14 cm-2Annealing: no

Operational parameters:T = 263K

Extracted valuesVfd = 180V

Amax vs. reverse vias

0.0E+00

5.0E-06

1.0E-05

1.5E-05

2.0E-05

2.5E-05

3.0E-05

3.5E-05

4.0E-05

0 100 200 300 400

V (Volt)

Am

ax

(m

V)

Collected charge

0.0E+00

2.0E+05

4.0E+05

6.0E+05

8.0E+05

1.0E+06

1.2E+06

0 50 100 150 200 250 300 350 400Bias, V

Qco

ll,

pair

s

V, Eremin … , PTI, RD50, Oct. 2006

0

5

10

15

20

25

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cur

rent

, mkA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

0 0.005 0.01 0.015 0.02 0.025 0.03 0.035

x.cm

E,V

/cm

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -1.20E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5500

W1, cm 0.0022Eb, V/cm 3000Wb, cm 0.016E2, V/cm 18466.102W2, cm 0.0118

Detector W187-SMG-9MCZ, 300um Proton irradiated: 26 MeV, Feq = 4.2 E14 cm-2Annealing: no

Operational parameters:V = 184 VT = 263K

Extracted valuesTau tr = 6 nsVfd = 180V

E(x) reconstruction for silicon MCZ as irradiated cooled detector

V, Eremin … , PTI, RD50, Oct. 2006

0.0E+00

1.0E-05

2.0E-05

3.0E-05

4.0E-05

5.0E-05

6.0E-05

0 5 10 15 20 25 30

time, ns

curr

ent,

A

Series1

Series2

Series3

Series4

Series5

Series6

Series7

Series8

Series9

Series10

Series11

Series12

Series13

Series14

Series15

Series16

Series17

Series18

Series19

series # Vb, V Ir, nA Qc, prs

0 6 -29 1.23E+051 19 -60 4.08E+052 33 -79 5.99E+053 48 -95 7.43E+054 62 -109 8.71E+055 77 -122 1.06E+066 92 -132 1.16E+067 107 -144 1.27E+068 122 -155 1.36E+069 137 -166 1.50E+06

10 152 -176 1.61E+0611 167 -186 1.79E+0612 184 -194 1.85E+0613 199 -204 1.94E+0614 212 -216 2.01E+0615 227 -229 2.13E+060 0 0 0.00E+000 0 0 0.00E+00

19 0 0 0.00E+00

Collected charge

0.0E+00

5.0E+05

1.0E+06

1.5E+06

2.0E+06

2.5E+06

0 50 100 150 200 250 300

Bias, V

Qco

ll,

pair

s

Amax vs. reverse vias

0.0E+00

1.0E-05

2.0E-05

3.0E-05

4.0E-05

5.0E-05

6.0E-05

0 100 200 300

V (Volt)A

ma

x (

mV

)

Detector W187-SMG-2MCZ, 300um Proton irradiated: 26 MeV, Feq = 4.2 E14 cm-2Annealing: 80C, 12 min

Operational parameters:T = 293K

Extracted valuesVfd = 180V

TCT data for silicon MCZ annealed detector

V, Eremin … , PTI, RD50, Oct. 2006

0

10

20

30

40

50

60

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cur

rent

, mkA

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

3.E+4

0 0.005 0.01 0.015 0.02 0.025 0.03 0.035

x.cm

E,V

/cm

E(x) reconstruction for silicon MCZ annealed detector

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.90E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

E1, V/cm 5100

W1, cm 0.0052Eb, V/cm 2100Wb, cm 0.015E2, V/cm 25202.041W2, cm 0.0098

Detector W187-SMG-2MCZ, 300um Proton irradiated: 26 MeV, Feq = 4.2 E14 cm-2Annealing: 80C, 12 min

Operational parameters:V = 184VT = 293K

Extracted valuesTau tr = 6 ns

V. Eremin, RD50, October 06

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.80E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5200

W1, cm 0.0035Eb, V/cm 2200Wb, cm 0.015E2, V/cm 21808.696W2, cm 0.0115

MCZ, 300um Proton irradiated: 26 MeV, 4.2 E14 cm-2W187-SMG-9: non annealedW187-SMG-2: annealed 80C@12 min

Operational parameters:V = 184 VT = 293K

Extracted valuesTau tr = 6 nsVfd = 180V

Annealing effect in silicon MCZ detectors

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

3.E+4

0 0.005 0.01 0.015 0.02 0.025 0.03 0.035

x.cm

E,V/

cm

0

5

10

15

20

25

30

35

40

45

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cu

rre

nt,

mk

A

0

10

20

30

40

50

60

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cu

rre

nt,

mk

A

non annealed

annealed 80C@12 min

non annealed

annealed 80C@12 min

V, Eremin … , PTI, RD50, Oct. 2006

Sample parameters Constantsd [cm] 3.00E-02

Uc[V] 0Neff [1/cm 3̂] 0.00E+00

tau(e), [s] 6.00E-09tau(h), [s] 5.00E-09TCT moden[cm-1] -2.80E+06

Ub [V] 184

a [1/cm] 5.64E+03

Temper. [K] 293

Step [ns] 0.1

Calculated values System functionE1, V/cm 5200

W1, cm 0.0035Eb, V/cm 2200Wb, cm 0.015E2, V/cm 21808.696W2, cm 0.0115

Detector W187-SMG-9MCZ, 300um Proton irradiated: 26 MeV, Feg = 4.2 E14 cm-2Annealing: no

Operational parameters:V = 184 V

Extracted valuesTau tr = 6 nsVfd = 180V

Effect of MCZ detectors cooling

0

5

10

15

20

25

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cu

rre

nt,

mk

A 263K

0

5

10

15

20

25

30

35

40

45

0 2 4 6 8 10 12 14 16 18 20

Time, ns

Cu

rre

nt,

mk

A

293K

0.E+0

5.E+3

1.E+4

2.E+4

2.E+4

3.E+4

0 0.005 0.01 0.015 0.02 0.025 0.03 0.035

x.cm

E,V

/cm

263K 293K

V, Eremin … , PTI, RD50, Oct. 2006

Conclusions

1. The current response of MCZ and epi- silicon based detectors is can be explained in the frame of double peak electric field distribution modelwith “active” electricaly neutral bias region.

2. Epi- detectors exhibit the space charge sign inversion due to high irradiation fluence or reverse annealing with high resistivity base

3. The SCSI is observed for MCZ and epi- based detectors at Feq > 4.5e14cm-3

4. The SCSI is stimulated by the long term annealing in MCZ and epi detectors

4. In MCZ based detectors the long term annealing leads to increase of the electric field at n+ contact and reduction at p+ contact.

5. The electric field in the base region is insensitive to the annealing.

3. The detector cooling redistributes the electric field with a trend of its better uniformity:

the electric field at the detector contacts reduces the field in the thickness of neutral base slightly increasesV, Eremin … , PTI, RD50, Oct. 2006