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Sales and Technology Service www.svesinc.com System Specifications TEL - Alpha 8S Vertical H2 Anneal/Reflow APCVD Furnace
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Transcript of System - Silicon Valley Equipment Source,...
Sales and Technology Service
www.svesinc.com
System Specifications
TEL - Alpha 8S Vertical H2 Anneal/Reflow APCVD Furnace
WWW.SVESINC.COM
Sales and Technology Service
894-B Faulstich Ct.San Jose CA 95112408-956-9268
TEL - Alpha 8S Vertical H2 Anneal/Reflow APCVD Furnace
Model TTEL - Alpha 8S Vertical H2 Anneal/ ReflowAPCVDFurnace
Vintage Jun1996
Wafer Size 200mm (8”)
Configuration•TELAlpha8SVerticalH2Anneal/ReflowAPCVDFurnace•w/TS4000Controller,N2LL&170WaferLoad
• OEM: TEL •ToolModel:ALPHA8S.HeaterModel/PartNo:VMM-40-101•Process:Reflow•SoftwareVersion:TS-4000-1996•SystemPowerRating:110ACOnePhase/208AC•LoadingConfiguration:6Loader
•SystemConfiguration:•VerticalAP-SystemALPHA-8S•ReflowFurnace
•MainSystem:•TS4000Controller•PhotohelicGauge• Boat Elevator •WaferLoadAutomation•16CassetteStocker•TemperatureController(M121)•FurnaceMonitor,PowerControlUnit•RemoteUtility&GasCabinet•InnerT/CforRationMix•AutoShutter
WWW.SVESINC.COM
Sales and Technology Service
894-B Faulstich Ct.San Jose CA 95112408-956-9268
•GasSystem(O2,H2,N2,)
•Options:•SignalTower•PitchChangeMechanism•UPS•GEMCommunication
•N2LoadLockAmbientControlx1•Quartzware•LoadSize170Wafers•LoadLockPurgeSystem•ProcessGasO2,H2,N2,•GasType-ConventionGasSystem•TubingMaterial-StainlessSteel•TubingFinish-Electro-Polish•ManualValve-Fujikin•FittingType-VCR/UJR•Air-OperatedValve-Fujikin•Filter-Millipore•Regulator-Veriflo•MFC-Aera•PressureTransducer-MilliporeorNAGANO
•PartsNotSoldWithSystem:•GasCabinetSharedwithAnotherSystem.Notsoldwithtool.
•RemoteComponents:•UtilityBoxx1.PowerRating:110/208AC.Soldwithtool.•GasBoxx1.Soldwithtool•Transformerx1.PowerRating:110AC-1.Soldwithtool.
WWW.SVESINC.COM
Sales and Technology Service
894-B Faulstich Ct.San Jose CA 95112408-956-9268
© 2015 Silicon Valley Equipment Source, Inc. DISCLAIMER:****DEFACILITIZATION, DISASSEMBLY, DECONTAMINATION, DEINSTALLATION,RIGGING, PACKING, CRATING AND TRANSPORTATION IS AT THE COST AND RESPONSIBILITY OF THE BUYER USING THE Silicon Valley Equipment Source, Inc. APPROVED VENDORS.****NOTE: Sale is on an ‘’as-is, where-is’’ basis without a warranty of any kind’’.
