Survey of MEMS, MOEMS, Optoelectronic and Other Solid State Devices Nathaniel J. C. Libatique, Ph.D....
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Transcript of Survey of MEMS, MOEMS, Optoelectronic and Other Solid State Devices Nathaniel J. C. Libatique, Ph.D....
Survey of MEMS, MOEMS,
Optoelectronic and Other Solid State
DevicesNathaniel J. C. Libatique, [email protected]
OptoelectronicsOptoelectronics
Flash MemoryFlash Memory Laser DiodesLaser Diodes Charge Coupled DevicesCharge Coupled Devices Waveguide ModulatorsWaveguide Modulators Avalanche PhotodetectorsAvalanche Photodetectors High Electron Mobility TransistorsHigh Electron Mobility Transistors MemristorsMemristors
MEMS and MOEMSMEMS and MOEMS
Labs on a chip and MicrofluidicsLabs on a chip and Microfluidics Digital Light ProcessorDigital Light Processor AccelerometersAccelerometers Optical SwitchesOptical Switches Pressure SensorsPressure Sensors
Other DevicesOther Devices
Peltier CoolersPeltier Coolers High Density Magnetic Storage High Density Magnetic Storage
(GMR)(GMR) SQUIDsSQUIDs Chemo-Optoelectronic Sensors: Chemo-Optoelectronic Sensors:
Micro-assaysMicro-assays
HDDsHDDs
http://www.pcworld.com/article/128400/hitachi_introduces_1terabyte_hard_drive.html
Hitachi Introduces 1-Terabyte Hard Drive
Colossal storage reaches new milestone with a drive that holds 1000 gigabytes.Melissa J. Perenson, PC World
Jan 5, 2007 1:00 pm
Hitachi Global Storage Technologies is first to the mat with an announcement of a 1-terabyte hard disk drive. Industry analysts widely expected a 1TB drive to ship sometime in 2007; Hitachi grabbed a head start on the competition by announcing its drive today, just before the largest U.S. consumer electronics show starts next week.
E-InkE-Ink
http://www.eink.com/technology/howitworks.html
MEMSMEMS
http://mems.sandia.gov/gallery/images/m10.jpg
HomeworkHomework
Collect paper(s) focused on a particular Collect paper(s) focused on a particular device and prepare for one or several device and prepare for one or several discussions about its:discussions about its: Function and applicationsFunction and applications Principle of operationPrinciple of operation FabricationFabrication Limits of operation (dimensional limits, Limits of operation (dimensional limits,
fabrication limits, noise floor, speed limits, fabrication limits, noise floor, speed limits, etc)etc)
Potential new applications (e.g. biomedical)Potential new applications (e.g. biomedical)
http://userweb.elec.gla.ac.uk/k/kalna/scheme_pHEMT.gif
HEMTHEMT
• Applications in low noise, high bandwidth applications• Carriers provided in doped AlGaAs• AlGaAs ternary has larger bandgap than GaAs• Conduction in low-impurity InGaAs channel
Flash MemoryFlash Memory
NOR Flash Floating Gate TransistorFloating Gate stores charge and modifies device characteristics
Applications include:• Spectroscopy• WDM communications• Metrology
Tunable LasersTunable Lasers
Sandia MEMS ProcessSandia MEMS Process
Cross-section diagram of the SUMMiT V™ Process layers: 4 structural layers, 1 ground/interconnect layer, and 4 sacrificial oxide layers.
Double Ratchet ActuatorDouble Ratchet Actuator
AutoCAD layout
After Sacrificial Oxide 1 After Sacrificial Oxide 1 EtchEtch
After Sacrificial Oxide 2 After Sacrificial Oxide 2 EtchEtch
After Polysilicon 2 EtchAfter Polysilicon 2 Etch
After Sacrifial Oxide 3 After Sacrifial Oxide 3 EtchEtch
After Polysilicon 3 EtchAfter Polysilicon 3 Etch
After Polysilicon 4 EtchAfter Polysilicon 4 Etch
Final ReleaseFinal Release