Surface Analysis Components - Fisher Scientific.pdfSurface Analysis Components ... - Very low...
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A comprehensive range of analysers and sources with integrated data system Surface Analysis Components Analyze • Detect • Measure • Control ™ surface analysis
Transcript of Surface Analysis Components - Fisher Scientific.pdfSurface Analysis Components ... - Very low...
A comprehensive range of analysers and sources with integrated data system
Surface Analysis Components
Analyze • Detect • Measure • Control™
s u r f a c e a n a l y s i s
Surface Analysis Com
ponents
Thermo Electron’s range ofsurface analysis components aredesigned to enhance thecapabilities of electronspectroscopy instruments.
The Alpha110 analyser andassociated sources can becombined with Thermo’sAvantage acquisition andprocessing software, allowingconstruction of a fully integratedinstrument with the benefits of aprofessional data system.
• Electron energy analysers
• X-ray sources
• UV sources
• FEG sources
• Auger electron guns
• Ion sources
• Integrated data system
Alpha110A true 180o electron energy analyser, theAlpha110 is a compact, high-performance,tool for XPS, SAXPS, ARXPS, AES, UPS andISS applications.
• Excellent energy resolution• Alpha-plates minimise peak tailing• Variable slits• High sensitivity• Precise small area capability
AvantageData acquisition and processing system.
• Windows™ based• Control of components• User friendly
XR3 Twin Anode X-ray Source400 W high emission, low maintenancesource.
• Al and Mg anodes• Eliminate stray peaks
- Very low crosstalk <0.35%- Silver substrate
XR5 Microfocused X-rayMonochromatorTwin crystal monochromator with small spotelectron gun for maximum sensitivity fromselected areas.
• Excellent resolution in XPS• Source-defined SAXPS• Moveable anode for longer life
UVL High IntensityUltra-violet SourceSmall spot source with integral tiltmechanism.
• High photon flux• He I and He II modes• 2-stage differential pumping
FEG1000 Field Emission Electron GunHigh spatial resolution field emission gunsuitable for high sensitivity AES, SAM andSEM.
• 95 nm spot size• High current density• SEM and SAM imaging
LEG62 Auger Electron GunElectron gun for AES, SAM and SEMapplications.
• 3 µm spot size • Pulse counting and differential Auger • Static and scanning Auger
EX05 Differentially Pumped Ion GunHigh performance gun for precision depthprofiling.
• Uniform depth profiles• Energy range: 100 eV - 5 keV• SIMS• ISS• Charge neutralization• Beam rastering
EX03 Ion Cleaning GunCross ionisation gun for broad area cleaningand uniform etch profiles.
• Broad static beam• Energy range: 300 eV - 3 keV• Compact design
Surface AnalysisComponents
Full technical descriptions of Thermo Electron components are availablein the following documents, these can be obtained from your localThermo Electron office (see back page):
AN30054 - Alpha110AN30005 - AvantageAN30056 - XR5AN30057 - XR3AN30058 - UV Source
AN30059 - FEG1000AN30060 - LEG62AN30061 - EX05AN30062 - EX03
BR30006_E 04/04C
Thermo Electron, Surface Analysis Instruments, East Grinstead, UK is ISO certified
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Alpha110 and the Avantage Data System
Alpha110The analyser is designed for high-performance XPS, small-area XPS, angleresolved XPS, Auger electron spectroscopy,UPS and ISS. Key parts of the analyserinclude:
• 110 mm mean radius hemisphericalanalyser
• Full 180° deflection• Alpha plates at the analyser entrance• Multi-element input lens• Variable slits• Small area capability• ARXPS capability• ISS capability• 7 channeltron detector
The user can set analyser resolution byselecting the appropriate analyser passenergy, by selecting one of four analyserslits or a combination of both.
Avantage datasystemAvantage provides simultaneous control ofcomponents from Thermo Electron, includingthe Alpha110 electron analyser, FEG1000field emission electron gun and the EX05sample cleaning and depth profiling source.Sample stages or manipulators can also becontrolled for precise sample alignment.Avantage provides full control ofexperiments allowing unattended operationof instruments.
Avantage is the same data systemfeatured on the range of high-performanceinstruments such as Theta Probe,MICROLAB 350 and ESCALAB 250. Thisprovides custom built surface analysisinstruments with the type of integratedoperation that is normally only found onhigh-performance off the shelf instruments.
Avantage is based on a Windows XPProTM or Windows 2000TM platform allowingeasy integration with report writingsoftware, laboratory management systemsand computer networks.
